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Journal: Micromachines, 2023
Volume: 14
Number: 169
Article:
Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application
Authors:
by
Wei-Hsi Lai, Binghui Li, Shih-Huai Fu and Yu-Sheng Lin
Link:
https://www.mdpi.com/2072-666X/14/1/169
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