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Volume 21
Issue 17
10.3390/s21175775
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Article

Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage

by
Chung-Ping Chang
1,*,
Tsung-Chun Tu
1,
Siang-Ruei Huang
1,
Yung-Cheng Wang
2 and
Syuan-Cheng Chang
2
1
Department of Mechanical and Energy Engineering, National Chiayi University, Chiayi 600, Taiwan
2
Department of Mechanical Engineering, National Yunlin University of Science and Technology, Yunlin 640, Taiwan
*
Author to whom correspondence should be addressed.
Sensors 2021, 21(17), 5775; https://doi.org/10.3390/s21175775
Submission received: 22 July 2021 / Revised: 23 August 2021 / Accepted: 24 August 2021 / Published: 27 August 2021
(This article belongs to the Section Optical Sensors)
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Abstract

This investigation develops a laser encoder system based on a heterodyne laser interferometer. For eliminating geometric errors, the optical structure of the proposed encoder system was carried out with the internal zero-point method. The designed structure can eliminate the geometric errors, including positioning error, straightness error, squareness error, and Abbe error of the positioning stage. The signal processing system is composed of commercial integrated circuits (ICs). The signal type of the proposed encoding system is a differential signal that is compatible with most motion control systems. The proposed encoder system is embedded in a two-dimensional positioning stage. By the experimental results of the positioning test in the measuring range of 27 mm × 27 mm, with a resolution of 15.8 nm, the maximum values of the positioning error and standard deviation are 12.64 nm and 126.4 nm, respectively, in the positioning experiments. The result shows that the proposed encoder system can fit the positioning requirements of the optoelectronic and semiconductor industries.
Keywords: laser encoder; heterodyne laser interferometer; geometric error; positioning stage laser encoder; heterodyne laser interferometer; geometric error; positioning stage

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MDPI and ACS Style

Chang, C.-P.; Tu, T.-C.; Huang, S.-R.; Wang, Y.-C.; Chang, S.-C. Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage. Sensors 2021, 21, 5775. https://doi.org/10.3390/s21175775

AMA Style

Chang C-P, Tu T-C, Huang S-R, Wang Y-C, Chang S-C. Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage. Sensors. 2021; 21(17):5775. https://doi.org/10.3390/s21175775

Chicago/Turabian Style

Chang, Chung-Ping, Tsung-Chun Tu, Siang-Ruei Huang, Yung-Cheng Wang, and Syuan-Cheng Chang. 2021. "Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage" Sensors 21, no. 17: 5775. https://doi.org/10.3390/s21175775

APA Style

Chang, C.-P., Tu, T.-C., Huang, S.-R., Wang, Y.-C., & Chang, S.-C. (2021). Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage. Sensors, 21(17), 5775. https://doi.org/10.3390/s21175775

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