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Sensors 2007, 7(11), 2846-2859; doi:10.3390/s7112846

Quantitative Accelerated Life Testing of MEMS Accelerometers

1,* , 1
1 National Institute for R&D in Microtechnologies –IMT-Bucharest, 126A, Erou Iancu Nicolae street, 077190, Bucharest, Romania 2 Centre Spatial de Liège - CSL (Université de Liège), Place du 20-Août, 9 à B-4000 Liège, Belgium
* Author to whom correspondence should be addressed.
Received: 27 September 2007 / Accepted: 14 November 2007 / Published: 20 November 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variants of mechanical stressare used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tiltingand high temperature is used. Tilting is appropriate as application-driven stress, because thetilt movement is a natural environment for devices used for automotive and aerospaceapplications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The testresults demonstrated the excellent reliability of the studied devices, the failure rate in the“worst case” being smaller than 10-7h-1.
Keywords: reliability; accelerometers; MEMS; tilting; vibration. reliability; accelerometers; MEMS; tilting; vibration.
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Bâzu, M.; Gălăţeanu, L.; Ilian, V.E.; Loicq, J.; Habraken, S.; Collette, J.-P. Quantitative Accelerated Life Testing of MEMS Accelerometers. Sensors 2007, 7, 2846-2859.

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