Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content
Abstract
1. Introduction
2. Experimental
2.1. Coating Deposition
2.2. Coating Characterization
3. Results and Discussion
3.1. Microstructure and Mechanical Properties
3.2. Tribological Properties
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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| Process | Parameters | Values |
|---|---|---|
| Ar glow discharge | Bias voltage (V) | –1000 |
| Ar flow rate (sccm) | 300 | |
| Time (min) | 15 | |
| Ion etching | Bias voltage (V) | 800 |
| Cathode current (A) | 100 | |
| Time (min) | 5 | |
| Coating deposition | Working pressure (Pa) | 0.7 |
| N2 partial pressure (Pa) | 0.11, 0.14, 0.17, 0.25, 0.35 | |
| Bias voltage (V) | –100 | |
| Sputtering power (kW) | 1.0 | |
| Pulse width (us) | 150 | |
| Frequency (Hz) | 400 | |
| Duty cycle | 6% | |
| Time (min) | 180 |
| Temperature | N2 Partial Pressure | Chemical Composition (at.%) | ||||
|---|---|---|---|---|---|---|
| Mo | Cu | V | N | O | ||
| 25 °C | 0.11 Pa | 36.20 | 14.60 | 2.25 | 33.18 | 13.77 |
| 0.25 Pa | 33.43 | 14.55 | 2.55 | 38.00 | 11.48 | |
| 400 °C | 0.11 Pa | 20.82 | 6.39 | 1.68 | 9.35 | 61.77 |
| 0.25 Pa | 22.26 | 8.01 | 1.45 | 12.24 | 56.03 | |
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Mei, H.; Wang, R.; Zhong, X.; Dai, W.; Wang, Q. Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content. Coatings 2018, 8, 24. https://doi.org/10.3390/coatings8010024
Mei H, Wang R, Zhong X, Dai W, Wang Q. Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content. Coatings. 2018; 8(1):24. https://doi.org/10.3390/coatings8010024
Chicago/Turabian StyleMei, Haijuan, Rui Wang, Xing Zhong, Wei Dai, and Qimin Wang. 2018. "Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content" Coatings 8, no. 1: 24. https://doi.org/10.3390/coatings8010024
APA StyleMei, H., Wang, R., Zhong, X., Dai, W., & Wang, Q. (2018). Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content. Coatings, 8(1), 24. https://doi.org/10.3390/coatings8010024
