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Journal: Micromachines, 2021
Volume: 12
Number: 8
Article:
Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material
Authors:
by
Sangeetha Hari, P. H. F. Trompenaars, J. J. L. Mulders, Pieter Kruit and C. W. Hagen
Link:
https://www.mdpi.com/2072-666X/12/1/8
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