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Journal: Materials, 2024
Volume: 17
Number: 470

Article: Influence of Thermal Annealing on Mechanical and Optical Property of SiO2 Film Produced by ALD
Authors: by Xintao Zhi, Xiaopeng Li, Songmei Yuan, Dasen Wang and Kehong Wang
Link: https://www.mdpi.com/1996-1944/17/2/470

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