Investigation of Erase Cycling Induced Joint Dummy Cell Disturbance in Dual-Deck 3D NAND Flash Memory
Abstract
:1. Introduction
2. Materials and Methods
3. Experiments and Simulations
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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Parameter | Value |
---|---|
SiO2 relative dielectric constant | 3.9 |
SiO2 electron affinity | 0.9 eV |
SiO2 band gap | 8.9 eV |
SiO2 electron effective mass | 0.39 mo |
SiO2 electron effective mass | 0.47 mo |
Si3N4 relative dielectric constant | 7.5 |
Si3N4 electron affinity | 1.9 eV |
Si3N4 band gap | 5 eV |
Si3N4 electron trap energy (from mid band gap) | 1.2 eV |
Si3N4 electron cross section | 1 × 10−20 cm2 |
Si3N4 electron trap density | 3 × 1019 cm−3 |
Si3N4 electron trap volume | 1 × 10−10 um−3 |
Si3N4 relative dielectric constant | 1 × 10−10 um−3 |
Si3N4 hole trap energy (from mid band gap) | −1.35 eV |
Si3N4 hole cross section | 1 × 10−17 cm2 |
Si3N4 electron trap density | 1.35 × 1017 cm−3 |
Si3N4 electron trap volume | 1 × 10−10 um−3 |
Poly-Si/SiO2 interface donor/accepter trap density (peak at valance band) | 5 × 1013 cm2 |
Poly-Si/SiO2 interface donor/accepter trap Gaussian distribution sigma | 0.05 eV |
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You, K.; Jin, L.; Jia, J.; Huo, Z. Investigation of Erase Cycling Induced Joint Dummy Cell Disturbance in Dual-Deck 3D NAND Flash Memory. Micromachines 2023, 14, 1916. https://doi.org/10.3390/mi14101916
You K, Jin L, Jia J, Huo Z. Investigation of Erase Cycling Induced Joint Dummy Cell Disturbance in Dual-Deck 3D NAND Flash Memory. Micromachines. 2023; 14(10):1916. https://doi.org/10.3390/mi14101916
Chicago/Turabian StyleYou, Kaikai, Lei Jin, Jianquan Jia, and Zongliang Huo. 2023. "Investigation of Erase Cycling Induced Joint Dummy Cell Disturbance in Dual-Deck 3D NAND Flash Memory" Micromachines 14, no. 10: 1916. https://doi.org/10.3390/mi14101916