Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review
Abstract
:1. Introduction
2. Micromachined Accelerometer Principles
3. MEMS Accelerometers with Novel Mechanical Design
3.1. MEMS Accelerometers with a Low Spring Constant
3.1.1. MEMS Accelerometers with Geometric Anti-Spring (GAS)
3.1.2. MEMS Accelerometers with Materials of Low Young’s Modulus
3.2. MEMS Accelerometers with a Large Proof Mass
4. MEMS Accelerometers with Vacuum Packaging
5. MEMS Accelerometers with a Low Noise Interface Circuit
6. MEMS Accelerometers with Signal Readout Methods of Higher Scale Factor
6.1. MEMS Accelerometers with High Aspect Ratio Capacitive Gaps
6.2. Optical MEMS Accelerometers
6.2.1. Resonant MEMS Accelerometers with Frequency Readout
6.2.2. Resonant MEMS Accelerometers with Amplitude Ratio Readout (Based on Mode Localization Effect)
6.2.3. MEMS Tunneling Accelerometers
6.2.4. MEMS-Based Electrochemical Accelerometers
6.2.5. Electrostatically Levitated MEMS Accelerometers
6.2.6. MEMS Accelerometer Using Time Transduction
7. Discussion
8. Conclusions
Funding
Conflicts of Interest
References
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Parameters | Navigation Grade | Tactical Grade | Consumer Grade |
---|---|---|---|
Input range | ±1 g | ±5 g | ±50 g |
Noise | <50 μg | <100 μg | <50 mg |
Working Frequency | 100 Hz | 100 Hz | 400 Hz |
Sensitivity | <100 μg | <200 μg | <50 mg |
Nonlinearity | <0.05% | <0.1% | <2% |
Max shock input | >10 g | >20 g | >2000 g |
Partial axis sensitivity | <0.1% | <0.3% | <5% |
Company | Product | Noise Floor | Dynamic Range/Full Scale Range | Bandwidth |
---|---|---|---|---|
HP | --- | 10 ng/√Hz (at 1–200 Hz) | 120 dB | 1–200 Hz |
Colibrys | SF1500 | 300 ng/√Hz (at 10–1000 Hz) | 117 dB | 0–1500 Hz |
SF2005S.A | 800 ng/√Hz (at 10–1000 Hz) | 111 dB | 0–1000 Hz | |
SF3000 | 300 ng/√Hz (at 10–1000 Hz) | 120 dB | 0–1000 Hz | |
SI1000 | 700 ng/√Hz (at 0.1–100 Hz) | 108.5 dB | 0–550 Hz | |
Kinemetrics | EpiSensor ES-T | 60 ng/√Hz | ±0.25 g | 0–200 Hz |
EpiSensor ES-U2 | 60 ng/√Hz | ±0.25 g | 0–200 Hz | |
EpiSensor 2 | 3 ng/√Hz (at 1 Hz) | ±0.25 g | 0–>320 Hz | |
Reftek | 131A | 14 ng/√Hz | ±3 g | 0–500 Hz |
Trimble 147A | 10 ng/√Hz | ±4 g | 0–150 Hz | |
Sercel | DSU1-508 | 15 ng/√Hz (at 10–200 Hz) | 128 dB | 0–800 Hz |
DSU-3 | 41 ng/√Hz (at 10–200 Hz) | 120 dB | 0–800 Hz | |
INOVA | ACCUSEIS SL11 | 30 ng/√Hz (at 3–400 Hz) | 118 dB | 3–400 Hz |
VECTORSEIS ML21 | 40 ng/√Hz (at 3–375 Hz) | 118 dB | 3–375 Hz |
Research Group | Noise Floor | Dynamic Range /Full Scale Range | Resonant Frequency | Type |
---|---|---|---|---|
Boom and Kamp et al. [16] | 2 ng/√Hz (at 28.1 Hz) | -- | 3–28.1 Hz | #+^ |
Middlemiss et al. [18] | 8 ng/√Hz (at 1 Hz) | -- | 2.31 Hz | #+^ |
Zhang et al. [22] | 51.8 ng/√Hz (at 1 Hz) | -- | 158 Hz | #^ |
Tang et al. [24] | 8 ng/√Hz (at 1 Hz) | +8 mg | 0.5–3 Hz | #+^ |
Pike et al. [31] | 0.25 ng/√Hz (at 0.1–10 Hz) | -- | 6 Hz | + |
Wu et al. [39] | 10–50 ng/√Hz (at 1 Hz) | ±1.4 g | 13.2 Hz | + |
Edalatfar et al. [44] | 350 ng/√Hz (at 1–5 kHz) | 135 dB | 4500 Hz | + |
Yazdi and Najafi [45] | 160 ng/√Hz | -- | <1000 Hz | + |
Aaltonen et al. [9] | 300 ng/√Hz (at 30 Hz) | ±1.5 g | 300 Hz | +^ |
Xu et al. [11] | 200 ng/√Hz (at 100 Hz) | ±1.2 g | 700 Hz | ^ |
Utz and Kraft et al. [55] | 216 ng/√Hz (at 30–40 Hz) | ±1.25 g/5 g | 5000 Hz | #- |
Kamada and Furubayashi et al. [56] | 30 ng/√Hz (at 10–300 Hz) | 116 dB | 300 Hz | #-^ |
Krishnamoorthy and Carr et al. [71] | 17 ng/√Hz (at 1 Hz) | 140 dB | 36 Hz | +^& |
Williams and Silicon Audio et al. [74] | 0.5 ng/√Hz (at 10 Hz) | 172 dB | 0.005–1.5 kHz | +& |
Lu et al. [77] | 185.8 ng/√Hz | -- | 34.5 Hz | +& |
Fourguette et al. [87] | 10 ng/√Hz | 120 dB | 80 Hz | +& |
Duo et al. [90] | 312 ng/√Hz (at 100 Hz) | -- | 100 Hz | & |
Loh et al. [92] | 40 ng/√Hz (at 40 Hz) | 85 dB (at 40 Hz) | 80-1000 Hz | +& |
Flores et al. [96] | 196 ng/√Hz | -- | 63,300 Hz | & |
Zou and Seshia [100] | 144 ng/√Hz (at <1–50 Hz) | ±0.05 g | 1–50 Hz | +^& |
Pandit and Seshia et al. [102] | 17.8 ng/√Hz (at 0.25–4 Hz) | ±1 g | 5 Hz | +^& |
Zhao and Seshia et al. [103] | 98 ng/√Hz (at 1 Hz) | ±1 g | 5 Hz | +^& |
Yin et al. [104] | 380 ng/√Hz | ±15 g | 2.7 Hz | +^& |
Zhao and Seshia et al. [116] | 680 ng/√Hz (at 0.5–3 Hz) | -- | 3 Hz | ^& |
Abdolvand and Ayazi et al. [62] | 213 ng/√Hz (at 2 Hz) | -- | 200 Hz | +^& |
Liu and Kenny [118] | 20 ng/√Hz (at 10–1000 Hz) | 90 dB | 5–1500 Hz | +^& |
Liang, Hua and Agafonov et al. [121] | 17.8 ng/√Hz (at 1.2 Hz) | -- | 1.2 Hz | & |
Deng et al. [124] | 3.2 ng/√Hz (at 0.02 Hz) | ±0.01 g | 0.2–5 Hz | & |
EI Mansouri et al. [21] | 17.02 ng/√Hz | -- | 8.7 Hz | #+^- |
Guzman Cervantes et al. [81] | 10 ng/√Hz | -- | 2000 Hz | & |
Bao et al. [85] | <1000 ng/√Hz | -- | -- | & |
Zhao et al. [86] | 42.4 ng/√Hz | -- | 29.3 Hz | & |
Shin and Kenny et al. [105] | <160 ng/√Hz | -- | -- | +^& |
HP [46]. | 10 ng/√Hz (at 10–200 Hz) | 120 dB | 1–200 Hz | +^- |
Safran Colibrys SF1500 [48] | 300 ng/√Hz (at 10–1000 Hz) | ±3 g | 0–1500 Hz | +^- |
Kinemetrics EpiSensor 2 [49] | 3 ng/√Hz (at 1 Hz) | ±0.25 g | 0–>320 Hz | +- |
Reftek Trimble 147A [50] | 10 ng/√Hz | ±4 g | 0–150 Hz | +- |
Sercel DSU1-508 [51] | 15 ng/√Hz (at 10–200 Hz) | 5 g | 0–800 Hz | +^- |
INOVA ACCUSEIS SL11 [53] | 30 ng/√Hz (at 3–400 Hz) | 118 dB | 3–400 Hz | +- |
Honeywell QA3000 [54] | <1000 ng/√Hz | ±60 g | >300 Hz | ^-+ |
Research Group | Noise Floor | Dynamic Range /Full Scale Range | Resonant Frequency | Type |
---|---|---|---|---|
Han et al. [125] | 3.0 μg/√Hz (at 0.2–10 Hz) | ±0.0029 g | 0.2–10 Hz | # |
Suzuki et al. [25] | 45.0 μg/√Hz | -- | 37 Hz | # |
Krause et al. [94] | 10.0 μg/√Hz (at 5–25 kHz) | 40 dB | >20,000 Hz | & |
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Wang, C.; Chen, F.; Wang, Y.; Sadeghpour, S.; Wang, C.; Baijot, M.; Esteves, R.; Zhao, C.; Bai, J.; Liu, H.; et al. Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review. Sensors 2020, 20, 4054. https://doi.org/10.3390/s20144054
Wang C, Chen F, Wang Y, Sadeghpour S, Wang C, Baijot M, Esteves R, Zhao C, Bai J, Liu H, et al. Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review. Sensors. 2020; 20(14):4054. https://doi.org/10.3390/s20144054
Chicago/Turabian StyleWang, Chen, Fang Chen, Yuan Wang, Sina Sadeghpour, Chenxi Wang, Mathieu Baijot, Rui Esteves, Chun Zhao, Jian Bai, Huafeng Liu, and et al. 2020. "Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review" Sensors 20, no. 14: 4054. https://doi.org/10.3390/s20144054