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Journal: Sensors, 2024
Volume: 24
Number: 2743
Article:
Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator
Authors:
by
Mehdi Allameh, Byoungyoul Park and Cyrus Shafai
Link:
https://www.mdpi.com/1424-8220/24/9/2743
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