Study of Heat Flow at Substrate during Sputtering of Copper–Titanium Sandwich Target
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Shapovalov, V.I.; Sharkovskii, D.S. Study of Heat Flow at Substrate during Sputtering of Copper–Titanium Sandwich Target. Materials 2024, 17, 3599. https://doi.org/10.3390/ma17143599
Shapovalov VI, Sharkovskii DS. Study of Heat Flow at Substrate during Sputtering of Copper–Titanium Sandwich Target. Materials. 2024; 17(14):3599. https://doi.org/10.3390/ma17143599
Chicago/Turabian StyleShapovalov, Viktor I., and Daniil S. Sharkovskii. 2024. "Study of Heat Flow at Substrate during Sputtering of Copper–Titanium Sandwich Target" Materials 17, no. 14: 3599. https://doi.org/10.3390/ma17143599