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Journal: Materials, 2020
Volume: 13
Number: 1058

Article: Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
Authors: by Katherine Hansen, Melissa Cardona, Amartya Dutta and Chen Yang
Link: https://www.mdpi.com/1996-1944/13/5/1058

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