First Results on Zinc Oxide Thick Film Deposition by Inverted Magnetron Sputtering for Cyclotron Solid Targets Production
Abstract
:1. Introduction
2. Materials and Methods
2.1. Brief Description of Inverted Magnetron Source
- ultrasound bath with distilled water with the addition of 5 mL of Rodaclean® (NGL Cleaning Technology SA, Nyon, Switzerland) soap for 20 min at 40 °C;
- ultrasound bath with distilled water for 20 min;
- rinsing with ethanol 96% and drying with the gas gun (oil-free compression system).
2.2. Sputtering System
2.3. Characterisations
2.4. Cyclotron Irradiation
3. Results
3.1. Deposition Parameters and Setup Optimisation
3.2. Morphology, Growing Behaviour, and Deposition Rate
3.3. Compound Evaluation
3.4. Cyclotron Irradiation Tests
4. Discussion
4.1. IM Sputtering Process
4.2. Material-Saving Approach
4.3. Targets Manufacturing
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Experiment Number | Sputtering Voltage [V] | Time [min] | Thickness [m] | M [ mg] | Density * [%] | Substrate |
---|---|---|---|---|---|---|
Exp 8 | 460 | 115 | 15 | - | - | /Quartz |
Target 1 | 500 | 130 | 20 | 6.34 | 4.1 | coin |
Target 2 | 550 | 150 | 30 | 9.17 | 3.9 | coin |
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Kotliarenko, A.; Azzolini, O.; Cisternino, S.; El Idrissi, M.; Esposito, J.; Keppel, G.; Pira, C.; Taibi, A. First Results on Zinc Oxide Thick Film Deposition by Inverted Magnetron Sputtering for Cyclotron Solid Targets Production. Materials 2023, 16, 3810. https://doi.org/10.3390/ma16103810
Kotliarenko A, Azzolini O, Cisternino S, El Idrissi M, Esposito J, Keppel G, Pira C, Taibi A. First Results on Zinc Oxide Thick Film Deposition by Inverted Magnetron Sputtering for Cyclotron Solid Targets Production. Materials. 2023; 16(10):3810. https://doi.org/10.3390/ma16103810
Chicago/Turabian StyleKotliarenko, Alisa, Oscar Azzolini, Sara Cisternino, Mourad El Idrissi, Juan Esposito, Giorgio Keppel, Cristian Pira, and Angelo Taibi. 2023. "First Results on Zinc Oxide Thick Film Deposition by Inverted Magnetron Sputtering for Cyclotron Solid Targets Production" Materials 16, no. 10: 3810. https://doi.org/10.3390/ma16103810