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Sensors 2007, 7(12), 3012-3026; doi:10.3390/s7123012

Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces

1
College of Science, China Agricultural University, Beijing 100083, China
2
State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China
*
Author to whom correspondence should be addressed.
Received: 5 November 2007 / Accepted: 27 November 2007 / Published: 29 November 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract

The influence of damping on the dynamical behavior of the electrostaticparallel-plate and torsional actuators with the van der Waals (vdW) or Casimir force(torque) is presented. The values of the pull-in parameters and the number of theequilibrium points do not change whether there is damping or not. The ability ofequilibrium points is varied with the appearance of damping. One equilibrium point is anunstable saddle with a different damping coefficient, the other equilibrium point is astable node when the damping coefficient is greater than some critical value, andotherwise it is a stable focus. Then there are two heteroclinic orbits passing from theunstable saddle point to the stable node or focus. View Full-Text
Keywords: damping; Casimir force (torque); vdW force (torque); heteroclinic orbit. damping; Casimir force (torque); vdW force (torque); heteroclinic orbit.
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Lin, W.-H.; Zhao, Y.-P. Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces. Sensors 2007, 7, 3012-3026.

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