A Low-Frequency MEMS Piezoelectric Energy Harvesting System Based on Frequency Up-Conversion Mechanism
Abstract
:1. Introduction
2. Design and Simulation
2.1. Device Configuration
2.2. Modal Analysis Using COMSOL
3. Micro Fabrication Process
4. Experimental Results and Discussion
4.1. The Output Performance of the SPC
4.2. The Output Performance of the PEHS
5. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
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Parameters | Description | Value |
---|---|---|
L | Total length of the chip | 22 mm |
W | Total width of the chip | 21 mm |
Lb | Length of the cantilever beam | 15 mm |
Lm | Length of the Si proof mass | 5 mm |
Wm | Width of the Si proof mass | 14 mm |
Ln | Length of the nickel proof mass | 15 mm |
Wn | Width of the nickel proof mass | 5 mm |
ws | Width of the S-shaped cantilever | 1.5 mm |
tte | Thickness of the top Cu electrode | 1 μm |
tp | Thickness of the PZT layer | 65 μm |
tbe | Thickness of the bottom electrode | 9 μm |
ts | Thickness of the Si substrate | 200 μm |
tm | Thickness of the Si proof mass | 300 μm |
tn | Thickness of the nickel proof mass | 3 mm |
tl | Thickness of the stainless-steel cantilever | 100 μm |
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Huang, M.; Hou, C.; Li, Y.; Liu, H.; Wang, F.; Chen, T.; Yang, Z.; Tang, G.; Sun, L. A Low-Frequency MEMS Piezoelectric Energy Harvesting System Based on Frequency Up-Conversion Mechanism. Micromachines 2019, 10, 639. https://doi.org/10.3390/mi10100639
Huang M, Hou C, Li Y, Liu H, Wang F, Chen T, Yang Z, Tang G, Sun L. A Low-Frequency MEMS Piezoelectric Energy Harvesting System Based on Frequency Up-Conversion Mechanism. Micromachines. 2019; 10(10):639. https://doi.org/10.3390/mi10100639
Chicago/Turabian StyleHuang, Manjuan, Cheng Hou, Yunfei Li, Huicong Liu, Fengxia Wang, Tao Chen, Zhan Yang, Gang Tang, and Lining Sun. 2019. "A Low-Frequency MEMS Piezoelectric Energy Harvesting System Based on Frequency Up-Conversion Mechanism" Micromachines 10, no. 10: 639. https://doi.org/10.3390/mi10100639