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Article
Peer-Review Record

All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror

Micromachines 2022, 13(9), 1444; https://doi.org/10.3390/mi13091444
by Eunmo Kang, Heejoo Choi, Brandon Hellman, Joshua Rodriguez, Braden Smith, Xianyue Deng, Parker Liu, Ted Liang-Tai Lee, Eric Evans, Yifan Hong, Jiafan Guan, Chuan Luo and Yuzuru Takashima *
Reviewer 1: Anonymous
Reviewer 2: Anonymous
Micromachines 2022, 13(9), 1444; https://doi.org/10.3390/mi13091444
Submission received: 14 August 2022 / Revised: 26 August 2022 / Accepted: 29 August 2022 / Published: 1 September 2022
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)

Round 1

Reviewer 1 Report

This manuscript demonstrates a MEMS lidar system which employs two kinds of MEMS devices: a DMD and 2-dimensional MEMS mirror for transmitter, and a DMD with light-pipe-based optics for receiver. The optical structure of this hybrid MEMS lidar was present, followed by which are the detailed experimental results. The MEMS lidar system in this paper has good scalability, which is an interesting topic in future direction. Only some small issues need to be addressed accordingly before publication.

1. Please correct some writing mistakes, e.g. Figure 8. “Angular” instead of “angular” in line 250.

2. Please provide the full names of some abbreviations when they appear first in the text. e.g. SPAD and MPPC in line 403.

Author Response

Please see the attachment

Author Response File: Author Response.docx

Reviewer 2 Report

This paper demonstrates a lidar system employing two kind of MEMS system, 2-dimensionaol MEMS mirror and DMD. The paper could be published after minor revised.

1)   Some expressions in the abstract are not appropriate, for example “……area of 140mm2. In the receiver, a 2nd Digital Micromirror”.

2)   Figure 3 and 13 are not very clear and strict.

3)   The lidar in this paper is not all-solid-state lidar.

Author Response

Please see the attachment.

Author Response File: Author Response.docx

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