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Journal: Materials, 2024
Volume: 17
Number: 327

Article: Epitaxy of (11–22) AlN Films on a Sputtered Buffer Layer with Different Annealing Temperatures via Hydride Vapour Phase Epitaxy
Authors: by Xuejun Yan, Maosong Sun, Jianli Ji, Zhuokun He, Jicai Zhang and Wenhong Sun
Link: https://www.mdpi.com/1996-1944/17/2/327

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