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Journal: Sensors, 2024
Volume: 24
Number: 2890
2890
Article:
Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer
Authors:
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Nathan Nakamura, Paul Szypryt, Amber L. Dagel, Bradley K. Alpert, Douglas A. Bennett, William Bertrand Doriese, Malcolm Durkin, Joseph W. Fowler, Dylan T. Fox, Johnathon D. Gard, Ryan N. Goodner, James Zachariah Harris, Gene C. Hilton, Edward S. Jimenez, Burke L. Kernen, Kurt W. Larson, Zachary H. Levine, Daniel McArthur, Kelsey M. Morgan, Galen C. O’Neil, Nathan J. Ortiz, Christine G. Pappas, Carl D. Reintsema, Daniel R. Schmidt, Peter A. Schultz, Kyle R. Thompson, Joel N. Ullom, Leila Vale, Courtenay T. Vaughan, Christopher Walker, Joel C. Weber, Jason W. Wheeler and Daniel S. Swetzadd
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Cite
Nakamura, N.; Szypryt, P.; Dagel, A.L.; Alpert, B.K.; Bennett, D.A.; Doriese, W.B.; Durkin, M.; Fowler, J.W.; Fox, D.T.; Gard, J.D.; et al. Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer. Sensors 2024, 24, 2890. https://doi.org/10.3390/s24092890
Nakamura N, Szypryt P, Dagel AL, Alpert BK, Bennett DA, Doriese WB, Durkin M, Fowler JW, Fox DT, Gard JD, et al. Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer. Sensors. 2024; 24(9):2890. https://doi.org/10.3390/s24092890
Chicago/Turabian StyleNakamura, Nathan, Paul Szypryt, Amber L. Dagel, Bradley K. Alpert, Douglas A. Bennett, William Bertrand Doriese, Malcolm Durkin, Joseph W. Fowler, Dylan T. Fox, Johnathon D. Gard, and et al. 2024. "Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer" Sensors 24, no. 9: 2890. https://doi.org/10.3390/s24092890
APA StyleNakamura, N., Szypryt, P., Dagel, A. L., Alpert, B. K., Bennett, D. A., Doriese, W. B., Durkin, M., Fowler, J. W., Fox, D. T., Gard, J. D., Goodner, R. N., Harris, J. Z., Hilton, G. C., Jimenez, E. S., Kernen, B. L., Larson, K. W., Levine, Z. H., McArthur, D., Morgan, K. M., ... Swetz, D. S. (2024). Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer. Sensors, 24(9), 2890. https://doi.org/10.3390/s24092890
