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Micromachines2022, 13(10), 1713;https://doi.org/10.3390/mi13101713

Journal: MicromachinesVolume: 13Number: 1713

Article: Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor

Authors:
Guizhen Du^1,2,
Xianshan Dong^2,* and
Peng Zhang^1,*
et al.

Link: https://www.mdpi.com/2072-666X/13/10/1713

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