Editor’s Choice Articles

Editor’s Choice articles are based on recommendations by the scientific editors of MDPI journals from around the world. Editors select a small number of articles recently published in the journal that they believe will be particularly interesting to readers, or important in the respective research area. The aim is to provide a snapshot of some of the most exciting work published in the various research areas of the journal.

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15 pages, 1565 KiB  
Article
Optimization of Graphical Parameter Extraction Algorithm for Chip-Level CMP Prediction Model Based on Effective Planarization Length
by Bowen Ren, Lan Chen, Rong Chen, Yan Sun and Yali Wang
Micromachines 2024, 15(4), 549; https://doi.org/10.3390/mi15040549 (registering DOI) - 19 Apr 2024
Viewed by 181
Abstract
As a planarization technique, chemical mechanical polishing (CMP) continues to suffer from pattern effects that result in large variations in material thickness, which can influence circuit performance and yield. Therefore, tools for predicting post-CMP chip morphology based on the layout-dependent effect (LDE) have [...] Read more.
As a planarization technique, chemical mechanical polishing (CMP) continues to suffer from pattern effects that result in large variations in material thickness, which can influence circuit performance and yield. Therefore, tools for predicting post-CMP chip morphology based on the layout-dependent effect (LDE) have become increasingly critical and widely utilized for design verification and manufacturing development. In order to characterize the impact of patterns on polishing, such models often require the extraction of graphic parameters. However, existing extraction algorithms provide a limited description of the interaction effect between layout patterns. To address this problem, we calculate the average density as a density correction and innovatively use a one-dimensional line contact deformation profile as a weighting function. To verify our hypothesis, the density correction method is applied to a density step-height-based high-K metal gate-CMP prediction model. The surface prediction results before and after optimization are compared with the silicon data. The results show a reduction in mean squared error (MSE) of 40.1% and 35.2% in oxide and Al height predictions, respectively, compared with the preoptimization results, confirming that the optimization method can improve the prediction accuracy of the model. Full article
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21 pages, 2154 KiB  
Review
Biomaterials for Protein Delivery: Opportunities and Challenges to Clinical Translation
by Amogh Gorantla, Jacques T. V. E. Hall, Anneliese Troidle and Jelena M. Janjic
Micromachines 2024, 15(4), 533; https://doi.org/10.3390/mi15040533 (registering DOI) - 15 Apr 2024
Viewed by 579
Abstract
The development of biomaterials for protein delivery is an emerging field that spans materials science, bioengineering, and medicine. In this review, we highlight the immense potential of protein-delivering biomaterials as therapeutic options and discuss the multifaceted challenges inherent to the field. We address [...] Read more.
The development of biomaterials for protein delivery is an emerging field that spans materials science, bioengineering, and medicine. In this review, we highlight the immense potential of protein-delivering biomaterials as therapeutic options and discuss the multifaceted challenges inherent to the field. We address current advancements and approaches in protein delivery that leverage stimuli-responsive materials, harness advanced fabrication techniques like 3D printing, and integrate nanotechnologies for greater targeting and improved stability, efficacy, and tolerability profiles. We also discuss the demand for highly complex delivery systems to maintain structural integrity and functionality of the protein payload. Finally, we discuss barriers to clinical translation, such as biocompatibility, immunogenicity, achieving reliable controlled release, efficient and targeted delivery, stability issues, scalability of production, and navigating the regulatory landscape for such materials. Overall, this review summarizes insights from a survey of the current literature and sheds light on the interplay between innovation and the practical implementation of biomaterials for protein delivery. Full article
(This article belongs to the Special Issue Biomaterials, Biodevices and Tissue Engineering, Second Edition)
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18 pages, 4773 KiB  
Article
Design and Implementation of a Four-Unit Array Piezoelectric Bionic MEMS Vector Hydrophone
by Shuzheng Shi, Xiaoyong Zhang, Zhanying Wang, Liyong Ma, Kai Kang, Yongjun Pang, Hong Ma and Jinjiang Hu
Micromachines 2024, 15(4), 524; https://doi.org/10.3390/mi15040524 (registering DOI) - 14 Apr 2024
Viewed by 359
Abstract
High-performance vector hydrophones have been gaining attention for underwater target-monitoring applications. Nevertheless, there exists the mutual constraint between sensitivity and bandwidth of a single hydrophone. To solve this problem, a four-unit array piezoelectric bionic MEMS vector hydrophone (FPVH) was developed in this paper, [...] Read more.
High-performance vector hydrophones have been gaining attention for underwater target-monitoring applications. Nevertheless, there exists the mutual constraint between sensitivity and bandwidth of a single hydrophone. To solve this problem, a four-unit array piezoelectric bionic MEMS vector hydrophone (FPVH) was developed in this paper, which has a cross-beam and a bionic fish-lateral-line-nerve-cell-cilia unit array structure. Simulation analysis and optimization in the design of the bionic microstructure have been performed by COMSOL 6.1 software to determine the structure dimensions and the lead zirconate titanate (PZT) thin film distribution. The FPVH was manufactured using MEMS technology and tested in a standing wave bucket. The results indicate that the FPVH has a sensitivity of up to −167.93 dB@1000 Hz (0 dB = 1 V/μPa), which is 12 dB higher than that of the one-unit piezoelectric MEMS vector hydrophone (OPVH). Additionally, the working bandwidth of the FPVH reaches 20 Hz~1200 Hz, exhibiting a good cosine curve with an 8-shape. This work paves a new way for the development of multi-unit piezoelectric vector hydrophones for underwater acoustic detectors. Full article
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11 pages, 1714 KiB  
Article
Towards a Point-of-Care Test of CD4+ T Lymphocyte Concentrations for Immune Status Monitoring with Magnetic Flow Cytometry
by Moritz Leuthner, Mathias Reisbeck, Michael Helou and Oliver Hayden
Micromachines 2024, 15(4), 520; https://doi.org/10.3390/mi15040520 (registering DOI) - 13 Apr 2024
Viewed by 486
Abstract
For the treatment of human immunodeficiency virus (HIV)-infected patients, the regular assessment of the immune status is indispensable. The quantification of CD4+ T lymphocytes in blood by gold standard optical flow cytometry is not point-of-care testing (POCT) compatible. This incompatibility is due [...] Read more.
For the treatment of human immunodeficiency virus (HIV)-infected patients, the regular assessment of the immune status is indispensable. The quantification of CD4+ T lymphocytes in blood by gold standard optical flow cytometry is not point-of-care testing (POCT) compatible. This incompatibility is due to unavoidable pre-analytics, expensive and bulky optics with limited portability, and complex workflow integration. Here, we propose a non-optical, magnetic flow cytometry (MFC) workflow that offers effortless integration opportunities, including minimal user interaction, integrated sample preparation and up-concentration, and miniaturization. Furthermore, we demonstrate immunomagnetic CD4+ T lymphocyte labeling in whole blood with subsequent quantification using sheath-less MFC. Showing linearity over two log scales and being largely unimpaired by hematocrit, evidence is provided for POCT capabilities of HIV patients. Full article
(This article belongs to the Special Issue μ-TAS: A Themed Issue in Honor of Professor Andreas Manz)
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47 pages, 12921 KiB  
Review
Recent Progress and Challenges of Implantable Biodegradable Biosensors
by Fahmida Alam, Md Ashfaq Ahmed, Ahmed Hasnain Jalal, Ishrak Siddiquee, Rabeya Zinnat Adury, G M Mehedi Hossain and Nezih Pala
Micromachines 2024, 15(4), 475; https://doi.org/10.3390/mi15040475 (registering DOI) - 30 Mar 2024
Viewed by 1681
Abstract
Implantable biosensors have evolved to the cutting-edge technology of personalized health care and provide promise for future directions in precision medicine. This is the reason why these devices stand to revolutionize our approach to health and disease management and offer insights into our [...] Read more.
Implantable biosensors have evolved to the cutting-edge technology of personalized health care and provide promise for future directions in precision medicine. This is the reason why these devices stand to revolutionize our approach to health and disease management and offer insights into our bodily functions in ways that have never been possible before. This review article tries to delve into the important developments, new materials, and multifarious applications of these biosensors, along with a frank discussion on the challenges that the devices will face in their clinical deployment. In addition, techniques that have been employed for the improvement of the sensitivity and specificity of the biosensors alike are focused on in this article, like new biomarkers and advanced computational and data communicational models. A significant challenge of miniaturized in situ implants is that they need to be removed after serving their purpose. Surgical expulsion provokes discomfort to patients, potentially leading to post-operative complications. Therefore, the biodegradability of implants is an alternative method for removal through natural biological processes. This includes biocompatible materials to develop sensors that remain in the body over longer periods with a much-reduced immune response and better device longevity. However, the biodegradability of implantable sensors is still in its infancy compared to conventional non-biodegradable ones. Sensor design, morphology, fabrication, power, electronics, and data transmission all play a pivotal role in developing medically approved implantable biodegradable biosensors. Advanced material science and nanotechnology extended the capacity of different research groups to implement novel courses of action to design implantable and biodegradable sensor components. But the actualization of such potential for the transformative nature of the health sector, in the first place, will have to surmount the challenges related to biofouling, managing power, guaranteeing data security, and meeting today’s rules and regulations. Solving these problems will, therefore, not only enhance the performance and reliability of implantable biodegradable biosensors but also facilitate the translation of laboratory development into clinics, serving patients worldwide in their better disease management and personalized therapeutic interventions. Full article
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14 pages, 5054 KiB  
Article
Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer
by Yunhao Wang, Sheng Wu, Wenjing Wang, Tao Wu and Xinxin Li
Micromachines 2024, 15(4), 482; https://doi.org/10.3390/mi15040482 (registering DOI) - 30 Mar 2024
Viewed by 607
Abstract
Piezoelectric micromachined ultrasound transducers (PMUTs) have gained significant popularity in the field of ultrasound ranging and medical imaging owing to their small size, low power consumption, and affordability. The scar-free “MIS” (micro-hole inter-etch and sealing) process, a novel bulk-silicon manufacturing technique, has been [...] Read more.
Piezoelectric micromachined ultrasound transducers (PMUTs) have gained significant popularity in the field of ultrasound ranging and medical imaging owing to their small size, low power consumption, and affordability. The scar-free “MIS” (micro-hole inter-etch and sealing) process, a novel bulk-silicon manufacturing technique, has been successfully developed for the fabrication of pressure sensors, flow sensors, and accelerometers. In this study, we utilize the MIS process to fabricate cavity diaphragm structures for PMUTs, resulting in the formation of a flat cavity diaphragm structure through anisotropic etching of (111) wafers in a 70 °C tetramethylammonium hydroxide (TMAH) solution. This study investigates the corrosion characteristics of the MIS technology on (111) silicon wafers, arranges micro-pores etched on bulk silicon around the desired cavity structure in a regular pattern, and takes into consideration the distance compensation for lateral corrosion, resulting in a fully connected cavity structure closely approximating an ortho-hexagonal shape. By utilizing a sputtering process to deposit metallic molybdenum as upper and lower electrodes, as well as piezoelectric materials above the cavity structure, we have successfully fabricated aluminum nitride (AlN) piezoelectric ultrasonic transducer arrays of various sizes and structures. The final hexagonal PMUT cells of various sizes that were fabricated achieved a maximum quality factor (Q) of 251 and a displacement sensitivity of 18.49 nm/V across a range of resonant frequencies from 6.28 MHz to 11.99 MHz. This fabrication design facilitates the achievement of IC-compatible and cost-effective mass production of PMUT array devices with high resonance frequencies. Full article
(This article belongs to the Section A:Physics)
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16 pages, 10654 KiB  
Review
Strategies for Enhancing the Stability of Lithium Metal Anodes in Solid-State Electrolytes
by Hanbyeol Lee, Taeho Yoon and Oh B. Chae
Micromachines 2024, 15(4), 453; https://doi.org/10.3390/mi15040453 (registering DOI) - 28 Mar 2024
Viewed by 610
Abstract
The current commercially used anode material, graphite, has a theoretical capacity of only 372 mAh/g, leading to a relatively low energy density. Lithium (Li) metal is a promising candidate as an anode for enhancing energy density; however, challenges related to safety and performance [...] Read more.
The current commercially used anode material, graphite, has a theoretical capacity of only 372 mAh/g, leading to a relatively low energy density. Lithium (Li) metal is a promising candidate as an anode for enhancing energy density; however, challenges related to safety and performance arise due to Li’s dendritic growth, which needs to be addressed. Owing to these critical issues in Li metal batteries, all-solid-state lithium-ion batteries (ASSLIBs) have attracted considerable interest due to their superior energy density and enhanced safety features. Among the key components of ASSLIBs, solid-state electrolytes (SSEs) play a vital role in determining their overall performance. Various types of SSEs, including sulfides, oxides, and polymers, have been extensively investigated for Li metal anodes. Sulfide SSEs have demonstrated high ion conductivity; however, dendrite formation and a limited electrochemical window hinder the commercialization of ASSLIBs due to safety concerns. Conversely, oxide SSEs exhibit a wide electrochemical window, but compatibility issues with Li metal lead to interfacial resistance problems. Polymer SSEs have the advantage of flexibility; however their limited ion conductivity poses challenges for commercialization. This review aims to provide an overview of the distinctive characteristics and inherent challenges associated with each SSE type for Li metal anodes while also proposing potential pathways for future enhancements based on prior research findings. Full article
(This article belongs to the Special Issue Energy Conversion Materials/Devices and Their Applications)
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16 pages, 7312 KiB  
Article
Ultraflexible PEDOT:PSS/IrOx-Modified Electrodes: Applications in Behavioral Modulation and Neural Signal Recording in Mice
by Xueying Wang, Wanqi Jiang, Huiran Yang, Yifei Ye, Zhitao Zhou, Liuyang Sun, Yanyan Nie, Tiger H. Tao and Xiaoling Wei
Micromachines 2024, 15(4), 447; https://doi.org/10.3390/mi15040447 (registering DOI) - 27 Mar 2024
Viewed by 660
Abstract
Recent advancements in neural probe technology have become pivotal in both neuroscience research and the clinical management of neurological disorders. State-of-the-art developments have led to the advent of multichannel, high-density bidirectional neural interfaces that are adept at both recording and modulating neuronal activity [...] Read more.
Recent advancements in neural probe technology have become pivotal in both neuroscience research and the clinical management of neurological disorders. State-of-the-art developments have led to the advent of multichannel, high-density bidirectional neural interfaces that are adept at both recording and modulating neuronal activity within the central nervous system. Despite this progress, extant bidirectional probes designed for simultaneous recording and stimulation are beset with limitations, including elicitation of inflammatory responses and insufficient charge injection capacity. In this paper, we delineate the design and application of an innovative ultraflexible bidirectional neural probe engineered from polyimide. This probe is distinguished by its ability to facilitate high-resolution recordings and precise stimulation control in deep brain regions. Electrodes enhanced with a PEDOT:PSS/IrOx composite exhibit a substantial increase in charge storage capacity, escalating from 0.14 ± 0.01 mC/cm2 to an impressive 24.75 ± 0.18 mC/cm2. This augmentation significantly bolsters the electrodes’ charge transfer efficacy. In tandem, we observed a notable reduction in electrode impedance, from 3.47 ± 1.77 MΩ to a mere 41.88 ± 4.04 kΩ, while the phase angle exhibited a positive shift from −72.61 ± 1.84° to −34.17 ± 0.42°. To substantiate the electrodes’ functional prowess, we conducted in vivo experiments, where the probes were surgically implanted into the bilateral motor cortex of mice. These experiments involved the synchronous recording and meticulous analysis of neural signal fluctuations during stimulation and an assessment of the probes’ proficiency in modulating directional turning behaviors in the subjects. The empirical evidence corroborates that targeted stimulation within the bilateral motor cortex of mice can modulate the intensity of neural signals in the stimulated locale, enabling the directional control of the mice’s turning behavior to the contralateral side of the stimulation site. Full article
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17 pages, 3830 KiB  
Review
Automotive Augmented Reality Head-Up Displays
by Chen Zhou, Wen Qiao, Jianyu Hua and Linsen Chen
Micromachines 2024, 15(4), 442; https://doi.org/10.3390/mi15040442 (registering DOI) - 26 Mar 2024
Viewed by 706
Abstract
As the next generation of in-vehicle intelligent platforms, the augmented reality heads-up display (AR-HUD) has a huge information interaction capacity, can provide drivers with auxiliary driving information, avoid the distractions caused by the lower head during the driving process, and greatly improve driving [...] Read more.
As the next generation of in-vehicle intelligent platforms, the augmented reality heads-up display (AR-HUD) has a huge information interaction capacity, can provide drivers with auxiliary driving information, avoid the distractions caused by the lower head during the driving process, and greatly improve driving safety. However, AR-HUD systems still face great challenges in the realization of multi-plane full-color display, and they cannot truly achieve the integration of virtual information and real road conditions. To overcome these problems, many new devices and materials have been applied to AR-HUDs, and many novel systems have been developed. This study first reviews some key metrics of HUDs, investigates the structures of various picture generation units (PGUs), and finally focuses on the development status of AR-HUDs, analyzes the advantages and disadvantages of existing technologies, and points out the future research directions for AR-HUDs. Full article
(This article belongs to the Special Issue Novel 3D Display Technology towards Metaverse)
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16 pages, 6667 KiB  
Article
A Temperature Prediction Model for Flexible Electronic Devices Based on GA-BP Neural Network and Experimental Verification
by Jin Nan, Jiayun Chen, Min Li, Yuhang Li, Yinji Ma and Xuanqing Fan
Micromachines 2024, 15(4), 430; https://doi.org/10.3390/mi15040430 (registering DOI) - 23 Mar 2024
Viewed by 671
Abstract
The problem that the thermal safety of flexible electronic devices is difficult to evaluate in real time is addressed in this study by establishing a BP neural network (GA-BPNN) temperature prediction model based on genetic algorithm optimisation. The model uses a BP neural [...] Read more.
The problem that the thermal safety of flexible electronic devices is difficult to evaluate in real time is addressed in this study by establishing a BP neural network (GA-BPNN) temperature prediction model based on genetic algorithm optimisation. The model uses a BP neural network to fit the functional relationship between the input condition and the steady-state temperature of the equipment and uses a genetic algorithm to optimise the parameter initialisation problem of the BP neural network. To overcome the challenge of the high cost of obtaining experimental data, finite element analysis software is used to simulate the temperature results of the equipment under different working conditions. The prediction variance of the GA-BPNN model does not exceed 0.57 °C and has good robustness, as the model is trained according to the simulation data. The study conducted thermal validation experiments on the temperature prediction model for this flexible electronic device. The device reached steady state after 1200 s of operation at rated power. The error between the predicted and experimental results was less than 0.9 °C, verifying the validity of the model’s predictions. Compared with traditional thermal simulation and experimental methods, this model can quickly predict the temperature with a certain accuracy and has outstanding advantages in computational efficiency and integrated application of hardware and software. Full article
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14 pages, 6585 KiB  
Article
Enhancing Manufacturability of SU-8 Piezoelectric Composite Films for Microsystem Applications
by Irma Rocio Vazquez, Zeynel Guler and Nathan Jackson
Micromachines 2024, 15(3), 397; https://doi.org/10.3390/mi15030397 - 14 Mar 2024
Viewed by 955
Abstract
Piezoelectric thin films are extensively used as sensing or actuating layers in various micro-electromechanical systems (MEMS) applications. However, most piezoelectrics are stiff ceramics, and current polymer piezoelectrics are not compatible with microfabrication due to their low Curie Temperature. Recent polymer-composite piezoelectrics have gained [...] Read more.
Piezoelectric thin films are extensively used as sensing or actuating layers in various micro-electromechanical systems (MEMS) applications. However, most piezoelectrics are stiff ceramics, and current polymer piezoelectrics are not compatible with microfabrication due to their low Curie Temperature. Recent polymer-composite piezoelectrics have gained interest but can be difficult to pattern. Photodefinable piezoelectric films could resolve these challenges by reducing the manufacturability steps by eliminating the etching process. But they typically have poor resolution and thickness properties. This study explores methods of enhancing the manufacturability of piezoelectric composite films by optimizing the process parameters and synthesis of SU-8 piezo-composite materials. Piezoelectric ceramic powders (barium titanate (BTO) and lead zirconate titanate (PZT)) were integrated into SU-8, a negative epoxy-based photoresist, to produce high-resolution composites in a non-cleanroom environment. I-line (365 nm) light was used to enhance resolution compared to broadband lithography. Two variations of SU-8 were prepared by thinning down SU-8 3050 and SU-8 3005. Different weight percentages of the piezoelectric powders were investigated: 5, 10, 15 and 20 wt.% along with varied photolithography processing parameters. The composites’ transmittance properties were characterized using UV-Vis spectroscopy and the films’ crystallinity was determined using X-ray diffraction (XRD). The 0–3 SU-8/piezo composites demonstrated resolutions < 2 μm while maintaining bulk piezoelectric coefficients d33 > 5 pm V−1. The films were developed with thicknesses >10 μm. Stacked layers were achieved and demonstrated significantly higher d33 properties. Full article
(This article belongs to the Special Issue Smart Functional Micro/Nano Structured Surfaces)
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18 pages, 5866 KiB  
Review
Recent Progress in Droplet Structure Machining for Advanced Optics
by Jin-Kun Guo, W.D.N. Sandaruwan, Jinwei Li, Jinzhong Ling, Ying Yuan, Xin Liu, Qiang Li and Xiaorui Wang
Micromachines 2024, 15(3), 337; https://doi.org/10.3390/mi15030337 - 28 Feb 2024
Viewed by 839
Abstract
The development of optical and photonic applications using soft-matter droplets holds great scientific and application importance. The machining of droplet structures is expected to drive breakthroughs in advancing frontier applications. This review highlights recent advancements in micro–nanofabrication techniques for soft-matter droplets, encompassing microfluidics, [...] Read more.
The development of optical and photonic applications using soft-matter droplets holds great scientific and application importance. The machining of droplet structures is expected to drive breakthroughs in advancing frontier applications. This review highlights recent advancements in micro–nanofabrication techniques for soft-matter droplets, encompassing microfluidics, laser injection, and microfluidic 3D printing. The principles, advantages, and weaknesses of these technologies are thoroughly discussed. The review introduces the utilization of a phase separation strategy in microfluidics to assemble complex emulsion droplets and control droplet geometries by adjusting interfacial tension. Additionally, laser injection can take full advantage of the self-assembly properties of soft matter to control the spontaneous organization of internal substructures within droplets, thus providing the possibility of high-precision customized assembly of droplets. Microfluidic 3D printing demonstrates a 3D printing-based method for machining droplet structures. Its programmable nature holds promise for developing device-level applications utilizing droplet arrays. Finally, the review presents novel applications of soft-matter droplets in optics and photonics. The integration of processing concepts from microfluidics, laser micro–nano-machining, and 3D printing into droplet processing, combined with the self-assembly properties of soft materials, may offer novel opportunities for processing and application development. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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17 pages, 9913 KiB  
Article
Hollow Microcavity Electrode for Enhancing Light Extraction
by Seonghyeon Park, Byeongwoo Kang, Seungwon Lee, Jian Cheng Bi, Jaewon Park, Young Hyun Hwang, Jun-Young Park, Ha Hwang, Young Wook Park and Byeong-Kwon Ju
Micromachines 2024, 15(3), 328; https://doi.org/10.3390/mi15030328 - 27 Feb 2024
Viewed by 1105
Abstract
Luminous efficiency is a pivotal factor for assessing the performance of optoelectronic devices, wherein light loss caused by diverse factors is harvested and converted into the radiative mode. In this study, we demonstrate a nanoscale vacuum photonic crystal layer (nVPCL) for light extraction [...] Read more.
Luminous efficiency is a pivotal factor for assessing the performance of optoelectronic devices, wherein light loss caused by diverse factors is harvested and converted into the radiative mode. In this study, we demonstrate a nanoscale vacuum photonic crystal layer (nVPCL) for light extraction enhancement. A corrugated semi-transparent electrode incorporating a periodic hollow-structure array was designed through a simulation that utilizes finite-difference time-domain computational analysis. The corrugated profile, stemming from the periodic hollow structure, was fabricated using laser interference lithography, which allows the precise engineering of various geometrical parameters by controlling the process conditions. The semi-transparent electrode consisted of a 15 nm thick Ag film, which acted as the exit mirror and induced microcavity resonance. When applied to a conventional green organic light-emitting diode (OLED) structure, the optimized nVPCL-integrated device demonstrated a 21.5% enhancement in external quantum efficiency compared to the reference device. Further, the full width at half maximum exhibited a 27.5% reduction compared to that of the reference device, demonstrating improved color purity. This study presents a novel approach by applying a hybrid thin film electrode design to optoelectronic devices to enhance optical efficiency and color purity. Full article
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15 pages, 4207 KiB  
Review
Beam Steering Technology of Optical Phased Array Based on Silicon Photonic Integrated Chip
by Jinyu Wang, Ruogu Song, Xinyu Li, Wencheng Yue, Yan Cai, Shuxiao Wang and Mingbin Yu
Micromachines 2024, 15(3), 322; https://doi.org/10.3390/mi15030322 - 26 Feb 2024
Viewed by 1203
Abstract
Light detection and ranging (LiDAR) is widely used in scenarios such as autonomous driving, imaging, remote sensing surveying, and space communication due to its advantages of high ranging accuracy and large scanning angle. Optical phased array (OPA) has been studied as an important [...] Read more.
Light detection and ranging (LiDAR) is widely used in scenarios such as autonomous driving, imaging, remote sensing surveying, and space communication due to its advantages of high ranging accuracy and large scanning angle. Optical phased array (OPA) has been studied as an important solution for achieving all-solid-state scanning. In this work, the recent research progress in improving the beam steering performance of the OPA based on silicon photonic integrated chips was reviewed. An optimization scheme for aperiodic OPA is proposed. Full article
(This article belongs to the Special Issue Silicon Photonic Devices and Integration)
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19 pages, 7888 KiB  
Review
Research on the Reliability of Threshold Voltage Based on GaN High-Electron-Mobility Transistors
by Pengfei Dai, Shaowei Wang and Hongliang Lu
Micromachines 2024, 15(3), 321; https://doi.org/10.3390/mi15030321 - 25 Feb 2024
Viewed by 982
Abstract
With the development of high-voltage and high-frequency switching circuits, GaN high-electron-mobility transistor (HEMT) devices with high bandwidth, high electron mobility, and high breakdown voltage have become an important research topic in this field. It has been found that GaN HEMT devices have a [...] Read more.
With the development of high-voltage and high-frequency switching circuits, GaN high-electron-mobility transistor (HEMT) devices with high bandwidth, high electron mobility, and high breakdown voltage have become an important research topic in this field. It has been found that GaN HEMT devices have a drift in threshold voltage under the conditions of temperature and gate stress changes. Under high-temperature conditions, the difference in gate contact also causes the threshold voltage to shift. The variation in the threshold voltage affects the stability of the device as well as the overall circuit performance. Therefore, in this paper, a review of previous work is presented. Temperature variation, gate stress variation, and gate contact variation are investigated to analyze the physical mechanisms that generate the threshold voltage (VTH) drift phenomenon in GaN HEMT devices. Finally, improvement methods suitable for GaN HEMT devices under high-temperature and high-voltage conditions are summarized. Full article
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15 pages, 8238 KiB  
Article
An Efficient 3D-Printed Gravity Mixer for Lab-on-a-CD Applications
by Yunxia Wang, Yong Zhang, Zheng Qiao and Wanjun Wang
Micromachines 2024, 15(3), 291; https://doi.org/10.3390/mi15030291 - 20 Feb 2024
Viewed by 787
Abstract
We introduced a new, highly efficient, and uncomplicated mixing device for centrifugal microfluidic platforms, called the gravity mixer. The gravity mixer featured a slope channel that can precisely and sequentially control micro-volume liquids using centrifugal, capillary, and gravitational forces to achieve the desired [...] Read more.
We introduced a new, highly efficient, and uncomplicated mixing device for centrifugal microfluidic platforms, called the gravity mixer. The gravity mixer featured a slope channel that can precisely and sequentially control micro-volume liquids using centrifugal, capillary, and gravitational forces to achieve the desired mixing effect. By adjusting the angular velocity, micro-volumes of liquids in the slope channel of the gravity mixer could be precisely controlled across a wide range. We evaluated the change in mixing efficiency by varying the slope geometry, including the slope angle and the number of mixing cycles. Our study of gravity mixers with different slope angles revealed that the 80° angle gravity mixer achieved the best mixing efficiency, with a standard deviation of 2.39. Additionally, the mixing process in the gravity mixer is highly repeatable, achieving the desired mixing efficiency after only three cycles of operation. Our gravity mixer design and implementation can facilitate the development of more complex 3D-printed lab-on-chip devices. Full article
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17 pages, 3795 KiB  
Article
Consideration of Power Transmission Characteristics in a Micro-Gear Train
by Yasuhiko Arai
Micromachines 2024, 15(2), 284; https://doi.org/10.3390/mi15020284 - 17 Feb 2024
Viewed by 733
Abstract
Characteristics related to power transmission in the micro-domain, based on dry rolling contact of the gears, were investigated using a 3D-printed gear train with a pitch circle diameter of 84 µm in order to experimentally compare the power transmission efficiency in the macro- [...] Read more.
Characteristics related to power transmission in the micro-domain, based on dry rolling contact of the gears, were investigated using a 3D-printed gear train with a pitch circle diameter of 84 µm in order to experimentally compare the power transmission efficiency in the macro- and micro-domains. For a basic gear train with two intermeshing gears, it was shown that the gear train in the micro-domain was capable of transmitting power to the same extent as in the macro-domain. However, in gear trains with complex power transmission paths, assuming a planetary gear train with multiple meshing gears, it has been shown that the power transmission characteristics of micro-domain gears differ from those in the macro-domain. The use of gear trains in the micro-region necessitates consideration of the loss of transmitted torque due to contact between tooth surfaces, which is unique to the micro-region and different from its use in the macro-region. Full article
(This article belongs to the Section E:Engineering and Technology)
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15 pages, 2385 KiB  
Article
In Vivo Characterization of Intracortical Probes with Focused Ion Beam-Etched Nanopatterned Topographies
by Jonathan L. Duncan, Jaime J. Wang, Gabriele Glusauskas, Gwendolyn R. Weagraff, Yue Gao, George F. Hoeferlin, Allen H. Hunter, Allison Hess-Dunning, Evon S. Ereifej and Jeffrey R. Capadona
Micromachines 2024, 15(2), 286; https://doi.org/10.3390/mi15020286 - 17 Feb 2024
Viewed by 793
Abstract
(1) Background: Intracortical microelectrodes (IMEs) are an important part of interfacing with the central nervous system (CNS) and recording neural signals. However, recording electrodes have shown a characteristic steady decline in recording performance owing to chronic neuroinflammation. The topography of implanted devices has [...] Read more.
(1) Background: Intracortical microelectrodes (IMEs) are an important part of interfacing with the central nervous system (CNS) and recording neural signals. However, recording electrodes have shown a characteristic steady decline in recording performance owing to chronic neuroinflammation. The topography of implanted devices has been explored to mimic the nanoscale three-dimensional architecture of the extracellular matrix. Our previous work used histology to study the implant sites of non-recording probes and showed that a nanoscale topography at the probe surface mitigated the neuroinflammatory response compared to probes with smooth surfaces. Here, we hypothesized that the improvement in the neuroinflammatory response for probes with nanoscale surface topography would extend to improved recording performance. (2) Methods: A novel design modification was implemented on planar silicon-based neural probes by etching nanopatterned grooves (with a 500 nm pitch) into the probe shank. To assess the hypothesis, two groups of rats were implanted with either nanopatterned (n = 6) or smooth control (n = 6) probes, and their recording performance was evaluated over 4 weeks. Postmortem gene expression analysis was performed to compare the neuroinflammatory response from the two groups. (3) Results: Nanopatterned probes demonstrated an increased impedance and noise floor compared to controls. However, the recording performances of the nanopatterned and smooth probes were similar, with active electrode yields for control probes and nanopatterned probes being approximately 50% and 45%, respectively, by 4 weeks post-implantation. Gene expression analysis showed one gene, Sirt1, differentially expressed out of 152 in the panel. (4) Conclusions: this study provides a foundation for investigating novel nanoscale topographies on neural probes. Full article
(This article belongs to the Special Issue Bioinspired Materials and Microdevices: Fabrications and Applications)
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18 pages, 8465 KiB  
Article
Geometry-Dependent Elastic Flow Dynamics in Micropillar Arrays
by Oskar E. Ström, Jason P. Beech and Jonas O. Tegenfeldt
Micromachines 2024, 15(2), 268; https://doi.org/10.3390/mi15020268 - 13 Feb 2024
Viewed by 697
Abstract
Regular device-scale DNA waves for high DNA concentrations and flow velocities have been shown to emerge in quadratic micropillar arrays with potentially strong relevance for a wide range of microfluidic applications. Hexagonal arrays constitute another geometry that is especially relevant for the microfluidic [...] Read more.
Regular device-scale DNA waves for high DNA concentrations and flow velocities have been shown to emerge in quadratic micropillar arrays with potentially strong relevance for a wide range of microfluidic applications. Hexagonal arrays constitute another geometry that is especially relevant for the microfluidic pulsed-field separation of DNA. Here, we report on the differences at the micro and macroscopic scales between the resulting wave patterns for these two regular array geometries and one disordered array geometry. In contrast to the large-scale regular waves visible in the quadratic array, in the hexagonal arrays, waves occur in a device-scale disordered zig-zag pattern with fluctuations on a much smaller scale. We connect the large-scale pattern to the microscopic flow and observe flow synchronization that switches between two directions for both the quadratic and hexagonal arrays. We show the importance of order using the disordered array, where steady-state stationary and highly fluctuating flow states persist in seemingly random locations across the array. We compare the flow dynamics of the arrays to that in a device with sparsely distributed pillars. Here, we observe similar vortex shedding, which is clearly observable in the quadratic and disordered arrays. However, the shedding of these vortices couples only in the flow direction and not laterally as in the dense, ordered arrays. We believe that our findings will contribute to the understanding of elastic flow dynamics in pillar arrays, helping us elucidate the fundamental principles of non-Newtonian fluid flow in complex environments as well as supporting applications in engineering involving e.g., transport, sorting, and mixing of complex fluids. Full article
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24 pages, 6875 KiB  
Article
Pysanky to Microfluidics: An Innovative Wax-Based Approach to Low Cost, Rapid Prototyping of Microfluidic Devices
by Philip J. Schneider, Liam B. Christie, Nicholas M. Eadie, Tyler J. Siskar, Viktor Sukhotskiy, Domin Koh, Anyang Wang and Kwang W. Oh
Micromachines 2024, 15(2), 240; https://doi.org/10.3390/mi15020240 - 05 Feb 2024
Viewed by 1089
Abstract
A wax-based contact printing method to create microfluidic devices is demonstrated. This printing technology demonstrates a new pathway to rapid, cost-effective device prototyping, eliminating the use of expensive micromachining equipment and chemicals. Derived from the traditional Ukrainian Easter egg painting technique called “pysanky” [...] Read more.
A wax-based contact printing method to create microfluidic devices is demonstrated. This printing technology demonstrates a new pathway to rapid, cost-effective device prototyping, eliminating the use of expensive micromachining equipment and chemicals. Derived from the traditional Ukrainian Easter egg painting technique called “pysanky” a series of microfluidic devices were created. Pysanky is the use of a heated wax stylus, known as a “kistka”, to create micro-sized, intricate designs on the surface of an egg. The proposed technique involves the modification of an x-y-z actuation translation system with a wax extruder tip in junction with Polydimethysiloxane (PDMS) device fabrication techniques. Initial system optimization was performed considering design parameters such as extruder tip size, contact angle, write speed, substrate temperature, and wax temperature. Channels created ranged from 160 to 900 μm wide and 10 to 150 μm high based upon system operating parameters set by the user. To prove the capabilities of this technology, a series of microfluidic mixers were created via the wax technique as well as through traditional photolithography: a spiral mixer, a rainbow mixer, and a linear serial dilutor. A thermo-fluidic computational fluid dynamic (CFD) model was generated as a means of enabling rational tuning, critical to the optimization of systems in both normal and extreme conditions. A comparison between the computational and experimental models yielded a wax height of 57.98 μm and 57.30 μm, respectively, and cross-sectional areas of 11,568 μm2 and 12,951 μm2, respectively, resulting in an error of 1.18% between the heights and 10.76% between the cross-sectional areas. The device’s performance was then compared using both qualitative and quantitative measures, considering factors such as device performance, channel uniformity, repeatability, and resolution. Full article
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15 pages, 2736 KiB  
Article
A High-Voltage-Isolated MEMS Quad–Solenoid Transformer with Specific Insulation Barriers for Miniaturized Galvanically Isolated Power Applications
by Changnan Chen, Pichao Pan, Jiebin Gu and Xinxin Li
Micromachines 2024, 15(2), 228; https://doi.org/10.3390/mi15020228 - 31 Jan 2024
Viewed by 851
Abstract
The paper reports on high voltage (HV)-isolated MEMS quad–solenoid transformers for compact isolated gate drivers and bias power supplies. The component is wafer-level fabricated via a novel MEMS micro-casting technique, where the tightly coupled quad–solenoid chip consists of monolithically integrated 3D inductive coils [...] Read more.
The paper reports on high voltage (HV)-isolated MEMS quad–solenoid transformers for compact isolated gate drivers and bias power supplies. The component is wafer-level fabricated via a novel MEMS micro-casting technique, where the tightly coupled quad–solenoid chip consists of monolithically integrated 3D inductive coils and an inserted ferrite magnetic core for high-efficiency isolated power transmission through electromagnetic coupling. The proposed HV-isolated transformer demonstrates a high inductance value of 743.2 nH, along with a small DC resistance of only 0.39 Ω in a compact footprint of 6 mm2, making it achieve a very high inductance integration density (123.9 nH/mm2) and the ratio of L/R (1906 nH/Ω). More importantly, with embedded ultra-thick serpentine-shaped (S-shaped) SiO2 isolation barriers that completely separate the primary and secondary windings, an over 2 kV breakdown voltage is obtained. In addition, the HV-isolated transformer chips exhibit a superior power transfer efficiency of over 80% and ultra-high dual-phase saturation current of 1.4 A, thereby covering most practical cases in isolated, integrated bias power supplies such as high-efficiency high-voltage-isolated gate driver solutions. Full article
(This article belongs to the Section E:Engineering and Technology)
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11 pages, 3877 KiB  
Communication
Microfabricated Nitinol Stent Retrievers with a Micro-Patterned Surface
by Shogo Kato, Yuzuki Ban, Takashi Ota and Norihisa Miki
Micromachines 2024, 15(2), 213; https://doi.org/10.3390/mi15020213 - 31 Jan 2024
Viewed by 833
Abstract
Stent retrievers are medical devices that are designed to physically remove blood clots from within the blood vessels of the brain. This paper focuses on microfabricated nitinol (nickel–titanium alloy) stent retrievers, which feature micro-patterns on their surface to enhance the effectiveness of mechanical [...] Read more.
Stent retrievers are medical devices that are designed to physically remove blood clots from within the blood vessels of the brain. This paper focuses on microfabricated nitinol (nickel–titanium alloy) stent retrievers, which feature micro-patterns on their surface to enhance the effectiveness of mechanical thrombectomy. A thick film of nitinol, which was 20 µm in thickness, was sputtered onto a substrate with a micro-patterned surface, using electroplated copper as the sacrificial layer. The nitinol film was released from the substrate and then thermally treated while folded into a cylindrical shape. In vitro experiments with pig blood clots demonstrated that the micro-patterns on the surface improved the efficacy of blood clot retrieval. Full article
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20 pages, 5211 KiB  
Article
Wind Tunnel Characterization of a Graphene-Enhanced PEDOT:PSS Sensing Element for Aircraft Ice Detection Systems
by Dario Farina, Marco Mazio, Hatim Machrafi, Patrick Queeckers and Carlo Saverio Iorio
Micromachines 2024, 15(2), 198; https://doi.org/10.3390/mi15020198 - 28 Jan 2024
Cited by 1 | Viewed by 1743
Abstract
This study details the development and validation of a graphene-based ice detection system, designed to enhance flight safety by monitoring ice accumulation on aircraft surfaces. The system employs a semiconductive polymer (PEDOT:PSS) with graphene electrodes, interpreting resistance changes to detect water impact and [...] Read more.
This study details the development and validation of a graphene-based ice detection system, designed to enhance flight safety by monitoring ice accumulation on aircraft surfaces. The system employs a semiconductive polymer (PEDOT:PSS) with graphene electrodes, interpreting resistance changes to detect water impact and ice formation in real time. The sensor’s performance was rigorously tested in a wind tunnel under various temperature and airflow conditions, focusing on resistance signal dependency on air temperature and phase change. The results demonstrate the sensor’s ability to distinguish water droplet impacts from ice formation, with a notable correlation between resistance signal amplitude and water droplet impacts leading to ice accretion. Further analysis shows a significant relationship between air temperature and the resistance signal amplitude, particularly at lower temperatures beneficial to ice formation. This underlines the sensor’s precision in varied atmospheric conditions. The system’s compact design and accurate detection highlight its potential for improving aircraft ice monitoring, offering a path toward a robust and reliable ice detection system. Full article
(This article belongs to the Special Issue Functional Polymers for Optic/Electronic Applications)
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22 pages, 44037 KiB  
Review
Acoustic Actuators for the Manipulation of Micro/Nanorobots: State-of-the-Art and Future Outlooks
by Hiep Xuan Cao, Van Du Nguyen, Jong-Oh Park, Eunpyo Choi and Byungjeon Kang
Micromachines 2024, 15(2), 186; https://doi.org/10.3390/mi15020186 - 26 Jan 2024
Viewed by 1102
Abstract
Compared to other actuating methods, acoustic actuators offer the distinctive capability of the contactless manipulation of small objects, such as microscale and nanoscale robots. Furthermore, they have the ability to penetrate the skin, allowing for the trapping and manipulation of micro/nanorobots that carry [...] Read more.
Compared to other actuating methods, acoustic actuators offer the distinctive capability of the contactless manipulation of small objects, such as microscale and nanoscale robots. Furthermore, they have the ability to penetrate the skin, allowing for the trapping and manipulation of micro/nanorobots that carry therapeutic agents in diverse media. In this review, we summarize the current progress in using acoustic actuators for the manipulation of micro/nanorobots used in various biomedical applications. First, we introduce the actuating method of using acoustic waves to manipulate objects, including the principle of operation and different types of acoustic actuators that are usually employed. Then, applications involving manipulating different types of devices are reviewed, including bubble-based microrobots, bubble-free robots, biohybrid microrobots, and nanorobots. Finally, we discuss the challenges and future perspectives for the development of the field. Full article
(This article belongs to the Special Issue Acoustical Tweezers: From Fundamental Research to Applications)
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19 pages, 3771 KiB  
Review
Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices
by Ziba Torkashvand, Farzaneh Shayeganfar and Ali Ramazani
Micromachines 2024, 15(2), 175; https://doi.org/10.3390/mi15020175 - 24 Jan 2024
Viewed by 1343
Abstract
The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last [...] Read more.
The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles. Full article
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19 pages, 4477 KiB  
Article
Laser-Induced Intracellular Delivery: Exploiting Gold-Coated Spiky Polymeric Nanoparticles and Gold Nanorods under Near-Infrared Pulses for Single-Cell Nano-Photon-Poration
by Ashish Kumar, Bishal Kumar Nahak, Pallavi Gupta, Tuhin Subhra Santra and Fan-Gang Tseng
Micromachines 2024, 15(2), 168; https://doi.org/10.3390/mi15020168 - 23 Jan 2024
Cited by 1 | Viewed by 1096
Abstract
This study explores the potential of laser-induced nano-photon-poration as a non-invasive technique for the intracellular delivery of micro/macromolecules at the single-cell level. This research proposes the utilization of gold-coated spiky polymeric nanoparticles (Au-PNPs) and gold nanorods (GNRs) to achieve efficient intracellular micro/macromolecule delivery [...] Read more.
This study explores the potential of laser-induced nano-photon-poration as a non-invasive technique for the intracellular delivery of micro/macromolecules at the single-cell level. This research proposes the utilization of gold-coated spiky polymeric nanoparticles (Au-PNPs) and gold nanorods (GNRs) to achieve efficient intracellular micro/macromolecule delivery at the single-cell level. By shifting the operating wavelength towards the near-infrared (NIR) range, the intracellular delivery efficiency and viability of Au-PNP-mediated photon-poration are compared to those using GNR-mediated intracellular delivery. Employing Au-PNPs as mediators in conjunction with nanosecond-pulsed lasers, a highly efficient intracellular delivery, while preserving high cell viability, is demonstrated. Laser pulses directed at Au-PNPs generate over a hundred hot spots per particle through plasmon resonance, facilitating the formation of photothermal vapor nanobubbles (PVNBs). These PVNBs create transient pores, enabling the gentle transfer of cargo from the extracellular to the intracellular milieu, without inducing deleterious effects in the cells. The optimization of wavelengths in the NIR region, coupled with low laser fluence (27 mJ/cm2) and nanoparticle concentrations (34 µg/mL), achieves outstanding delivery efficiencies (96%) and maintains high cell viability (up to 99%) across the various cell types, including cancer and neuronal cells. Importantly, sustained high cell viability (90–95%) is observed even 48 h post laser exposure. This innovative development holds considerable promise for diverse applications, encompassing drug delivery, gene therapy, and regenerative medicine. This study underscores the efficiency and versatility of the proposed technique, positioning it as a valuable tool for advancing intracellular delivery strategies in biomedical applications. Full article
(This article belongs to the Special Issue Biosensors for Biomedical and Environmental Applications, Volume 2)
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16 pages, 12989 KiB  
Article
Design of a Micro-Electro Mechanical System Quad Mass Gyroscope with Compliant Mechanical Amplification
by Jingchuan Zhou, Dacheng Xu, Xinxin Li and Fang Chen
Micromachines 2024, 15(1), 124; https://doi.org/10.3390/mi15010124 - 11 Jan 2024
Viewed by 1079
Abstract
In this work, a novel mechanical amplification structure for a MEMS vibratory gyroscope is proposed with the aim of improving their sensitivity. The scheme is implemented using a system of micromachined V-shaped springs as a deflection amplifying mechanism. The effectiveness of the mechanism [...] Read more.
In this work, a novel mechanical amplification structure for a MEMS vibratory gyroscope is proposed with the aim of improving their sensitivity. The scheme is implemented using a system of micromachined V-shaped springs as a deflection amplifying mechanism. The effectiveness of the mechanism is first demonstrated for a capacitive fully decoupled quad mass gyroscope. A proof of concept vertical-axis mechanically amplified gyroscope with an amplification factor of 365% has been designed, simulated and fabricated, and results from its evaluation are presented in this paper. Experimental results show that the natural frequency of the gyroscope is 11.67 KHz, and the full scale measurement range is up to ±400°/s with a maximum nonlinearity of 54.69 ppm. The bias stability is 44.53°/h. The experiment results show that this quad mass gyroscope’s performance is a very potential new way of reaching the navigation grade in the future. Full article
(This article belongs to the Special Issue MEMS/NEMS Devices and Applications, 2nd Edition)
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19 pages, 12908 KiB  
Article
A 3D-Printed Piezoelectric Microdevice for Human Energy Harvesting for Wearable Biosensors
by Ihor Sobianin, Sotiria D. Psoma and Antonios Tourlidakis
Micromachines 2024, 15(1), 118; https://doi.org/10.3390/mi15010118 - 10 Jan 2024
Viewed by 1233
Abstract
The human body is a source of multiple types of energy, such as mechanical, thermal and biochemical, which can be scavenged through appropriate technological means. Mechanical vibrations originating from contraction and expansion of the radial artery represent a reliable source of displacement to [...] Read more.
The human body is a source of multiple types of energy, such as mechanical, thermal and biochemical, which can be scavenged through appropriate technological means. Mechanical vibrations originating from contraction and expansion of the radial artery represent a reliable source of displacement to be picked up and exploited by a harvester. The continuous monitoring of physiological biomarkers is an essential part of the timely and accurate diagnosis of a disease with subsequent medical treatment, and wearable biosensors are increasingly utilized for biomedical data acquisition of important biomarkers. However, they rely on batteries and their replacement introduces a discontinuity in measured signals, which could be critical for the patients and also causes discomfort. In the present work, the research into a novel 3D-printed wearable energy harvesting platform for scavenging energy from arterial pulsations via a piezoelectric material is described. An elastic thermoplastic polyurethane (TPU) film, which forms an air chamber between the skin and the piezoelectric disc electrode, was introduced to provide better adsorption to the skin, prevent damage to the piezoelectric disc and electrically isolate components in the platform from the human body. Computational fluid dynamics in the framework of COMSOL Multiphysics 6.1 software was employed to perform a series of coupled time-varying simulations of the interaction among a number of associated physical phenomena. The mathematical model of the harvester was investigated computationally, and quantification of the output energy and power parameters was used for comparisons. A prototype wearable platform enclosure was designed and manufactured using fused filament fabrication (FFF). The influence of the piezoelectric disc material and its diameter on the electrical output were studied and various geometrical parameters of the enclosure and the TPU film were optimized based on theoretical and empirical data. Physiological data, such as interdependency between the harvester skin fit and voltage output, were obtained. Full article
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30 pages, 17885 KiB  
Review
Review on Abrasive Machining Technology of SiC Ceramic Composites
by Huiyun Zhang, Zhigang Zhao, Jiaojiao Li, Linzheng Ye and Yao Liu
Micromachines 2024, 15(1), 106; https://doi.org/10.3390/mi15010106 - 07 Jan 2024
Viewed by 1379
Abstract
Ceramic matrix composites have the advantages of low density, high specific strength, high specific die, high-temperature resistance, wear resistance, chemical corrosion resistance, etc., which are widely used in aerospace, energy, transportation, and other fields. CMCs have become an important choice for engine components [...] Read more.
Ceramic matrix composites have the advantages of low density, high specific strength, high specific die, high-temperature resistance, wear resistance, chemical corrosion resistance, etc., which are widely used in aerospace, energy, transportation, and other fields. CMCs have become an important choice for engine components and other high-temperature component manufacturing. However, ceramic matrix composite is a kind of multi-phase structure, anisotropy, high hardness material, due to the brittleness of the ceramic matrix, the weak bonding force between fiber and matrix, and the anisotropy of composite material. Burr, delamination, tearing, chips, and other surface damage tend to generate in the machining, resulting in surface quality and strength decline. This paper reviewed the latest abrasive machining technology for SiC ceramic composites. The characteristics and research directions of the main abrasive machining technology, including grinding, laser-assisted grinding, ultrasonic-assisted grinding, and abrasive waterjet machining, are introduced first. Then, the commonly used numerical simulation research for modeling and simulating the machining of ceramic matrix composites is briefly summarized. Finally, the processing difficulties and research hotspots of ceramic matrix composites are summarized. Full article
(This article belongs to the Special Issue Recent Advances in Micro/Nano-Fabrication)
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33 pages, 12133 KiB  
Review
A Review on Machining SiCp/Al Composite Materials
by Zhigao Chen, Fei Ding, Zhichao Zhang, Qiuyan Liao, Zheng Qiao, Yuan Jin, Mingjun Chen and Bo Wang
Micromachines 2024, 15(1), 107; https://doi.org/10.3390/mi15010107 - 07 Jan 2024
Cited by 1 | Viewed by 2417
Abstract
SiCp/Al composite materials are widely used in various industries such as the aerospace and the electronics industries, primarily due to their excellent material properties. However, their machinability is significantly weakened due to their unique characteristics. Consequently, efficient and precise machining technology for SiCp/Al [...] Read more.
SiCp/Al composite materials are widely used in various industries such as the aerospace and the electronics industries, primarily due to their excellent material properties. However, their machinability is significantly weakened due to their unique characteristics. Consequently, efficient and precise machining technology for SiCp/Al composite materials has become a crucial research area. By conducting a comprehensive analysis of the relevant research literature from both domestic and international sources, this study examines the processing mechanism, as well as the turning, milling, drilling, grinding, special machining, and hybrid machining characteristics, of SiCp/Al composite materials. Moreover, it summarizes the latest research progress in composite material processing while identifying the existing problems and shortcomings in this area. The aim of this review is to enhance the machinability of SiCp/Al composite materials and promote high-quality and efficient processing methods. Full article
(This article belongs to the Section D:Materials and Processing)
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18 pages, 9153 KiB  
Article
Application of Braided Piezoelectric Poly-l-Lactic Acid Cord Sensor to Sleep Bruxism Detection System with Less Physical or Mental Stress
by Yoshiro Tajitsu, Saki Shimda, Takuto Nonomura, Hiroki Yanagimoto, Shun Nakamura, Ryoma Ueshima, Miyu Kawanobe, Takuo Nakiri, Jun Takarada, Osamu Takeuchi, Rei Nisho, Koji Takeshita, Mitsuru Takahashi and Kazuki Sugiyama
Micromachines 2024, 15(1), 86; https://doi.org/10.3390/mi15010086 - 30 Dec 2023
Viewed by 1628
Abstract
For many years, we have been developing flexible sensors made of braided piezoelectric poly-l-lactic acid (PLLA) fibers that can be tied and untied for practical applications in society. To ensure good quality of sleep, the occurrence of bruxism has been attracting attention in [...] Read more.
For many years, we have been developing flexible sensors made of braided piezoelectric poly-l-lactic acid (PLLA) fibers that can be tied and untied for practical applications in society. To ensure good quality of sleep, the occurrence of bruxism has been attracting attention in recent years. Currently, there is a need for a system that can easily and accurately measure the frequency of bruxism at home. Therefore, taking advantage of the braided piezoelectric PLLA cord sensor’s unique characteristic of being sewable, we aimed to provide a system that can measure the frequency of bruxism using the braided piezoelectric PLLA cord sensor simply sewn onto a bed sheet on which the subject lies down. After many tests using trial and error, the sheet sensor was completed with zigzag stitching. Twenty subjects slept overnight in a hospital room on sheets integrated with a braided piezoelectric PLLA cord. Polysomnography (PSG) was simultaneously performed on these subjects. The results showed that their bruxism could be detected with an accuracy of more than 95% compared with PSG measurements, which can only be performed in a hospital by a physician and are more burdensome for the subjects, with the subjects simply lying on the bed sheet with a braided piezoelectric PLLA cord sensor sewn into it. Full article
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13 pages, 3729 KiB  
Article
Integration of Riboflavin-Modified Carbon Fiber Mesh Electrode Systems in a 3D-Printed Catheter Hub
by Charnete Casimero, Robert B. Smith and James Davis
Micromachines 2024, 15(1), 79; https://doi.org/10.3390/mi15010079 - 30 Dec 2023
Viewed by 1032
Abstract
Background: Catheter line infection is a common complication within clinical environments, and there is a pressing need for technological options to aid in reducing the possibility of sepsis. The early identification of contamination could be pivotal in reducing cases and improving outcomes. Method: [...] Read more.
Background: Catheter line infection is a common complication within clinical environments, and there is a pressing need for technological options to aid in reducing the possibility of sepsis. The early identification of contamination could be pivotal in reducing cases and improving outcomes. Method: A sensing rationale based on a riboflavin-modified electrode system integrated within a modified 3D-printed catheter needle-free connector is proposed, which can monitor changes in pH brought about by bacterial contamination. Results: Riboflavin, vitamin B2, is a biocompatible chemical that possesses a redox-active flavin core that is pH dependent. The oxidation peak potential of the adsorbed riboflavin responds linearly to changes in pH with a near-Nernstian behavior of 63 mV/pH unit and is capable of accurately monitoring the pH of an authentic IV infusate. Conclusions: The proof of principle is demonstrated with an electrode-printed hub design offering a valuable foundation from which to explore bacterial interactions within the catheter lumen with the potential of providing an early warning of contamination. Full article
(This article belongs to the Special Issue Feature Papers of Micromachines in Chemistry 2023)
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38 pages, 14476 KiB  
Article
Design and Investigation of Superatoms for Redox Applications: First-Principles Studies
by Celina Sikorska
Micromachines 2024, 15(1), 78; https://doi.org/10.3390/mi15010078 - 29 Dec 2023
Viewed by 1232
Abstract
A superatom is a cluster of atoms that acts like a single atom. Two main groups of superatoms are superalkalis and superhalogens, which mimic the chemistry of alkali and halogen atoms, respectively. The ionization energies of superalkalis are smaller than those of alkalis [...] Read more.
A superatom is a cluster of atoms that acts like a single atom. Two main groups of superatoms are superalkalis and superhalogens, which mimic the chemistry of alkali and halogen atoms, respectively. The ionization energies of superalkalis are smaller than those of alkalis (<3.89 eV for cesium atom), and the electron affinities of superhalogens are larger than that of halogens (>3.61 eV for chlorine atom). Exploring new superalkali/superhalogen aims to provide reliable data and predictions of the use of such compounds as redox agents in the reduction/oxidation of counterpart systems, as well as the role they can play more generally in materials science. The low ionization energies of superalkalis make them candidates for catalysts for CO2 conversion into renewable fuels and value-added chemicals. The large electron affinity of superhalogens makes them strong oxidizing agents for bonding and removing toxic molecules from the environment. By using the superatoms as building blocks of cluster-assembled materials, we can achieve the functional features of atom-based materials (like conductivity or catalytic potential) while having more flexibility to achieve higher performance. This feature paper covers the issues of designing such compounds and demonstrates how modifications of the superatoms (superhalogens and superalkalis) allow for the tuning of the electronic structure and might be used to create unique functional materials. The designed superatoms can form stable perovskites for solar cells, electrolytes for Li-ion batteries of electric vehicles, superatomic solids, and semiconducting materials. The designed superatoms and their redox potential evaluation could help experimentalists create new materials for use in fields such as energy storage and climate change. Full article
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11 pages, 4884 KiB  
Article
Healthcare Wearable Sensors Adhesion to Human Fingernails and Toenails
by Katsuyuki Sakuma, Leanna Pancoast, Yiping Yao and John Knickerbocker
Micromachines 2024, 15(1), 69; https://doi.org/10.3390/mi15010069 - 29 Dec 2023
Viewed by 780
Abstract
A novel adhesion method of a sensor to a fingernail is described. Wearable sensors can provide health insights to humans for a wide variety of benefits, such as continuous wellness monitoring and disease monitoring throughout a patient’s daily life. While there are many [...] Read more.
A novel adhesion method of a sensor to a fingernail is described. Wearable sensors can provide health insights to humans for a wide variety of benefits, such as continuous wellness monitoring and disease monitoring throughout a patient’s daily life. While there are many locations to place these wearable sensors on the body, we will focus on the fingertip, one significant way that people interact with the world. Like artificial fingernails used for aesthetics, wearable healthcare sensors can be attached to the fingernail for short or long time periods with minimal irritation and disruption to daily life. In this study the structure and methods of healthcare sensors’ attachment and removal have been explored to support (1) the sensor functional requirements, (2) biological and environmentally compatible solutions and (3) ease of attachment and removal for short- and long-term user applications. Initial fingernail sensors were attached using a thin adhesive layer of commonly available cosmetic nail glue. While this approach allowed for easy application and strong adhesion to the nail, the removal could expose the fingernail and finger to a commercially available cosmetic nail removal (acetone-based chemical) for extended times measured in minutes. Therefore, a novel structure and method were developed for rapid healthcare sensor attachment and removal in seconds, which supported both the sensor functional objectives and the biologically and environmentally safe use objectives. Full article
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26 pages, 6016 KiB  
Review
Structural and Material-Based Approaches for the Fabrication of Stretchable Light-Emitting Diodes
by Hamin Park and Dong Chan Kim
Micromachines 2024, 15(1), 66; https://doi.org/10.3390/mi15010066 - 28 Dec 2023
Viewed by 1290
Abstract
Stretchable displays, capable of freely transforming their shapes, have received significant attention as alternatives to conventional rigid displays, and they are anticipated to provide new opportunities in various human-friendly electronics applications. As a core component of stretchable displays, high-performance stretchable light-emitting diodes (LEDs) [...] Read more.
Stretchable displays, capable of freely transforming their shapes, have received significant attention as alternatives to conventional rigid displays, and they are anticipated to provide new opportunities in various human-friendly electronics applications. As a core component of stretchable displays, high-performance stretchable light-emitting diodes (LEDs) have recently emerged. The approaches to fabricate stretchable LEDs are broadly categorized into two groups, namely “structural” and “material-based” approaches, based on the mechanisms to tolerate strain. While structural approaches rely on specially designed geometries to dissipate applied strain, material-based approaches mainly focus on replacing conventional rigid components of LEDs to soft and stretchable materials. Here, we review the latest studies on the fabrication of stretchable LEDs, which is accomplished through these distinctive strategies. First, we introduce representative device designs for efficient strain distribution, encompassing island-bridge structures, wavy buckling, and kirigami-/origami-based structures. For the material-based approaches, we discuss the latest studies for intrinsically stretchable (is-) electronic/optoelectronic materials, including the formation of conductive nanocomposite and polymeric blending with various additives. The review also provides examples of is-LEDs, focusing on their luminous performance and stretchability. We conclude this review with a brief outlook on future technologies. Full article
(This article belongs to the Special Issue Wearable Organic Electronics and Applications)
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14 pages, 9014 KiB  
Article
Micro-Ring Resonator-Based Tunable Vortex Beam Emitter
by Liaisan I. Bakirova, Grigory S. Voronkov, Vladimir S. Lyubopytov, Muhammad A. Butt, Svetlana N. Khonina, Ivan V. Stepanov, Elizaveta P. Grakhova and Ruslan V. Kutluyarov
Micromachines 2024, 15(1), 34; https://doi.org/10.3390/mi15010034 - 23 Dec 2023
Cited by 1 | Viewed by 1054
Abstract
Light beams bearing orbital angular momentum (OAM) are used in various scientific and engineering applications, such as microscopy, laser material processing, and optical tweezers. Precise topological charge control is crucial for efficiently using vortex beams in different fields, such as information encoding in [...] Read more.
Light beams bearing orbital angular momentum (OAM) are used in various scientific and engineering applications, such as microscopy, laser material processing, and optical tweezers. Precise topological charge control is crucial for efficiently using vortex beams in different fields, such as information encoding in optical communications and sensor systems. This work presents a novel method for optimizing an emitting micro-ring resonator (MRR) for emitting vortex beams with variable orders of OAM. The MRR consists of a ring waveguide with periodic structures side-coupled to a bus waveguide. The resonator is tunable due to the phase change material Sb2Se3 deposited on the ring. This material can change from amorphous to crystalline while changing its refractive index. In the amorphous phase, it is 3.285 + 0i, while in the transition to the crystalline phase, it reaches 4.050 + 0i at emission wavelength 1550 nm. We used this property to control the vortex beam topological charge. In our study, we optimized the distance between the bus waveguide and the ring waveguide, the bending angle, and the width of the bus waveguide. The optimality criterion was chosen to maximize the flux density of the radiated energy emitted by the resonator. The numerical simulation results proved our method. The proposed approach can be used to optimize optical beam emitters carrying OAM for various applications. Full article
(This article belongs to the Special Issue Photonic and Optoelectronic Devices and Systems, Second Edition)
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11 pages, 3263 KiB  
Article
Image-Based Feedback of Multi-Component Microdroplets for Ultra-Monodispersed Library Preparation
by Christy Cantwell, John S. McGrath, Clive A. Smith and Graeme Whyte
Micromachines 2024, 15(1), 27; https://doi.org/10.3390/mi15010027 - 22 Dec 2023
Viewed by 863
Abstract
Using devices with microfluidic channels can allow for precise control over liquids flowing through them. Merging flows of immiscible liquids can create emulsions with highly monodispersed microdroplets within a carrier liquid, which are ideal for miniaturised reaction vessels which can be generated with [...] Read more.
Using devices with microfluidic channels can allow for precise control over liquids flowing through them. Merging flows of immiscible liquids can create emulsions with highly monodispersed microdroplets within a carrier liquid, which are ideal for miniaturised reaction vessels which can be generated with a high throughput of tens of thousands of droplets per second. Control of the size and composition of these droplets is generally performed by controlling the pumping system pushing the liquids into the device; however, this is an indirect manipulation and inadequate if absolute precision is required in the size or composition of the droplets. In this work, we extend the previous development of image-based closed-loop feedback control over microdroplet generation to allow for the control of not only the size of droplets but also the composition by merging two aqueous flows. The feedback allows direct control over the desired parameters of volume and ratio of the two components over a wide range of ratios and outperforms current techniques in terms of monodispersity in volume and composition. This technique is ideal for situations where precise control over droplets is critical, or where a library of droplets of different concentrations but the same volume is required. Full article
(This article belongs to the Special Issue Droplet Microfluidics: Fundamentals and Its Advanced Applications)
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12 pages, 2645 KiB  
Article
An Automated Centrifugal Microfluidic Platform for Efficient Multistep Blood Sample Preparation and Clean-Up towards Small Ion-Molecule Analysis
by Yuting Hou, Rohit Mishra, Yufeng Zhao, Jens Ducrée and Jed D. Harrison
Micromachines 2023, 14(12), 2257; https://doi.org/10.3390/mi14122257 (registering DOI) - 18 Dec 2023
Viewed by 897
Abstract
Sample preparation for mass spectroscopy typically involves several liquid and solid phase clean-ups, extractions, and other unit operations, which are labour-intensive and error-prone. We demonstrate a centrifugal microfluidic platform that automates the whole blood sample’s preparation and clean-up by combining traditional liquid-phase and [...] Read more.
Sample preparation for mass spectroscopy typically involves several liquid and solid phase clean-ups, extractions, and other unit operations, which are labour-intensive and error-prone. We demonstrate a centrifugal microfluidic platform that automates the whole blood sample’s preparation and clean-up by combining traditional liquid-phase and multiple solid-phase extractions for applications in mass spectroscopy (MS)-based small molecule detection. Liquid phase extraction was performed using methanol to precipitate proteins in plasma separated from a blood sample under centrifugal force. The preloaded solid phase composed of C18 beads then removed lipids with a combination of silica particles, which further cleaned up any remaining proteins. We further integrated the application of this sample prep disc with matrix-assisted laser desorption/ionization (MALDI) MS by using glancing angle deposition films, which further cleaned up the processed sample by segregating the electrolyte background from the sample salts. Additionally, hydrophilic interaction liquid chromatography (HILIC) MS was employed for detecting targeted free amino acids. Therefore, several representative ionic metabolites, including several amino acids and organic acids from blood samples, were analysed by both MALDI-MS and HILIC-MS to demonstrate the performance of this sample preparation disc. The fully automated blood sample preparation procedure only took 35 mins, with a throughput of three parallel units. Full article
(This article belongs to the Section B:Biology and Biomedicine)
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13 pages, 3967 KiB  
Article
Chameleon-Inspired Colorimetric Sensors for Real-Time Detections with Humidity
by Yu-Hsuan Cheng, Ching-Te Kuo and Bo-Yao Lian
Micromachines 2023, 14(12), 2254; https://doi.org/10.3390/mi14122254 - 18 Dec 2023
Viewed by 969
Abstract
In recent decades, vapor sensors have gained substantial attention for their crucial roles in environmental monitoring and pharmaceutical applications. Herein, we introduce a chameleon-inspired colorimetric (CIC) sensor, detailing its design, fabrication, and versatile applications. The sensor seamlessly combines a PEDOT:PSS vapor sensor with [...] Read more.
In recent decades, vapor sensors have gained substantial attention for their crucial roles in environmental monitoring and pharmaceutical applications. Herein, we introduce a chameleon-inspired colorimetric (CIC) sensor, detailing its design, fabrication, and versatile applications. The sensor seamlessly combines a PEDOT:PSS vapor sensor with a colorimetric display, using thermochromic liquid crystal (TLC). We further explore the electrical characteristics of the CIC sensor when doped with ethylene glycol (EG) and polyvinyl alcohol (PVA). Comparative analyses of resistance change rates for different weight ratios of EG and PVA provide insights into fine-tuning the sensor’s responsiveness to varying humidity levels. The CIC sensor’s proficiency in measuring ambient humidity is investigated under a voltage input as small as 2.6 V, capturing resistance change rates and colorimetric shifts at relative humidity (RH) levels ranging from 20% to 90%. Notably, the sensor exhibits distinct resistance sensitivities of 9.7 mΩ (0.02% ∆R/R0)/%RH, 0.5 Ω (0.86% ∆R/R0)/%RH, and 5.7 Ω (9.68% ∆R/R0)/%RH at RH 20% to 30%, RH 30% to 80%, and RH 80% to 90%, respectively. Additionally, a linear temperature change is observed with a sensitivity of −0.04 °C/%RH. The sensor also demonstrates a colorimetric temperature sensitivity of −82,036 K/%RH at RH 20% to 30% and −514 K/%RH at RH 30% to 90%, per captured image. Furthermore, real-time measurements of ethanol vapor with varying concentrations showcase the sensor’s applicability in gas sensing applications. Overall, we present a comprehensive exploration of the CIC sensor, emphasizing its design flexibility, electrical characteristics, and diverse sensing capabilities. The sensor’s potential applications extend to real-time environmental monitoring, highlighting its promising role in various gas sensing fields. Full article
(This article belongs to the Special Issue Bioinspired Materials and Microdevices: Fabrications and Applications)
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41 pages, 8330 KiB  
Review
Review on Bubble Dynamics in Proton Exchange Membrane Water Electrolysis: Towards Optimal Green Hydrogen Yield
by Bongliba T. Sangtam and Hanwook Park
Micromachines 2023, 14(12), 2234; https://doi.org/10.3390/mi14122234 - 12 Dec 2023
Viewed by 3472
Abstract
Water electrolysis using a proton exchange membrane (PEM) holds substantial promise to produce green hydrogen with zero carbon discharge. Although various techniques are available to produce hydrogen gas, the water electrolysis process tends to be more cost-effective with greater advantages for energy storage [...] Read more.
Water electrolysis using a proton exchange membrane (PEM) holds substantial promise to produce green hydrogen with zero carbon discharge. Although various techniques are available to produce hydrogen gas, the water electrolysis process tends to be more cost-effective with greater advantages for energy storage devices. However, one of the challenges associated with PEM water electrolysis is the accumulation of gas bubbles, which can impair cell performance and result in lower hydrogen output. Achieving an in-depth knowledge of bubble dynamics during electrolysis is essential for optimal cell performance. This review paper discusses bubble behaviors, measuring techniques, and other aspects of bubble dynamics in PEM water electrolysis. It also examines bubble behavior under different operating conditions, as well as the system geometry. The current review paper will further improve the understanding of bubble dynamics in PEM water electrolysis, facilitating more competent, inexpensive, and feasible green hydrogen production. Full article
(This article belongs to the Special Issue Micro Thermal Devices and Their Applications)
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12 pages, 4442 KiB  
Article
Polarization Z-Scan Studies Revealing Plasmon Coupling Enhancement Due to Dimer Formation of Gold Nanoparticles in Nematic Liquid Crystals
by Shengwei Wang, Edward J. Lipchus, Mohamed Amine Gharbi and Chandra S. Yelleswarapu
Micromachines 2023, 14(12), 2206; https://doi.org/10.3390/mi14122206 - 05 Dec 2023
Viewed by 918
Abstract
We investigate the plasmon coupling of gold nanoparticle (AuNP) dimers dispersed in a nematic liquid crystal matrix using the polarization z-scan technique. Our experimental setup includes the precise control of incident light polarization through polarization angles of 0°, 45°, and 90°. Two distinct [...] Read more.
We investigate the plasmon coupling of gold nanoparticle (AuNP) dimers dispersed in a nematic liquid crystal matrix using the polarization z-scan technique. Our experimental setup includes the precise control of incident light polarization through polarization angles of 0°, 45°, and 90°. Two distinct cell orientations are examined: parallel and twisted nematic cells. In parallel-oriented cells, where liquid crystal molecules and AuNPs align with the rubbing direction, we observe a remarkable 2–3-fold increase in the nonlinear absorption coefficient when the polarization of the incident light is parallel to the rubbing direction. Additionally, a linear decrease in the third-order nonlinear absorption coefficient is noted as the polarization angle varies from 0° to 90°. In the case of twisted nematic cells, the NPs do not have any preferred orientation, and the enhancement remains consistent across all polarization angles. These findings conclusively establish that the observed enhancement in the nonlinear absorption coefficient is a direct consequence of plasmon coupling, shedding light on the intricate interplay between plasmonic nanostructures and liquid crystal matrices. Full article
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19 pages, 6413 KiB  
Article
Design and Fabrication of a 3D-Printed Microfluidic Immunoarray for Ultrasensitive Multiplexed Protein Detection
by Keshani Hiniduma, Ketki S. Bhalerao, Peyahandi I. Thilini De Silva, Tianqi Chen and James F. Rusling
Micromachines 2023, 14(12), 2187; https://doi.org/10.3390/mi14122187 - 30 Nov 2023
Viewed by 1251
Abstract
Microfluidic technology has revolutionized device fabrication by merging principles of fluid dynamics with technologies from chemistry, physics, biology, material science, and microelectronics. Microfluidic systems manipulate small volumes of fluids to perform automated tasks with applications ranging from chemical syntheses to biomedical diagnostics. The [...] Read more.
Microfluidic technology has revolutionized device fabrication by merging principles of fluid dynamics with technologies from chemistry, physics, biology, material science, and microelectronics. Microfluidic systems manipulate small volumes of fluids to perform automated tasks with applications ranging from chemical syntheses to biomedical diagnostics. The advent of low-cost 3D printers has revolutionized the development of microfluidic systems. For measuring molecules, 3D printing offers cost-effective, time, and ease-of-designing benefits. In this paper, we present a comprehensive tutorial for design, optimization, and validation for creating a 3D-printed microfluidic immunoarray for ultrasensitive detection of multiple protein biomarkers. The target is the development of a point of care array to determine five protein biomarkers for aggressive cancers. The design phase involves defining dimensions of microchannels, reagent chambers, detection wells, and optimizing parameters and detection methods. In this study, the physical design of the array underwent multiple iterations to optimize key features, such as developing open detection wells for uniform signal distribution and a flap for covering wells during the assay. Then, full signal optimization for sensitivity and limit of detection (LOD) was performed, and calibration plots were generated to assess linear dynamic ranges and LODs. Varying characteristics among biomarkers highlighted the need for tailored assay conditions. Spike-recovery studies confirmed the assay’s accuracy. Overall, this paper showcases the methodology, rigor, and innovation involved in designing a 3D-printed microfluidic immunoarray. Optimized parameters, calibration equations, and sensitivity and accuracy data contribute valuable metrics for future applications in biomarker analyses. Full article
(This article belongs to the Special Issue Feature Papers of Micromachines in Biology and Biomedicine 2023)
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22 pages, 7435 KiB  
Review
Fabrication and Applications of Magnetic Polymer Composites for Soft Robotics
by Sayan Ganguly and Shlomo Margel
Micromachines 2023, 14(12), 2173; https://doi.org/10.3390/mi14122173 - 29 Nov 2023
Cited by 1 | Viewed by 1364
Abstract
The emergence of magnetic polymer composites has had a transformative impact on the field of soft robotics. This overview will examine the various methods by which innovative materials can be synthesized and utilized. The advancement of soft robotic systems has been significantly enhanced [...] Read more.
The emergence of magnetic polymer composites has had a transformative impact on the field of soft robotics. This overview will examine the various methods by which innovative materials can be synthesized and utilized. The advancement of soft robotic systems has been significantly enhanced by the utilization of magnetic polymer composites, which amalgamate the pliability of polymers with the reactivity of magnetic materials. This study extensively examines the production methodologies involved in dispersing magnetic particles within polymer matrices and controlling their spatial distribution. The objective is to gain insights into the strategies required to attain the desired mechanical and magnetic properties. Additionally, this study delves into the potential applications of these composites in the field of soft robotics, encompassing various devices such as soft actuators, grippers, and wearable gadgets. The study emphasizes the transformative capabilities of magnetic polymer composites, which offer a novel framework for the advancement of biocompatible, versatile soft robotic systems that utilize magnetic actuation. Full article
(This article belongs to the Special Issue Advances in Nano and Hydrogel Platforms for Biomedical Applications)
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13 pages, 6406 KiB  
Article
Acoustic Bubble and Magnetic Actuation-Based Microrobot for Enhanced Multiphase Drug Delivery Efficiency
by Jihyeok Park, Youngkwang Kim, Jinwon Jeong, Deasung Jang, Daegeun Kim and Sangkug Chung
Micromachines 2023, 14(12), 2169; https://doi.org/10.3390/mi14122169 - 29 Nov 2023
Viewed by 1130
Abstract
This paper proposes an acoustic bubble and magnetic actuation-based microrobot for enhancing multiphase drug delivery efficiency. The proposed device can encapsulate multiphase drugs, including liquids, using the two bubbles embedded within the microtube. Additionally, using the magnetic actuation of the loaded magnetic liquid [...] Read more.
This paper proposes an acoustic bubble and magnetic actuation-based microrobot for enhancing multiphase drug delivery efficiency. The proposed device can encapsulate multiphase drugs, including liquids, using the two bubbles embedded within the microtube. Additionally, using the magnetic actuation of the loaded magnetic liquid metal, it can deliver drugs to target cells. This study visualized the flow patterns generated by the oscillating bubble within the tube to validate the drug release principle. In addition, to investigate the effect of the oscillation properties of the inner bubble on drug release, the oscillation amplitude of the inner bubble was measured under various experimental variables using a high-speed camera. Subsequently, we designed a microrobot capable of encapsulating bubbles, drugs, and magnetic liquid metal and fabricated it using microfabrication technology based on ultra-precision 3D printing. As a proof of concept, we demonstrated the transport and drug release of the microrobot encapsulating the drug in a Y-shaped channel simulating a blood vessel. The proposed device is anticipated to enhance the efficiency of drug therapy by minimizing drug side effects, reducing drug administration frequency, and improving the stability of the drug within the body. This paper is expected to be applicable not only to targeted drug delivery but also to various biomedical fields, such as minimally invasive surgery and cell manipulation, by effectively delivering multiphase drugs using the simple structure of a microrobot. Full article
(This article belongs to the Special Issue Acoustical Tweezers: From Fundamental Research to Applications)
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13 pages, 19497 KiB  
Article
Charge Characteristics of Dielectric Particle Swarm Involving Comprehensive Electrostatic Information
by Yue Feng, Xingfeng Shen, Ruiguo Wang, Zilong Zhou, Zhaoxu Yang, Yanhui Han and Ying Xiong
Micromachines 2023, 14(12), 2151; https://doi.org/10.3390/mi14122151 - 24 Nov 2023
Viewed by 797
Abstract
The triboelectrification effect caused by dynamic contact between particles is an issue for explosions caused by electrostatic discharging (ESD) in the triboelectric nanogenerators (TENGs) for powering the flexible and wearable sensors. The electrostatic strength of dielectric particles (surface charge density, surface potential, electric [...] Read more.
The triboelectrification effect caused by dynamic contact between particles is an issue for explosions caused by electrostatic discharging (ESD) in the triboelectric nanogenerators (TENGs) for powering the flexible and wearable sensors. The electrostatic strength of dielectric particles (surface charge density, surface potential, electric field, etc.) is essential to evaluate the level of ESD risk. Those differential electrostatic characteristics concerned with unhomogenized swarmed particles cannot be offered via in-current employed-joint COMSOL 6.1 simulation, in which the discrete charged dielectric particles are mistakenly regarded as continuous ones. In this paper, the hybrid discrete element method (EDEM tool) associated with programming in COMSOL Multiphysics 6.1 with MATLAB R2023a was employed to obtain the electrostatic information of the triboelectric dielectric particle swarm. We revealed that the high-accuracy strengths of electric potential and electric field inside particle warm are crucial to evaluating ESD risk. The calculated electrostatic characteristics differ from the grid method and continuous method in the surface potential and electric field. This EDEM-based simulation method is significant for microcosmic understanding and the assessment of the ESD risk in TENGs. Full article
(This article belongs to the Special Issue Flexible and Wearable Sensors, 2nd Edition)
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23 pages, 26808 KiB  
Review
Leveraging Ferroelectret Nanogenerators for Acoustic Applications
by Ziling Song, Xianfa Cai, Yiqin Wang, Wenyu Yang and Wei Li
Micromachines 2023, 14(12), 2145; https://doi.org/10.3390/mi14122145 - 23 Nov 2023
Viewed by 1469
Abstract
Ferroelectret nanogenerator (FENG), renowned for its remarkable electromechanical conversion efficiency and low Young’s modulus, has gained significant attention in various acoustic applications. The increasing interest is attributed to the crucial role acoustic devices play in our daily lives. This paper provides a comprehensive [...] Read more.
Ferroelectret nanogenerator (FENG), renowned for its remarkable electromechanical conversion efficiency and low Young’s modulus, has gained significant attention in various acoustic applications. The increasing interest is attributed to the crucial role acoustic devices play in our daily lives. This paper provides a comprehensive review of the advancements made in using FENG for acoustic applications. It elaborates on the operational mechanism of FENG in acoustics, with a special focus on comparing the influence of different fabrication materials and techniques on its properties. This review categorizes acoustic applications of FENG into three primary areas: acoustic sensing, acoustic actuation, and acoustic energy harvesting. The detailed descriptions of FENG’s implementations in these areas are provided, and potential directions and challenges for further development are outlined. By demonstrating the wide range of potential applications for FENG, it is shown that FENG can be adapted to meet different individual needs. Full article
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13 pages, 3741 KiB  
Article
Untreated vs. Treated Carbon Felt Anodes: Impacts on Power Generation in Microbial Fuel Cells
by Abdelghani Ghanam, Sebastien Cecillon, Andrei Sabac, Hasna Mohammadi, Aziz Amine, François Buret and Naoufel Haddour
Micromachines 2023, 14(12), 2142; https://doi.org/10.3390/mi14122142 - 23 Nov 2023
Viewed by 1614
Abstract
This research sought to enhance the efficiency and biocompatibility of anodes in bioelectrochemical systems (BESs) such as microbial fuel cells (MFCs), with an aim toward large-scale, real-world applications. The study focused on the effects of acid-heat treatment and chemical modification of three-dimensional porous [...] Read more.
This research sought to enhance the efficiency and biocompatibility of anodes in bioelectrochemical systems (BESs) such as microbial fuel cells (MFCs), with an aim toward large-scale, real-world applications. The study focused on the effects of acid-heat treatment and chemical modification of three-dimensional porous pristine carbon felt (CF) on power generation. Different treatments were applied to the pristine CF, including coating with carbon nanofibers (CNFs) dispersed using dodecylbenzene sulfonate (SDBS) surfactant and biopolymer chitosan (CS). These processes were expected to improve the hydrophilicity, reduce the internal resistance, and increase the electrochemically active surface area of CF anodes. A high-resolution scanning electron microscopy (HR-SEM) analysis confirmed successful CNF coating. An electrochemical analysis showed improved conductivity and charge transfer toward [Fe(CN)6]3−/4− redox probe with treated anodes. When used in an air cathode single-chamber MFC system, the untreated CF facilitated quicker electroactive biofilm growth and reached a maximum power output density of 3.4 W m−2, with an open-circuit potential of 550 mV. Despite a reduction in charge transfer resistance (Rct) with the treated CF anodes, the power densities remained unchanged. These results suggest that untreated CF anodes could be most promising for enhancing power output in BESs, offering a cost-effective solution for large-scale MFC applications. Full article
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10 pages, 3656 KiB  
Article
Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics
by Lu Wang, Zejing Guo, Qing Lan, Wenqing Song, Zhipeng Zhong, Kunlin Yang, Tuoyu Zhao, Hai Huang, Cheng Zhang and Wu Shi
Micromachines 2023, 14(11), 2125; https://doi.org/10.3390/mi14112125 - 19 Nov 2023
Cited by 1 | Viewed by 1263
Abstract
Two-dimensional (2D) materials, characterized by their atomically thin nature and exceptional properties, hold significant promise for future nano-electronic applications. The precise control of carrier density in these 2D materials is essential for enhancing performance and enabling complex device functionalities. In this study, we [...] Read more.
Two-dimensional (2D) materials, characterized by their atomically thin nature and exceptional properties, hold significant promise for future nano-electronic applications. The precise control of carrier density in these 2D materials is essential for enhancing performance and enabling complex device functionalities. In this study, we present an electron-beam (e-beam) doping approach to achieve controllable carrier doping effects in graphene and MoS2 field-effect transistors (FETs) by leveraging charge-trapping oxide dielectrics. By adding an atomic layer deposition (ALD)-grown Al2O3 dielectric layer on top of the SiO2/Si substrate, we demonstrate that controllable and reversible carrier doping effects can be effectively induced in graphene and MoS2 FETs through e-beam doping. This new device configuration establishes an oxide interface that enhances charge-trapping capabilities, enabling the effective induction of electron and hole doping beyond the SiO2 breakdown limit using high-energy e-beam irradiation. Importantly, these high doping effects exhibit non-volatility and robust stability in both vacuum and air environments for graphene FET devices. This methodology enhances carrier modulation capabilities in 2D materials and holds great potential for advancing the development of scalable 2D nano-devices. Full article
(This article belongs to the Special Issue 2D Materials: Devices and Functionalities)
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16 pages, 2599 KiB  
Article
Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers
by Roberto Bernasconi, Gabriele Pietro Invernizzi, Elisa Gallo Stampino, Riccardo Gotti, Davide Gatti and Luca Magagnin
Micromachines 2023, 14(11), 2082; https://doi.org/10.3390/mi14112082 - 10 Nov 2023
Cited by 1 | Viewed by 1029
Abstract
In the last few years, the manufacturing of microelectromechanical systems (MEMS) by means of innovative tridimensional and bidimensional printing technologies has significantly catalyzed the attention of researchers. Inkjet material deposition, in particular, can become a key enabling technology for the production of polymer-based [...] Read more.
In the last few years, the manufacturing of microelectromechanical systems (MEMS) by means of innovative tridimensional and bidimensional printing technologies has significantly catalyzed the attention of researchers. Inkjet material deposition, in particular, can become a key enabling technology for the production of polymer-based inertial sensors characterized by low cost, high manufacturing scalability and superior sensitivity. In this paper, a fully inkjet-printed polymeric accelerometer is proposed, and its manufacturing steps are described. The manufacturing challenges connected with the inkjet deposition of SU-8 as a structural material are identified and addressed, resulting in the production of a functional spring-mass sensor. A step-crosslinking process allows optimization of the final shape of the device and limits defects typical of inkjet printing. The resulting device is characterized from a morphological point of view, and its functionality is assessed in performing optical readout. The acceleration range of the optimized device is 0–0.7 g, its resolution is 2 × 10−3 g and its sensitivity is 6745 nm/g. In general, the work demonstrates the feasibility of polymeric accelerometer production via inkjet printing, and these characteristic parameters demonstrate their potential applicability in a broad range of uses requiring highly accurate acceleration measurements over small displacements. Full article
(This article belongs to the Special Issue MEMS in Italy 2023)
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19 pages, 7528 KiB  
Review
Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors
by Seokwon Joo, Jung Yeon Han, Soonmin Seo and Ju-Hyung Kim
Micromachines 2023, 14(11), 2034; https://doi.org/10.3390/mi14112034 - 31 Oct 2023
Viewed by 1329
Abstract
Rapid technological advancements have led to increased demands for sensors. Hence, high performance suitable for next-generation technology is required. As sensing technology has numerous applications, various materials and patterning methods are used for sensor fabrication. This affects the characteristics and performance of sensors, [...] Read more.
Rapid technological advancements have led to increased demands for sensors. Hence, high performance suitable for next-generation technology is required. As sensing technology has numerous applications, various materials and patterning methods are used for sensor fabrication. This affects the characteristics and performance of sensors, and research centered specifically on these patterns is necessary for high integration and high performance of these devices. In this paper, we review the patterning techniques used in recently reported sensors, specifically the most widely used capacitive sensors, and their impact on sensor performance. Moreover, we introduce a method for increasing sensor performance through three-dimensional (3D) structures. Full article
(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)
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