Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer
Abstract
:1. Introduction
2. Working Principles
2.1. Design of a Comb-Type Capacitive Accelerometer
2.2. Modeling of the Capacitive Accelerometer
2.3. Parameter Setting of the Capacitive Accelerometer
3. Structural Design and Optimization
3.1. Modal Analysis
3.1.1. Modal Analysis of the Micro-Accelerometer
3.1.2. Optimization of the Structural Parameters
3.1.3. Modal Comparison between the SiC-Based Structure and the Si-Based Structure
3.2. Dynamic Characteristic Analysis
3.2.1. Squeeze-Film Air Damping
3.2.2. Analysis in the Frequency Domain
3.2.3. Analysis in the Time Domain
4. Performance Characterization
4.1. Scale Range
4.2. Sensitivity
4.3. High-Temperature Performances
5. Discussion
6. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Accelerometer | Length (μm) | Width (μm) | Thickness (μm) |
---|---|---|---|
Mass block | 500 | 350 | 20 |
Movable electrode plates | 300 | 4 | 20 |
Fixed electrode plates | 300 | 4 | 20 |
Folded support beams | 350 | 2 | 20 |
External Acceleration | Displacement |
---|---|
10 g | 5.5947 × 10−2 μm |
20 g | 1.1189 × 10−1 μm |
30 g | 1.6784 × 10−1 μm |
40 g | 2.2379 × 10−1 μm |
50 g | 2.7973 × 10−1 μm |
60 g | 3.3568 × 10−1 μm |
70 g | 3.9163 × 10−1 μm |
80 g | 4.4757 × 10−1 μm |
90 g | 5.0352 × 10−1 μm |
100 g | 5.5947 × 10−1 μm |
Property | 500 °C | 1000 °C | 1200 °C |
---|---|---|---|
Density (g/cm3) | 3.14 | 3.11 | 3.10 |
Elastic modulus (GPa) | 404 | 392 | 387 |
Poisson’s ratio | 0.159 | 0.157 | 0.157 |
Flexural strength (MPa) | 359 | 397 | 437 |
Thermal expansion coefficient (10−6 K−1) | 4.4 | 5 | 5.2 |
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Tian, X.; Sheng, W.; Guo, Z.; Xing, W.; Tang, R. Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer. Materials 2021, 14, 6222. https://doi.org/10.3390/ma14206222
Tian X, Sheng W, Guo Z, Xing W, Tang R. Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer. Materials. 2021; 14(20):6222. https://doi.org/10.3390/ma14206222
Chicago/Turabian StyleTian, Xiang, Wei Sheng, Zhanshe Guo, Weiwei Xing, and Runze Tang. 2021. "Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer" Materials 14, no. 20: 6222. https://doi.org/10.3390/ma14206222