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Journal: Molecules, 2023
Volume: 28
Number: 7660
Article:
Evolution Mechanism of Sputtered Film Uniformity with the Erosion Groove Size: Integrated Simulation and Experiment
Authors:
by
Guo Zhu, Yutong Yang, Baijun Xiao and Zhiyin Gan
Link:
https://www.mdpi.com/1420-3049/28/22/7660
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