The Effect of Sputtering Sequence Engineering in Superlattice-like Sb-Rich-Based Phase Change Materials
Abstract
:1. Introduction
2. Experimental Procedure
2.1. Sample Preparation
2.2. Material Characterization
3. Results and Discussion
4. Conclusions
Supplementary Materials
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Li, A.; Liu, R.; Liu, L.; Chen, Y.; Zhou, X. The Effect of Sputtering Sequence Engineering in Superlattice-like Sb-Rich-Based Phase Change Materials. Materials 2024, 17, 2773. https://doi.org/10.3390/ma17112773
Li A, Liu R, Liu L, Chen Y, Zhou X. The Effect of Sputtering Sequence Engineering in Superlattice-like Sb-Rich-Based Phase Change Materials. Materials. 2024; 17(11):2773. https://doi.org/10.3390/ma17112773
Chicago/Turabian StyleLi, Anding, Ruirui Liu, Liu Liu, Yukun Chen, and Xiao Zhou. 2024. "The Effect of Sputtering Sequence Engineering in Superlattice-like Sb-Rich-Based Phase Change Materials" Materials 17, no. 11: 2773. https://doi.org/10.3390/ma17112773