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Volume 14
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10.3390/mi14101960
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Article

High-Power Femtosecond Laser Processing of SiC Ceramics with Optimized Material Removal Rate

by
Jian Zhang
,
Zhichao Liu
,
Yuanhang Zhang
,
Feng Geng
,
Shengfei Wang
,
Fei Fan
,
Qinghua Zhang
and
Qiao Xu
*
Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
*
Author to whom correspondence should be addressed.
Micromachines 2023, 14(10), 1960; https://doi.org/10.3390/mi14101960
Submission received: 23 September 2023 / Revised: 15 October 2023 / Accepted: 16 October 2023 / Published: 21 October 2023
(This article belongs to the Section D：Materials and Processing)
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Abstract

Silicon carbide (SiC) ceramics are widely used as structural materials for various applications. However, the extraordinarily high hardness, brittleness, low material removal rate, and severe tool wear of these materials significantly impact the performance of conventional mechanical processing techniques. In this study, we investigated the influence of different parameters on the material removal rate, surface quality, and surface oxidation during the laser processing of SiC ceramic samples using a high-repetition-frequency femtosecond laser at a wavelength of 1030 nm. Additionally, an experimental investigation was conducted to analyze the effects of a burst mode on the material removal rate. Our results demonstrate that the surface oxidation, which significantly affects the material removal rate, can be effectively reduced by increasing the laser scanning speed and decreasing the laser scanning pitch. The material removal rate and surface quality are mainly affected by laser fluence. The optimal material removal rate is obtained with a laser fluence of 0.4 J/cm2 at a pulse width of 470 fs.
Keywords: femtosecond laser; SiC ceramics; laser processing; material removal rate; surface oxidation femtosecond laser; SiC ceramics; laser processing; material removal rate; surface oxidation

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MDPI and ACS Style

Zhang, J.; Liu, Z.; Zhang, Y.; Geng, F.; Wang, S.; Fan, F.; Zhang, Q.; Xu, Q. High-Power Femtosecond Laser Processing of SiC Ceramics with Optimized Material Removal Rate. Micromachines 2023, 14, 1960. https://doi.org/10.3390/mi14101960

AMA Style

Zhang J, Liu Z, Zhang Y, Geng F, Wang S, Fan F, Zhang Q, Xu Q. High-Power Femtosecond Laser Processing of SiC Ceramics with Optimized Material Removal Rate. Micromachines. 2023; 14(10):1960. https://doi.org/10.3390/mi14101960

Chicago/Turabian Style

Zhang, Jian, Zhichao Liu, Yuanhang Zhang, Feng Geng, Shengfei Wang, Fei Fan, Qinghua Zhang, and Qiao Xu. 2023. "High-Power Femtosecond Laser Processing of SiC Ceramics with Optimized Material Removal Rate" Micromachines 14, no. 10: 1960. https://doi.org/10.3390/mi14101960

APA Style

Zhang, J., Liu, Z., Zhang, Y., Geng, F., Wang, S., Fan, F., Zhang, Q., & Xu, Q. (2023). High-Power Femtosecond Laser Processing of SiC Ceramics with Optimized Material Removal Rate. Micromachines, 14(10), 1960. https://doi.org/10.3390/mi14101960

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