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Journal: Sensors, 2013
Volume: 13
Number: 13178

Article: A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings
Authors: by Huan Liu, Shuming Yang, Yulong Zhao, Zhuangde Jiang, Yan Liu and Bian Tian
Link: https://www.mdpi.com/1424-8220/13/10/13178

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