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Sensors 2007, 7(9), 1757-1765; doi:10.3390/s7091757

Study of the origin of bending induced by bimetallic effect on microcantilever

BioNanoMechanics Lab, National Centre for Microelectronics, IMM-CNM, CSIC Isaac Newton 8 (PTM), Tres Cantos 28760, Madrid, Spain
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Received: 30 July 2007 / Accepted: 4 September 2007 / Published: 5 September 2007
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Abstract

An analytical model for predicting the deflection and force of a bimaterialcantilever is presented. We introduce the clamping effect characterised by an axial loadupon temperature changes. This new approach predicts a non linear thermal dependence ofcantilever strain. A profilometry technique was used to measure the thermal strain.Comparison with experimental results is used to verify the model. The concordance of theanalytical model presented with experimental measurements is better than 10% View Full-Text
Keywords: cantilever; stress; strain; temperature; Stoney’s equation; axial force; profile. cantilever; stress; strain; temperature; Stoney’s equation; axial force; profile.
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Ramos, D.; Mertens, J.; Calleja, M.; Tamayo, J. Study of the origin of bending induced by bimetallic effect on microcantilever. Sensors 2007, 7, 1757-1765.

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