Synthesis ZrON Films with Raman-Enhancement Properties Using Microwave Plasma
Abstract
:1. Introduction
2. Materials and Methods
3. Results
ZrON Films’ Characterization
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Element | Zr | O | N |
---|---|---|---|
Quantity,% | 17.66 | 77.32 | 5.02 |
Mode | [25] | This Work |
---|---|---|
1 | 103 (Ag) | |
2 | 175 (Bg) | |
7 | 180 (Ag) | 185 |
4 | 190 (Ag) | 197 |
5 | 224 (Bg) | |
6 | 313 (Bg) | |
7 | 317 (Ag) | |
8 | 330 (Bg) | 342 |
9 | 345 (Ag) | 354 |
10 | 381 (Ag) | 387 |
11 | 382 (Bg) | |
12 | 466 (Ag) | 483 |
13 | 489 (Bg) | 510 |
14 | 533 (Bg) | 542 |
15 | 548 (Ag) | 565 |
16 | 601 (Bg) | 625 |
17 | 631 (Ag) | 648 |
18 | 748 (Bg) |
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Muslimov, A.; Antipov, S.; Gadzhiev, M.; Kanevsky, V. Synthesis ZrON Films with Raman-Enhancement Properties Using Microwave Plasma. Metals 2023, 13, 1927. https://doi.org/10.3390/met13121927
Muslimov A, Antipov S, Gadzhiev M, Kanevsky V. Synthesis ZrON Films with Raman-Enhancement Properties Using Microwave Plasma. Metals. 2023; 13(12):1927. https://doi.org/10.3390/met13121927
Chicago/Turabian StyleMuslimov, Arsen, Sergey Antipov, Makhach Gadzhiev, and Vladimir Kanevsky. 2023. "Synthesis ZrON Films with Raman-Enhancement Properties Using Microwave Plasma" Metals 13, no. 12: 1927. https://doi.org/10.3390/met13121927