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Article

Passivated Porous Silicon Membranes and Their Application to Optical Biosensing

by
Clara Whyte Ferreira
,
Roselien Vercauteren
* and
Laurent A. Francis
Institute of Information and Communication Technologies, Electronics, and Applied Mathematics, UCLouvain, 1348 Louvain-la-Neuve, Belgium
*
Author to whom correspondence should be addressed.
Micromachines 2022, 13(1), 10; https://doi.org/10.3390/mi13010010
Submission received: 29 November 2021 / Revised: 20 December 2021 / Accepted: 21 December 2021 / Published: 22 December 2021
(This article belongs to the Special Issue Selected Papers from ICMA2021)

Abstract

A robust fabrication method for stable mesoporous silicon membranes using standard microfabrication techniques is presented. The porous silicon membranes were passivated through the atomic layer deposition of different metal oxides, namely aluminium oxide Al2O3, hafnium oxide HfO2 and titanium oxide TiO2. The fabricated membranes were characterized in terms of morphology, optical properties and chemical properties. Stability tests and optical probing noise level determination were also performed. Preliminary results using an Al2O3 passivated membranes for a biosensing application are also presented for selective optical detection of Bacillus cereus bacterial lysate. The biosensor was able to detect the bacterial lysate, with an initial bacteria concentration of 106 colony forming units per mL (CFU/mL), in less than 10 min.
Keywords: porous silicon; membranes; atomic layer deposition; passivation; biosensor; optical sensing porous silicon; membranes; atomic layer deposition; passivation; biosensor; optical sensing

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MDPI and ACS Style

Whyte Ferreira, C.; Vercauteren, R.; Francis, L.A. Passivated Porous Silicon Membranes and Their Application to Optical Biosensing. Micromachines 2022, 13, 10. https://doi.org/10.3390/mi13010010

AMA Style

Whyte Ferreira C, Vercauteren R, Francis LA. Passivated Porous Silicon Membranes and Their Application to Optical Biosensing. Micromachines. 2022; 13(1):10. https://doi.org/10.3390/mi13010010

Chicago/Turabian Style

Whyte Ferreira, Clara, Roselien Vercauteren, and Laurent A. Francis. 2022. "Passivated Porous Silicon Membranes and Their Application to Optical Biosensing" Micromachines 13, no. 1: 10. https://doi.org/10.3390/mi13010010

APA Style

Whyte Ferreira, C., Vercauteren, R., & Francis, L. A. (2022). Passivated Porous Silicon Membranes and Their Application to Optical Biosensing. Micromachines, 13(1), 10. https://doi.org/10.3390/mi13010010

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