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Journal: Materials, 2022
Volume: 15
Number: 1888
Article:
Low-Temperature Cu/SiO2 Hybrid Bonding with Low Contact Resistance Using (111)-Oriented Cu Surfaces
Authors:
by
Jia-Juen Ong, Wei-Lan Chiu, Ou-Hsiang Lee, Chia-Wen Chiang, Hsiang-Hung Chang, Chin-Hung Wang, Kai-Cheng Shie, Shih-Chi Yang, Dinh-Phuc Tran, King-Ning Tu and Chih Chen
Link:
https://www.mdpi.com/1996-1944/15/5/1888
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