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Micromachines
Volume 12
Issue 4
10.3390/mi12040378
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Article

Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning

by
Qiang Wang
1,2,†,
Weimin Wang
3,4,†,
Xuye Zhuang
5,
Chongxi Zhou
1 and
Bin Fan
1,*
1
State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2
University of Chinese Academy of Sciences, Beijing 100049, China
3
Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education & Defense Key Disciplines Laboratory of Novel Micro-Nano Devices and System Technology, Chongqing University, Chongqing 400044, China
4
Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, Guilin University of Electronic Technology, Guilin 541004, China
5
School of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China
*
Author to whom correspondence should be addressed.
†
These authors contributed equally to this paper.
Micromachines 2021, 12(4), 378; https://doi.org/10.3390/mi12040378
Submission received: 19 February 2021 / Revised: 25 March 2021 / Accepted: 26 March 2021 / Published: 1 April 2021
(This article belongs to the Section E：Engineering and Technology)
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Abstract

Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution. In recent years, the rapid development of Light Detection and Ranging (LiDAR) has led to opportunities and challenges for MEMS scanners. In this work, we propose a 2D electrostatically actuated micro raster scanner with relatively large aperture. The 2D scanner combines a resonant scanning axis driven by an in-plane comb and a quasistatic scanning axis driven by a vertical comb, which is achieved by raising the moving comb finger above the fixed comb finger through the residual stress gradient. The analytic formula for the resonant axis frequency, based on the mechanical coupling of two oscillation modes, is derived and compared with finite element simulation. A prototype is designed, fabricated, and tested, and an overall optical Field-of-View (FoV) of about 60° × 4° is achieved. Finally, some possibilities for further improvement or optimization are discussed.
Keywords: two-dimensional raster scanning; electrostatic comb-drive actuator; vacuum operation; mechanical coupling; residual stress; in-phase; out-of-phase; parametric resonance two-dimensional raster scanning; electrostatic comb-drive actuator; vacuum operation; mechanical coupling; residual stress; in-phase; out-of-phase; parametric resonance

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MDPI and ACS Style

Wang, Q.; Wang, W.; Zhuang, X.; Zhou, C.; Fan, B. Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning. Micromachines 2021, 12, 378. https://doi.org/10.3390/mi12040378

AMA Style

Wang Q, Wang W, Zhuang X, Zhou C, Fan B. Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning. Micromachines. 2021; 12(4):378. https://doi.org/10.3390/mi12040378

Chicago/Turabian Style

Wang, Qiang, Weimin Wang, Xuye Zhuang, Chongxi Zhou, and Bin Fan. 2021. "Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning" Micromachines 12, no. 4: 378. https://doi.org/10.3390/mi12040378

APA Style

Wang, Q., Wang, W., Zhuang, X., Zhou, C., & Fan, B. (2021). Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning. Micromachines, 12(4), 378. https://doi.org/10.3390/mi12040378

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