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Journal: Materials, 2020
Volume: 13
Number: 5723
Article:
Lattice Defects and Exfoliation Efficiency of 6H-SiC via H2+ Implantation at Elevated Temperature
Authors:
by
Tao Wang, Zhen Yang, Bingsheng Li, Shuai Xu, Qing Liao, Fangfang Ge, Tongmin Zhang and Jun Li
Link:
https://www.mdpi.com/1996-1944/13/24/5723
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