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Volume 22
Issue 15
10.3390/s22155487
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Article

Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics

by
Si-jun Kim
1,
Sang-ho Lee
1,2,
Ye-bin You
1,
Young-seok Lee
1,
In-ho Seong
1,
Chul-hee Cho
1,
Jang-jae Lee
3 and
Shin-jae You
1,4,*
1
Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, South Korea
2
Department of Plasma Engineering, Korea Institute of Machinery and Materials (KIMM), Daejeon 34104, South Korea
3
Samsung Electronics, Hwaseong-si 18448, South Korea
4
Institute of Quantum Systems (IQS), Chungnam National University, Daejeon 34134, South Korea
*
Author to whom correspondence should be addressed.
Sensors 2022, 22(15), 5487; https://doi.org/10.3390/s22155487
Submission received: 21 June 2022 / Revised: 16 July 2022 / Accepted: 18 July 2022 / Published: 22 July 2022
(This article belongs to the Special Issue Plasma Diagnostics)
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Abstract

As the importance of measuring electron density has become more significant in the material fabrication industry, various related plasma monitoring tools have been introduced. In this paper, the development of a microwave probe, called the measurement of lateral electron density (MOLE) probe, is reported. The basic properties of the MOLE probe are analyzed via three-dimensional electromagnetic wave simulation, with simulation results showing that the probe estimates electron density by measuring the surface wave resonance frequency from the reflection microwave frequency spectrum (S11). Furthermore, an experimental demonstration on a chamber wall measuring lateral electron density is conducted by comparing the developed probe with the cutoff probe, a precise electron density measurement tool. Based on both simulation and experiment results, the MOLE probe is shown to be a useful instrument to monitor lateral electron density.
Keywords: plasma diagnostics; non-invasive electron density measurement; planar microwave probes; plasma monitoring plasma diagnostics; non-invasive electron density measurement; planar microwave probes; plasma monitoring

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MDPI and ACS Style

Kim, S.-j.; Lee, S.-h.; You, Y.-b.; Lee, Y.-s.; Seong, I.-h.; Cho, C.-h.; Lee, J.-j.; You, S.-j. Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics. Sensors 2022, 22, 5487. https://doi.org/10.3390/s22155487

AMA Style

Kim S-j, Lee S-h, You Y-b, Lee Y-s, Seong I-h, Cho C-h, Lee J-j, You S-j. Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics. Sensors. 2022; 22(15):5487. https://doi.org/10.3390/s22155487

Chicago/Turabian Style

Kim, Si-jun, Sang-ho Lee, Ye-bin You, Young-seok Lee, In-ho Seong, Chul-hee Cho, Jang-jae Lee, and Shin-jae You. 2022. "Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics" Sensors 22, no. 15: 5487. https://doi.org/10.3390/s22155487

APA Style

Kim, S.-j., Lee, S.-h., You, Y.-b., Lee, Y.-s., Seong, I.-h., Cho, C.-h., Lee, J.-j., & You, S.-j. (2022). Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics. Sensors, 22(15), 5487. https://doi.org/10.3390/s22155487

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