Effect of Annealing Time on the Cyclic Characteristics of Ceramic Oxide Thin Film Thermocouples
Abstract
:1. Introduction
2. Materials and Methods
2.1. Fabrication of ITO/In2O3 Thin Film Thermocouple
2.2. Measurements
3. Results
Microstructures of ITO and In2O3 Films
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
- Gregory, O.J.; You, T. Ceramic Temperature Sensors for Harsh Environments. IEEE Sens. J. 2005, 5, 833–838. [Google Scholar] [CrossRef]
- Chen, Y.; Jiang, H.; Zhao, W.; Zhang, W.; Liu, X.; Jiang, S. Fabrication and Calibration of Pt–10%Rh/Pt Thin Film Thermocouples. Measurement 2014, 48, 248–251. [Google Scholar] [CrossRef]
- Cougnon, F.G.; Depla, D. The Seebeck Coefficient of Sputter Deposited Metallic Thin Films: The Role of Process Conditions. Coatings 2019, 9, 299. [Google Scholar] [CrossRef] [Green Version]
- Jin, X.H.; Ma, B.H.; Qiu, T.; Deng, J.J. ITO Thin Film Thermocouple for Transient High Temperature Measurement in Scramjet Combustor. In Proceedings of the 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kaohsiung, Taiwan, 18–22 June 2017; pp. 1148–1151. [Google Scholar]
- Shi, P.; Wang, W.C.; Liu, D.; Zhang, J.; Ren, W.; Tian, B.; Zhang, J.Z. Structural and Electrical Properties of Flexible ITO/In2O3 Thermocouples on Pi Substrates under Tensile Stretching. ACS Appl. Electron. Mater. 2019, 1, 1105–1111. [Google Scholar] [CrossRef]
- Wrbanek, J.; Fralick, G.; Farmer, S.; Sayir, A.; Blaha, C.; Gonzalez, J. Development of Thin Film Ceramic Thermocouples for High Temperature Environments. In Proceedings of the 40th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit, Fort Lauderdale, FL, USA, 11–14 July 2004. [Google Scholar]
- Jin, X.H.; Ma, B.H.; Zhao, K.L.; Zhang, Z.X.; Deng, J.J.; Luo, J.; Yuan, W.Z. Effect of Annealing on the Thermoelectricity of Indium Tin Oxide Thin Film Thermocouples. Ceram. Int. 2020, 46, 4602–4609. [Google Scholar] [CrossRef]
- Tougas, I.M.; Amani, M.; Gregory, O.J. Metallic and Ceramic Thin Film Thermocouples for Gas Turbine Engines. Sensors 2013, 13, 15324–15347. [Google Scholar] [CrossRef]
- Meredith, R.D.; Wrbanek, J.D.; Fralick, G.C.; Greer, L.C.; Hunter, G.W.; Chen, L. Design and Operation of a Fast, Thin-Film Thermocouple Probe on a Turbine Engine. In Proceedings of the 50th AIAA/ASME/SAE/ASEE Joint Propulsion Conference 2014, Cleveland, OH, USA, 28–30 July 2014. [Google Scholar]
- Kreider, K.G. Sputtered High Temperature Thin Film Thermocouples. J. Vac. Sci. Technol. A Vac. Surf. Films 1993, 11, 1401–1405. [Google Scholar] [CrossRef]
- Tougas, I.M.; Gregory, O.J. Thin Film Platinum–Palladium Thermocouples for Gas Turbine Engine Applications. Thin Solid Films 2013, 539, 345–349. [Google Scholar] [CrossRef]
- Gregory, O.J.; Busch, E.; Fralick, G.C.; Chen, X. Preparation and Characterization of Ceramic Thin Film Thermocouples. Thin Solid Films 2010, 518, 6093–6098. [Google Scholar] [CrossRef]
- Wrbanek, J.D.; Fralick, G.C.; Zhu, D. Ceramic Thin Film Thermocouples for Sic-Based Ceramic Matrix Composites. Thin Solid Films 2012, 520, 5801–5806. [Google Scholar] [CrossRef]
- Gregory, O.J.; Amani, M.; Tougas, I.M.; Drehman, A.J. Stability and Microstructure of Indium Tin Oxynitride Thin Films. J. Am. Ceram. Soc. 2011, 95, 705–710. [Google Scholar] [CrossRef]
- Zhang, J.Z.; Wang, W.C.; Liu, D.; Zhang, Y.; Shi, P. Structural and Electric Response of ITO/In2O3 Transparent Thin Film Thermocouples Derived from Rf Sputtering at Room Temperature. J. Mater. Sci. Mater. Electron. 2018, 29, 20253–20259. [Google Scholar] [CrossRef]
- Chen, X.; Gregory, O.J.; Amani, M. Thin-Film Thermocouples Based on the System In2O3-SnO2. J. Am. Ceram. Soc. 2011, 94, 854–860. [Google Scholar] [CrossRef]
- Tan, Q.L.; Lv, W.; Ji, Y.H.; Song, R.J.; Lu, F.; Dong, H.L.; Zhang, W.D.; Xiong, J.J. A Lc Wireless Passive Temperature-Pressure-Humidity (Tph) Sensor Integrated on Ltcc Ceramic for Harsh Monitoring. Sens. Actuators B-Chem. 2018, 270, 433–442. [Google Scholar] [CrossRef]
- Zhang, T.; Tan, Q.L.; Lyu, W.; Lu, X.; Xiong, J.J. Design and Fabrication of a Thick Film Heat Flux Sensor for Ultra-High Temperature Environment. IEEE Access 2019, 7, 180771–180778. [Google Scholar] [CrossRef]
- Liu, D.; Shi, P.; Ren, W.; Liu, Y.T.; Niu, G.; Liu, M.; Zhang, N.; Tian, B.; Jing, W.X.; Jiang, Z.D.; et al. A New Kind of Thermocouple Made of P-Type and N-Type Semi-Conductive Oxides with Giant Thermoelectric Voltage for High Temperature Sensing. J. Mater. Chem. C 2018, 6, 3206–3211. [Google Scholar] [CrossRef]
- Hsu, C.H.; Geng, X.P.; Wu, W.Y.; Zhao, M.J.; Zhang, X.Y.; Huang, P.H.; Lien, S.Y. Air Annealing Effect on Oxygen Vacancy Defects in Al-Doped Zno Films Grown by High-Speed Atmospheric Atomic Layer Deposition. Molecules 2020, 25, 5043. [Google Scholar] [CrossRef]
- Xu, H.Y.; Huang, Y.H.; Liu, S.; Xu, K.W.; Ma, F.; Chu, P.K. Effects of Annealing Ambient on Oxygen Vacancies and Phase Transition Temperature of VO2 Thin Films. RSC Adv. 2016, 6, 79383–79388. [Google Scholar] [CrossRef]
- Liu, Y.; Ren, W.; Shi, P.; Liu, D.; Zhang, Y.; Liu, M.; Ye, Z.G.; Jing, W.; Tian, B.; Jiang, Z. A Highly Thermostable In2O3/ITO Thin Film Thermocouple Prepared Via Screen Printing for High Temperature Measurements. Sensors 2018, 18, 958. [Google Scholar] [CrossRef] [Green Version]
- Thilakan, P.; Kumar, J. Studies on the Preferred Orientation Changes and Its Influenced Properties on ITO Thin Films. Vacuum 1997, 48, 463–466. [Google Scholar] [CrossRef]
- Ishigaki, N.; Kuwata, N.; Dorai, A.; Nakamura, T.; Amezawa, K.; Kawamura, J. Effect of Post-Deposition Annealing in Oxygen Atmosphere on Licomno4 Thin Films for 5 V Lithium Batteries. Thin Solid Films 2019, 686, 137433. [Google Scholar] [CrossRef]
- Zhao, X.; Yang, K.; Wang, Y.; Chen, Y.; Jiang, H. Stability and Thermoelectric Properties of ITON:Pt Thin Film Thermocouples. J. Mater. Sci. Mater. Electron. 2015, 27, 1725–1729. [Google Scholar] [CrossRef]
- Zhang, Y.; Cheng, P.; Yu, K.Q.; Zhao, X.L.; Ding, G.F. ITO Film Prepared by Ion Beam Sputtering and Its Application in High-Temperature Thermocouple. Vacuum 2017, 146, 31–34. [Google Scholar] [CrossRef]
- Debataraja, A.; Zulhendri, D.W.; Yuliarto, B.; Sunendar, B. Investigation of Nanostructured Sno 2 Synthesized with Polyol Technique for Co Gas Sensor Applications. Procedia Eng. 2017, 170, 60–64. [Google Scholar] [CrossRef]
- Hemasiri, B.W.N.H.; Kim, J.K.; Lee, J.M. Synthesis and Characterization of Graphene/ITO Nanoparticle Hybrid Transparent Conducting Electrode. Nano-Micro Lett. 2017, 10, 18. [Google Scholar] [CrossRef] [Green Version]
- Yadav, B.C.; Agrahari, K.; Singh, S.; Yadav, T.P. Fabrication and Characterization of Nanostructured Indium Tin Oxide Film and Its Application as Humidity and Gas Sensors. J. Mater. Sci. Mater. Electron. 2016, 27, 4172–4179. [Google Scholar] [CrossRef]
- Wu, H.; Gan, Z.; Chu, X.; Liang, S.; He, L. Preparation and Gas-Sensing Properties of One-Dimensional Ga2O3/SnO2 Nanofibers. Chin. J. Inorg. Chem. 2020, 36, 309–316. [Google Scholar]
Annealing Time (h) | 0 | 1 | 2 | 3 | 5 | |
---|---|---|---|---|---|---|
Conductivity (S/m) | ITO | 2.41 × 103 | 2.9 × 103 | 3.25 × 103 | 3.48 × 103 | 3.82 × 103 |
In2O3 | 12.2 | 15.5 | 17.3 | 23.9 | 52.9 |
Annealing Time (h) | V(ΔT) = A(ΔT)3 + B(ΔT)2 + C(ΔT) + D | Correlation Coefficient (R2) | Average Seebeck Coefficient (µV/°C) | |||
---|---|---|---|---|---|---|
A (mV/°C3) | B (mV/°C2) | C (mV/°C) | D (mV) | |||
0 | 7.52 × 10−8 | −1.54 × 10−5 | 0.36 | −13.04 | 0.99914 | 256.65 |
1 | 1.70 × 10−8 | −3.22 × 10−5 | 0.18 | −13.04 | 0.99981 | 155.29 |
2 | −7.27 × 10−8 | 7.17 × 10−5 | 0.21 | −8.89 | 0.99979 | 209.45 |
3 | 4.21 × 10−8 | −7.14 × 10−5 | 0.16 | −11.73 | 0.99979 | 123.75 |
5 | −5.75 × 10−8 | 5.80 × 10−5 | 0.15 | −14.27 | 0.99993 | 148.62 |
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Han, Y.; Ruan, Y.; Xue, M.; Wu, Y.; Shi, M.; Song, Z.; Zhou, Y.; Teng, J. Effect of Annealing Time on the Cyclic Characteristics of Ceramic Oxide Thin Film Thermocouples. Micromachines 2022, 13, 1970. https://doi.org/10.3390/mi13111970
Han Y, Ruan Y, Xue M, Wu Y, Shi M, Song Z, Zhou Y, Teng J. Effect of Annealing Time on the Cyclic Characteristics of Ceramic Oxide Thin Film Thermocouples. Micromachines. 2022; 13(11):1970. https://doi.org/10.3390/mi13111970
Chicago/Turabian StyleHan, Yuning, Yong Ruan, Meixia Xue, Yu Wu, Meng Shi, Zhiqiang Song, Yuankai Zhou, and Jiao Teng. 2022. "Effect of Annealing Time on the Cyclic Characteristics of Ceramic Oxide Thin Film Thermocouples" Micromachines 13, no. 11: 1970. https://doi.org/10.3390/mi13111970