Order Article Reprints

Xi Y, Liu L, Zhao J, Qin X, Zhang J, Zhang C, Liu W. Effects of Oxygen Flow during Fabrication by Magnetron Sputtering on Structure and Performance of Zr-Doped HfO₂ Thin Films. Materials. 2023; 16(16):5559. https://doi.org/10.3390/ma16165559

Xi, Yingxue, Lei Liu, Jiwu Zhao, Xinhui Qin, Jin Zhang, Changming Zhang, and Weiguo Liu. 2023. "Effects of Oxygen Flow during Fabrication by Magnetron Sputtering on Structure and Performance of Zr-Doped HfO₂ Thin Films" Materials 16, no. 16: 5559. https://doi.org/10.3390/ma16165559

Xi, Y., Liu, L., Zhao, J., Qin, X., Zhang, J., Zhang, C., & Liu, W. (2023). Effects of Oxygen Flow during Fabrication by Magnetron Sputtering on Structure and Performance of Zr-Doped HfO₂ Thin Films. Materials, 16(16), 5559. https://doi.org/10.3390/ma16165559