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Journal: Micromachines, 2022
Volume: 13
Number: 945
Article:
Overview of the MEMS Pirani Sensors
Authors:
by
Shaohang Xu, Na Zhou, Meng Shi, Chenchen Zhang, Dapeng Chen and Haiyang Mao
Link:
https://www.mdpi.com/2072-666X/13/6/945
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