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Journal: SensorsVolume: 21Number: 698
Article: Development of an Automated Optical Inspection System for Rapidly and Precisely Measuring Dimensions of Embedded Microchannel Structures in Transparent Bonded Chips
- Authors:
- Pin-Chuan Chen1,2,*,
- Ya-Ting Lin1 and
- Huihua-Kenny Chiang4,*
- et al.
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