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Journal: Sensors, 2022
Volume: 22
Number: 5487
Article:
Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics
Authors:
by
Si-jun Kim, Sang-ho Lee, Ye-bin You, Young-seok Lee, In-ho Seong, Chul-hee Cho, Jang-jae Lee and Shin-jae You
Link:
https://www.mdpi.com/1424-8220/22/15/5487
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