Integrated Sensors Based on Silicon-on-Insulator (SOI)

Dear Colleagues,

The need for miniaturized sensors and MEMS becomes ever more pressing considering the emergence of Internet of Things (IoT) applications, autonomous cars, structural health monitoring, smart maintenance and logistics in Industry 4.0, point-of-care medicine, smart cities, etc. Over the years, Silicon-on-Insulator (SOI) has proven to be a very adequate technology for the integration of high-performance sensors and MEMS, as well as of their analog and digital interfaces. The benefits of specific SOI features have been exploited, such as ultra-low-power, high-temperature reliability, radiation hardness, to name but a few. SOI research and industrial platforms have further enabled CMOS compatibility with novel materials and structures for sensing applications beyond traditional MEMS micromachining processes. Research and commercial developments have addressed numerous physical and chemical sensing capabilities on SOI substrates, including temperature, light (from UV to IR), magnetic, flow, pressure, stress, gas, biomolecules, and physiological parameters.

The present Special Issue seeks to regroup and publish innovative works exploring novel solutions, concepts, and implementations of integrated sensors based on SOI technology, at any level from their fabrication to their design, simulation, measurement, modeling, optimization, circuit interface, signal processing, networking, or applications. Comparisons of integrated vs. hybrid or micro- vs nanorealizations are welcome, most notably in terms of multipurpose platforms, performance levels (sensitivity, signal/noise, power consumption, cost issues, etc.).

Prof. Denis Flandre
Dr. Nicolas Andre
Guest Editors

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• IoT, 5G Platforms
• Health, Medicine
• Automotive, Aeronautics, Space
• Smart Monitoring, Energy Harvesting
• Implantable, On-Body or Flexible Electronics, Wearables