1. Introduction
Modern manufacturing technology integrates new production techniques and machinery with information technology, microelectronics, and innovative organizational practices in the manufacturing process. Therefore, the electrohydrodynamic jet (E-Jet) is one of the significant methods for fabricating micro/nano-structures executing electrostatic and hydrodynamic boundary conditions [
1]. The E-Jet printing process is very popular in MEMS devices due to its advantages of high resolution and wide material adaptability during this current span [
2]. It has been widely used for manufacturing micro/sub-micro structures of electronic, polymer, and ceramic materials. There are various E-Jet setup devices used by many groups and it consists of a syringe pump, a nozzle (metal), a high voltage system, and a substrate. Many researchers have used the combined needle system (metal and quartz) to print microstructures on insulating substrates for the application of electronic devices [
3]. The simulation models determine the stable and control morphology of the cone jet when many basic forces, i.e., normal electric force, tangential force, surface tension, gravity force, dielectric force, and viscous force, take the state of equilibrium [
4]. Contemporary development in the combined needle system demonstrates the advantages of E-Jet printing on electronic devices [
5]. This trend has brought about a change in E-Jet technology and extends to a coaxial needle system that has the ability to print multi-layer composite structures on different substrates, i.e., conductive, non-conductive, and silicon substrates [
6,
7,
8,
9].
Coaxial electrohydrodynamic jet printing is a promising technology for preparing micro/nanoparticles on different substrates based on the drop-on-demand method [
10]. Moreover, the working principle of DoD CE-Jet is the use of different needles, i.e., inner and outer capillaries by regulating functional fluids from the syringe pump. The inner and outer functional fluids have different physical properties and are smoothly delivered to the coaxial needle. The high voltage generator is connected with the coaxial needle system which produces the electric field around the needle tip. Similarly, Loscertales et al. produced monodisperse compound droplets using the coaxial electrohydrodynamic atomization process for the encapsulation of micro/nano materials [
11]. Sun et al. generated special compositions known as core-shell polymer nanofibers by the co-electrospinning method using PEO polymer material as the internal fluid and PSU as the external fluid [
12]. The co-electrospinning method can be used for the fabrication of versatile structures and microdroplets with the advantages of high precision packaging, strong controllability, and simple process. During theoretical analysis, the CEA process reports that the flow rate of internal and external fluids has a significant effect on the size of the composite microdroplets [
11]. On the basis of the difference in electrical relaxation time between the inner liquid and the outer liquid, the study introduced the concept of conducting fluid including internal direction and external direction. Lee et al. described a multidrug encapsulation technique by coaxial tri-capillary electrospray (ES) system which can synthesize monodisperse PLGA-coated particles containing multiple drugs in one step [
13]. Chen et al. studied spraying modes in coaxial jet electrospray with the outer driving liquid and showed that the modes of coaxial atomization depend on the physical properties of the outer liquid.
In addition, the stability of the coaxial jet can be heightened by changing the flow rate of the inner and outer liquids; furthermore, it was determined that the coaxial nozzle-assisted E-Jet printing for microscale 3D cell-laden constructs is essential in biomedical device applications [
14]. The process parameters, i.e., applied voltage, alginate feeding rate, stage moving speed, and calcium chloride feed rate, were systematically studied to stably print microscale hydrogel filaments with 2D/3D organizations [
15]. Moreover, the study introduced the fabrication of micro-nanocapsules by a new electrospraying technique using coaxial E-Jet printing. Furthermore, the study reported the effects of various operating parameters on the size of microdroplets and printed the direct writing stretchable and conductive cables for strain sensor by using a coaxial printing method [
16]. The study used liquid metal in the inner capillary and high viscosity PDMS was used in the outer shell [
17]. Ahmad et al. studied the generation of multilayer structures for biomedical engineering applications using a new device with three coaxial needles and E-Jet flow. The work concluded that E-Jet flow is an important phenomenon for two-layer bubbles, closed porous fibers, and nanocapsules containing three-layer structures [
9]. Furthermore, Xu et al. performed a finite element simulation of CEA using the computational fluid dynamics (CFD) model in Fluent [
18]. The ability of the CFD model to predict the output of composite structures was verified by the experimental study. However, the numerical simulation of the CEA process contained only the outer Taylor cone profile, which was not consistent with the experimental phenomena. Therefore, the study determined that both inner and outer Taylor cone profiles simultaneously existed [
4]. In addition, throughout the simulation work, the volume charge density should be mainly concentrated on the two interfaces consisting of air-outer liquid and inner-outer liquid interfaces since it determines the magnitude and direction of the electric forces as the electric field is concentrated around the needle tip. According to the literature review on DoD CE-Jet printing, the effect of electric charge was also rarely discussed in previous works. Moreover, the current simulation works generally focus on the formation of the CEA process. Additionally, the influence of the key parameters on DoD CE-Jet printing including applied voltage and liquid flow rate were infrequently discussed and indicated that the DoD CE-Jet method still has challenges in printing stable microstructures [
19].
In our research group, Xiaojun et al. described a coaxial focused electrohydrodynamic jet (CFEJ) printing technique and printed direct writing nanoscale structures [
8]. Moreover, the different nano cantilever beam structures were introduced on a silicone substrate. The numerical simulation of CFEJ was developed based on a three-phase flow of liquid–liquid–air model. Throughout simulation and experimental study, the PZT solution was used in the inner needle and highly viscous silicon oil was used in the outer needle. Then, nanostructures of various patterns with a diameter of 40 nm were directly printed on silicon substrate. The results indicated that the three-phase field method is suitable for CE-Jet printing on various substrates for the application of micro-nano devices. It is well-known that E-Jet printing technology has a great importance for micro-nano devices for electronic applications [
20]. Recently, the direct writing method has been used to fabricate functional nanostructures by reducing needle diameter. Park et al. fabricated various structures (diameter 240 nm) using a needle with a size of 300 nm [
21]. However, the production of sub-microns is very difficult using the DoD CE-Jet printing method and only a special solution can be used for this complicated case. In the DoD CE-Jet process, the diameter of the inner jet can be reduced to sub-micron or even nanoscale with the assistance of strong electrical force and viscous shearing force originating from the outer solution. The DoD CE-Jet has the potential to produce nanoscale structures with a relatively large-sized coaxial needle system. However, the use of special ink and significant coaxial needles make DoD CE-Jet practice much more complicated. Therefore, the use of a numerical modeling technique can significantly help to determine optimized parameters and working conditions for precise microscale printing.
In favor of the latest developments from our group, the main objective of this DoD CE-Jet approach is to simulate compound droplets deformation under influence of a strong external electric field around the needle tip. We performed a DoD CE-Jet printing simulation and experiment in order to print stable compound microdroplets by generating a micro-dripping regime on silicon substrate. For a ternary phase field model, the Navier–Stokes equation including surface tension, viscous shear force, electrical force, internal pressure, and gravitational force were applied to describe a laminar flow of both functional fluids. Furthermore, the appropriate three-phase field technique was used to trace interfaces of inner-outer solution and air-outer solution. Based on the hypothetical examination, the formation of DoD CE-Jet was studied using a three-phase flow model in COMSOL Multiphysics software. By maintaining a constant outer viscous fluid flow, the influence of external pulse voltage and internal fluid flow velocity were investigated on CE-Jet morphology and microdroplet size. The DoD CE-Jet simulation results at different dc pulse voltages and flow velocities were verified by droplet generation during experiments. Therefore, in the experimental section, optimized parameters were considered as substantial stable parameters. The inner diameter of the designed inner needle was as large as 180 μm and the outer diameter was 420 μm in both the simulation and experiments.
2. Printing System and Printing Process
2.1. Materials
Particular materials were selected for numerical simulation and experimental studies throughout this work. Similarly, lead zirconate titanate (PZT) and photoresist (AZ703) were chosen as the inner liquid and high viscosity silicone oil was regulated as the outer liquid. The photoresist has a red color that can be easily detected during the microdroplet printing process. PZT is a sensitive piezoelectric material based on metal oxide which was developed by scientists at Tokyo Institute of Technology around 1952. The purpose of photoresist material is to be used in conjunction with the inner liquid, making it an ideal material and likewise improving the visibility of the PZT solution for the examination of printing droplets. The PZT solution is one of the most widely used in M/NEMS devices due to its excellent piezoelectric properties [
22]. The properties of photoresist AZ703 (Anzhi Electronic Materials, China) and silicone oil (Dow Corning Corporation, USA) were obtained from the suppliers. Wang et al. used a special PZT solution that was cautiously prepared in laboratory [
17]. The viscosity of the PZT solution was measured using a rotary viscometer (NDJ-79, Shanghai Pingxuan Scientific Instrument in China). The surface tension of the PZT solution was measured using a droplet shape analyzer (DSA100, Kruss GmbH in Germany). The relative permittivity of PZT solution was obtained using a precision resistance analyzer (4294A, Agilent Technologies in USA). Moreover, for the outer liquid, silicone oil is non-toxic, colorless, and highly viscous, which is very helpful in the formation of stable DoD CE-Jet for the generation of microdroplets. The silicon substrate is used for printing droplet strings with a thickness of 0.5 mm.
Table 1 presents the physical properties of inner and outer liquids used in the research.
2.2. Drop-on-Demand CE-Jet Printing Setup
In industrial coaxial E-Jet printing, there are two basic kinds of printheads (i.e., continuous E-Jet or direct writing heads and drop-on-demand (DoD) heads) used to print microdroplets for various electronic devices. Therefore, for engineered printing solutions, we need specialization in DoD CE-Jet printing machines. Similarly,
Figure 1 illustrates the schematic and experimental setup of the DoD CE-Jet printing technique, which mainly consists of a coaxial needle, a high voltage dc pulse generator, two syringe pumps, a video monitoring system, and a computer-controlled XYZ motion stage. In the combined needle system, the inner and outer needles were respectively connected to the syringe pumps (PHD ULTRATM and Harvard Apparatus USA) by high-quality PTFE tubes. The inner needle was fixed inside the shell of the stainless-steel needle. In this work, the dimensions of the simulated geometric model are mainly based on commercial needles, in which the inner diameter of the inner needle is 180 µm and the outer diameter is 420 µm. Similarly, the outer needle has an inner diameter of 800 µm and the outer diameter is 1000 µm.
In addition, the coaxial needle system was connected to the high-voltage supply generator which is fundamentally a dc pulse source power supply. The electric field generated between the coaxial needle and the ground electrode produces electrical force which plays a key role in generating the Taylor cone profile at the needle interface. The silicon substrate, which was quite thick up to 0.5 mm, was placed at a distance of 16 cm from the needle tip. The silicon substrate was coated with Pt/Ti layers by using the sputtering technique in the lab. We measured the contact angle of the silicon substrate using an optical contact angle measuring instrument (KRUSS, Germany), which is exactly 65o. The angle is measured at less than 90o, which indicates that the silicon substrate has less polarizing effect of rising charges with high bonding force of the printed droplets on the substrate surface. It also has good wettability and durability in order to print high resolution drops. The flow rate values of the two functional solutions were adjusted and the unmixed liquids were injected at the appropriate flow rate using the two syringe pumps respectively. When a suitable voltage was applied, the surface tension force exceeded the gravity force of the liquid, and a stable DoD CE-Jet was formed at the needle tip. Subsequently, the micro-dripping mode appeared during the transition time of the cone profile and droplet disintegration, leading to the printing of droplet arrays on the substrate. After printing, a double-layered circle-encapsulated droplet with inner functional material and outer high viscous material was obtained. Then, by removing the external material, a microscale droplet of only internal functional materials can be obtained.
2.3. Numerical Simulation
2.3.1. Governing Equations for Fluid Flow
Three-phase flow in phase field method was based on the leaky dielectric model [
12] and the Navier–Stokes–Cahn–Hilliard (NSCH) system [
23]. In this work, three fluids (i.e., inner liquid, outer liquid, and air) are assumed to be non-miscible, incompressible, and Newtonian and laminar. The fluid flow can be defined in following continuity Equation (1):
where
denotes liquid velocity vector of functional solutions. The high dc pulse voltage is applied to the coaxial needle system and free charges in both liquids produce electrical field polarization charges, which swiftly travel toward the three-phase interface. Consequently, the DoD CE-Jet, various fluid field interactions, and strong electric field are produced as a result of governing equations for fluid flow. In addition, as the electric field pushes charges around the coaxial needle interface, the inner and outer solutions are influenced due to electrical force meddling. Furthermore, the continuity and mass conservation of the Navier–Stokes equation for a three-phase system explain the forces acting around the needle tip during the DoD coaxial E-Jet printing process which is shown in
Figure 2a. The momentum equation needs to include additional terms for surface tension on the needle interface, where F
st = [γ κ δ s n] and electric stress is F
es; equations can be rewritten as in Equation (2). Moreover,
Figure 2b illustrates the analysis of four parameters of pulse waveform in this work. The morphology of the cone jet is controlled in the experiments by adjusting four important parameters: peak voltage, base voltage, frequency, and duty ratio. The duty cycle is a single variable that ensures the process parameters are in constant position. The base voltage of 5.5 kV, peak voltage of 9.0 kV, printing speed of 100 mm/s, frequency of 100 Hz, and duty cycle of 80% were examined to develop a stable DoD CE-Jet printing process.
where
is liquid density and
indicates internal pressure of the liquid. Similarly, F
st is surface tension force of liquid and F
es is electric force generated by electric field. The surface tension force is expressed by γ, κ and δ which are surface tension coefficient, curvature of interface, and Dirac-delta function, respectively. The viscous force tensor T is given in Equation (3), where
is viscosity of liquids.
Evaluating variables and parameters in the phase field model is very exclusive, where a time-dependent factor plays a key role in tracing the ternary phase interfaces. Therefore, the three-phase field scheme was used to define the interface between the outer and inner phase in the simulation model. In order to account for the limitations of time, the Cahn Hilliard equations were formed in ternary phase field, which were identified in the software system [
24,
25] as given in Equation (4):
where σ expresses surface tension. Similarly, σ and ε are executed independently during Cahn Hilliard equations. Therefore, M
o is a driving force of liquids used as a variable and known as the diffusion coefficient. The concentration of two liquid phases during numerical simulation is very important to regulate fluid flow [
26]. The Cahn Hilliard potential is an auxiliary variable which is used in variable contour to assist particle directions during the mass flow of liquids, as explained in Equation (5):
where A, B, and C are phase variables used to identify location of each phase in three-phase flow model throughout simulation work. So,
denotes total effect of surface tension [
27]. The summation of entire three phases with high concentration values is assumed to be equal to unity in each numerical box, as given in the following Equation (6):
2.3.2. Governing Equations for Interface Tracking
The Hamilton–Jacobi function which is given in Equation (7) is solved simultaneously with the Navier–Stokes equation during the three-phase field method, as given in the form of Equation (8) [
28]:
where α indicates phase fraction along with laminar flow of fluid and traces location of the interface around the coaxial needle tip. Similarly,
denotes the inner and outer phases of the PZT solution and silicon oil [
29].
2.3.3. Governing Equations for Electric Field
The Maxwell equations are approximated as electrostatic [
30]. The magnetic effects are ignored, since the dynamic currents are in small quantities and in other words electric field is gyratory [
31]. The electric field is expressed as in Equation (9):
By applying Gauss’s law to a linear electric medium, it can be reduced to Equation (10):
where ε is permittivity and
is a free charge density. Then, the free charge density is relative to current by charge conservation equation that dominates in system. Similarly, by using the electric charge approaches of Melcher and Saville for electric field, some of their work proposed density effect [
32]. Thus, Issa presents Equation (11) which becomes the charge conservation equation in Ohmic regime for the immiscible liquids [
33]:
To account for surface tension force F
st, the continuum surface force was introduced as a volumetric force on the liquid-air interface, where it can be expressed as Equation (12) [
34]:
The relative permittivity of many materials can be considered constant, and the functional fluid is incompressible as given in Equation (13). Coulombic force is present in all the simplifications as given in Equation (14). This force always acts along the electric field that is perpendicular to the surface. The second term of the equation represents the permittivity gradient force, which is constant for each liquid and perpendicular to the surface.
2.4. Geometric Model Establishment and Physics Selection
The governing equations in the CE-Jet model describe viscous motion of a fluid, the expression of an electric field in a fluid, the tracking of an interface around a needle, and the coupling of flow field to the electric field. In this work, the CE-Jet is simulated to generate the micro-dripping mode for printing various micro and nano structures on a silicon substrate. An axisymmetric geometric model was established based on the actual experimental setup. In order to reduce the amount of calculation and improve simulation efficiency and accuracy of the simulation, the simulation model has been simplified in the following aspects:
(1) Converting a specific three-dimensional model into a two-dimensional axisymmetric model.
(2) Ignoring the outer diameter of the outer needle.
The reason for this is that needle shape is axisymmetric and two-dimensional axisymmetric model is sufficient to express the coaxial needle model.
Figure 3 displays the flow diagram of the numerical simulation model. Furthermore, the simulation difficulty and calculation quantity can be greatly simplified, and the outer diameter of the needle has no influence on flow field. The geometric model consists of two different types of boundary conditions, one boundary line being constructed during the distribution of high electric field and another along the laminar flow of liquids at needle inlet. During the laminar flow in the physical model, the reference pressure level was chosen at 1 atm and reference temperature level was selected at 293.15 K, which determined multiple coupling options for smooth fluid flow. Similarly,
Figure 4a shows the geometry of the phase field model and particular boundary conditions. The simulation model was constructed based on time-dependent unit, where the time range was (0, 5 × 10
−5, 0.5). The results were resolved in 2D plot group using a relative tolerance value of 0.01. Similarly, the absolute tolerance value of 5 × 10
−4 was used, which reinforces the consistent initialization of backward Euler value that was measured at 0.001.
Figure 4b demonstrates finer user-controlled meshing for the inner needle and physics-controlled meshing for the remaining space.
Moreover, the combined effects of forces are attributed to three aspects of force, including gravity, electric field force, and fluid dynamics. Thus, it is necessary to introduce four physics fields, i.e., gravity fields, electrostatic fields, flow fields, and multiphysics that require coupling level. When the gravitational field is included in the flow field, the gravitational acceleration is set at 9.8 m s
−2 and the direction is on the Y axis. Because the dielectric constant of the material jumps across the interface point, it must adjust the relative dielectric constant and space charge density in the electrostatic field. The boundary conditions of the geometric model are summarized in
Table 2. The inner liquid generates inner CE-Jet under the high applied voltage and similarly the outer silicon oil produces outer CE-Jet at the same voltage. Here, φ is the initial value of pulse voltage, u is the fluid initial velocity, and V
0 is the applied voltage to the coaxial needle. Furthermore, as the voltage varies from different locations and is determined in the form of V during the calculation, Q
inner is the flow rate of inner liquid and A
inner territory represents the cross-sectional area of the inner needle. Q
outer shows the flow rate of outer liquid and the territory of A
outer is the difference of cross-sectional area between the inner and outer needle.
The formation of DoD CE-Jet mainly depends on the flow of the outer liquid and the distribution of electric filed in the phase field method. Charge density of electric potential around the outer liquid affects the physical properties of silicon oil, which produces stable CE-Jet around the needle tip. Meanwhile, the CE-Jet is concentrated in the region close to the symmetric axis and converts to the micro-dripping mode to produce microdroplets. This is the change of electric field and the flow of fluid almost only occurred in the region around the axis of symmetry. In this situation, meshes located merely in the region approaching the axis of symmetry are required to be refined by applying the user-controlled sequence type, which can help to improve the efficiency and accuracy of the simulation.
4. Conclusions
In this paper, a phase field DoD CE-Jet simulation model is established which controls the influence of key printing parameters on cone jet morphology and droplet diameter. The coaxial needle shape and relative length of the needle are designed and manufactured according to the DoD CE-Jet process. The coaxial printing experiments were carried out using the photoresist and PZT sol in the inner needle and silicone oil in the outer needle, respectively, which verified the correctness of the simulation results. Therefore, the establishment of a hydrodynamic force regime for a coaxial electric jet, the equation derived from internal fluid motion, and the electric field equation were added to the Navier–Stokes equation. Further, the Maxwell pressure tensor was set up to trace the interface equation between two fluids. The simulation results revealed that the diameter of the inner jet decreases with increasing applied pulse voltage. Likewise, the diameter of the inner jet was proportional to the flow velocity and print height. For the effect of morphology near needle tip, it was found that the diameter of the CE-Jet increases with increasing print height. To verify simulation results and to guide the printing experiment, the PZT sol and photoresist (AZ703) were selected as the inner liquid. The experimental results showed that when no electric field is applied, the liquid volume is concentrated in a spherical shape. Similarly, once the electric field is set, a stable CE-Jet can be formed with a microscale inner jet, which preliminarily verifies the reliability of the simulation. The silicon oil microscale line with a size of 105 µm and PZT microdroplets with a minimum size of ~5.5 µm were printed directly under the optimized parameters obtained from the simulation. Thus, it is proved that droplet generation is inversely proportional to pulse voltage and directly proportional to internal liquid flow velocity and print height. Overall, this simulation work demonstrates that high pulse voltage and low flow velocity can be used to fabricate excellent features with potential applications in M/NEMS devices. This method is low in cost, easier to handle, and requires less time to use in E-Jet printing.