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Journal: MicromachinesVolume: 13Number: 378
Article: High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)
- Authors:
- Rongbo Wu1,2,
- Lang Gao1,2 and
- Ya Cheng1,2,3,4,5,6,*
- et al.
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