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Micromachines, Volume 14, Issue 4

2023 April - 190 articles

Cover Story: Micromachined deformable mirrors are often assembled using adhesives to bond actuators to a compliant face sheet. A new approach to minimizing stresses induced by adhesive assembly involves moving the adhesive joints to the ends of slender posts that extend integrally from the face sheet. These graphics depict a mirror face sheet made using silicon-on-insulator wafers and deep reactive ion etching. The “Overview” graphic shows the 12 mm diameter, 10 µm thick face sheet as fabricated with 37 integral slender posts. Three graphics are scanning electron micrographs of a portion of the posts, face sheet, and rigid silicon frame. Two graphics are scanning electron micrographs of a single post integrally fabricated with the face sheet membrane and our design versions. View this paper
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Articles (190)

  • Communication
  • Open Access
5 Citations
4,036 Views
10 Pages

21 April 2023

With gate length (Lg) and gate spacing length (Ls) shrinkage, the cell-to-cell z-interference phenomenon is increasingly severe in 3D NAND charge-trap memory. It has become one of the key reliability concerns for 3D NAND cell scaling. In this work, z...

  • Article
  • Open Access
5 Citations
4,165 Views
33 Pages

21 April 2023

In this article, based on the developed methodology, the stages of designing the sensitive element of a microelectromechanical gyroscope with an open-loop structure are considered. This structure is intended for use in control units for mobile object...

  • Article
  • Open Access
11 Citations
2,274 Views
16 Pages

21 April 2023

The main concern of this paper is to introduce some new tubular shapes whose cross-sections result from the imposition of Navier’s velocity slip at the surface. A new family of pipes induced by the slip mechanism is thus discovered. The family...

  • Article
  • Open Access
10 Citations
2,606 Views
26 Pages

SiamHAS: Siamese Tracker with Hierarchical Attention Strategy for Aerial Tracking

  • Faxue Liu,
  • Jinghong Liu,
  • Qiqi Chen,
  • Xuan Wang and
  • Chenglong Liu

21 April 2023

For the Siamese network-based trackers utilizing modern deep feature extraction networks without taking full advantage of the different levels of features, tracking drift is prone to occur in aerial scenarios, such as target occlusion, scale variatio...

  • Article
  • Open Access
19 Citations
6,069 Views
14 Pages

21 April 2023

As one of the most important modes of transportation, the safety of running trains and railway tracks is significant. It is essential to power sensors that detect and track health in remote areas. The vibration energy of the track structure is enormo...

  • Article
  • Open Access
7 Citations
2,140 Views
15 Pages

21 April 2023

Abrasive water jetting is an effective dressing method for a fixed abrasive pad (FAP) and can improve FAP machining efficiency and the impact of abrasive water jet (AWJ) pressure on the dressing effect; moreover, the machining state of FAP after dres...

  • Article
  • Open Access
11 Citations
3,530 Views
10 Pages

Efficient Synthesis of a Schiff Base Copper(II) Complex Using a Microfluidic Device

  • Masashi Kobayashi,
  • Takashiro Akitsu,
  • Masahiro Furuya,
  • Tetsushi Sekiguchi,
  • Shuichi Shoji,
  • Takashi Tanii and
  • Daiki Tanaka

21 April 2023

The efficient synthesis of amino acid Schiff base copper(II) complexes using a microfluidic device was successfully achieved. Schiff bases and their complexes are remarkable compounds due to their high biological activity and catalytic function. Conv...

  • Article
  • Open Access
25 Citations
3,572 Views
26 Pages

21 April 2023

The timely detection and diagnosis of diseases and accurate monitoring of specific genetic conditions require rapid and accurate separation, sorting, and direction of target cell types toward a sensor device surface. In that regard, cellular manipula...

  • Article
  • Open Access
1 Citations
2,201 Views
14 Pages

Hierarchical Design of CuO/Nickel–Cobalt–Sulfide Electrode by a Facile Two-Step Potentiostatic Deposition

  • Sa Lv,
  • Peiyu Geng,
  • Yaodan Chi,
  • Huan Wang,
  • Xuefeng Chu,
  • Yang Zhao,
  • Boqi Wu,
  • Wenshi Shang,
  • Chao Wang and
  • Xiaotian Yang
  • + 2 authors

20 April 2023

Herein, a scalable electrodeposition strategy is proposed to achieve hierarchical CuO/nickel–cobalt–sulfide (NCS) electrodes using two-step potentiostatic deposition followed by high-temperature calcination. The introduction of CuO provid...

  • Article
  • Open Access
2,798 Views
14 Pages

20 April 2023

In this paper, the transient breakdown voltage (TrBV) of a silicon-on-insulator (SOI) laterally diffused metal-oxide-semiconductor (LDMOS) device was increased by introducing a step P-type doping buried layer (SPBL) below the buried oxide (BOX). Devi...

  • Article
  • Open Access
2,490 Views
14 Pages

20 April 2023

In this study, an electrostatic force-driven on-chip tester consisting of a mass with four guided cantilever beams was employed to extract the process-related bending stiffness and piezoresistive coefficient in-situ for the first time. The tester was...

  • Article
  • Open Access
2 Citations
1,967 Views
17 Pages

20 April 2023

In recent years, high-quality surfaces with large areas and curvatures have been increasingly used in engineering, but the precision machining and inspection of such surfaces is a particular challenge. Surface machining equipment needs to have a larg...

  • Feature Paper
  • Article
  • Open Access
5 Citations
3,896 Views
11 Pages

Creating Stretchable Electronics from Dual Layer Flex-PCB for Soft Robotic Cardiac Mapping Catheters

  • Abdellatif Ait Lahcen,
  • Alexandre Caprio,
  • Weihow Hsue,
  • Cory Tschabrunn,
  • Christopher Liu,
  • Bobak Mosadegh and
  • Simon Dunham

20 April 2023

The authors present in this study the development of a novel method for creating stretchable electronics from dual-layer flex printed circuit boards (flex-PCBs) as a platform for soft robotic sensor arrays (SRSAs) for cardiac voltage mapping applicat...

  • Article
  • Open Access
6 Citations
3,785 Views
19 Pages

Metal-Chelating Self-Assembling Peptide Nanofiber Scaffolds for Modulation of Neuronal Cell Behavior

  • Kenana Dayob,
  • Aygul Zengin,
  • Ruslan Garifullin,
  • Mustafa O. Guler,
  • Timur I. Abdullin,
  • Abdulla Yergeshov,
  • Diana V. Salakhieva,
  • Hong Hanh Cong and
  • Mohamed Zoughaib

19 April 2023

Synthetic peptides are promising structural and functional components of bioactive and tissue-engineering scaffolds. Here, we demonstrate the design of self-assembling nanofiber scaffolds based on peptide amphiphile (PA) molecules containing multi-fu...

  • Article
  • Open Access
2 Citations
2,641 Views
13 Pages

19 April 2023

A voltage-controlled oscillator (VCO) is one of the key modules of the phase-locked loop (PLL) microsystem, and it is easy to bombard using high-energy particles in a radiation environment, resulting in the single-event effect. In order to improve th...

  • Article
  • Open Access
2 Citations
2,842 Views
18 Pages

19 April 2023

Terahertz (THz) communication has a large available bandwidth, which is expected to be deployed in future communication networks. As THz wave suffers from severe propagation loss in wireless transmission, we consider a THz near-field scenario where a...

  • Article
  • Open Access
3 Citations
2,741 Views
18 Pages

19 April 2023

Fiber-reinforced composites (FRC) are widely used in various fields due to their excellent mechanical properties. The mechanical properties of FRC are significantly governed by the orientation of fibers in the composite. Automated visual inspection i...

  • Article
  • Open Access
8 Citations
4,414 Views
29 Pages

Finger-Actuated Micropump of Constant Flow Rate without Backflow

  • NurFarrahain Nadia Ahmad,
  • Nik Nazri Nik Ghazali,
  • Ahmad Taufiq Abdul Rani,
  • Mohammad Hafiz Othman,
  • Chia Ching Kee,
  • Prastika Krisma Jiwanti,
  • Arturo Rodríguez-Gómez and
  • Yew Hoong Wong

19 April 2023

This paper presents a finger-actuated micropump with a consistent flow rate and no backflow. The fluid dynamics in interstitial fluid (ISF) extraction microfluidics are studied through analytical, simulation, and experimental methods. Head losses, pr...

  • Article
  • Open Access
24 Citations
4,290 Views
12 Pages

19 April 2023

3D cell culture models replicating the complexity of cell–cell interactions and biomimetic extracellular matrix (ECM) are novel approaches for studying liver cancer, including in vitro drug screening or disease mechanism investigation. Although...

  • Article
  • Open Access
5 Citations
2,984 Views
15 Pages

Parameter Study on Force Curves of Assembled Electronic Components on Foils during Injection Overmolding Using Simulation

  • Martin Hubmann,
  • Mona Bakr,
  • Jonas Groten,
  • Martin Pletz,
  • Jan Vanfleteren,
  • Frederick Bossuyt,
  • Behnam Madadnia and
  • Barbara Stadlober

19 April 2023

The integration of assembled foils in injection-molded parts is a challenging step. Such assembled foils typically comprise a plastic foil on which a circuit board is printed and electronic components are mounted. Those components can detach during o...

  • Review
  • Open Access
11 Citations
4,843 Views
13 Pages

19 April 2023

Adoptive cell therapy (ACT) is a personalized therapy that has shown great success in treating hematologic malignancies in clinic, and has also demonstrated potential applications for solid tumors. The process of ACT involves multiple steps, includin...

  • Article
  • Open Access
2 Citations
3,183 Views
17 Pages

Design of Hybrid Beamforming System Based on Practical Circuit Parameter of 6-Bit Millimeter-Wave Phase Shifters

  • Mohammed A. Alqaisei,
  • Abdel-Fattah A. Sheta,
  • Ibrahim Elshafiey and
  • Majid Altamimi

19 April 2023

This paper addresses the design of a hybrid beamforming system considering the circuit parameter of six-bit millimeter-wave phase shifters based on the process design kit. The phase shifter design adopts 45 nm CMOS silicon on insulator (SOI) technolo...

  • Article
  • Open Access
5 Citations
2,687 Views
22 Pages

19 April 2023

In this manuscript, we have numerically investigated and experimentally verified the six-element split ring resonator and circular patch-shaped multiple input, multiple output antenna operating in the 1–25 GHz band. MIMO antennas are analyzed i...

  • Article
  • Open Access
7 Citations
2,957 Views
10 Pages

Low Switching Loss Built-In Diode of High-Voltage RC-IGBT with Shortened P+ Emitter

  • Wei Wu,
  • Yansong Li,
  • Mingkang Yu,
  • Chongbing Gao,
  • Yulu Shu and
  • Yong Chen

19 April 2023

In this paper, a low switching loss built-in diode of a high-voltage reverse-conducting insulated gate bipolar transistor (RC-IGBT) is proposed without deteriorating IGBT characteristics. It features a particular shortened P+ emitter (SE) in the diod...

  • Article
  • Open Access
7 Citations
3,567 Views
14 Pages

18 April 2023

High thermal conductivity steel (HTCS-150) is deposited onto non-heat-treated AISI H13 (N-H13) via powder-fed direct energy deposition (DED) based on the response surface methodology (RSM) to enhance the mechanical properties and thermal conductivity...

  • Article
  • Open Access
16 Citations
3,610 Views
17 Pages

Influence of Aging Treatment Regimes on Microstructure and Mechanical Properties of Selective Laser Melted 17-4 PH Steel

  • Dongdong Dong,
  • Jiang Wang,
  • Chaoyue Chen,
  • Xuchang Tang,
  • Yun Ye,
  • Zhongming Ren,
  • Shuo Yin,
  • Zhenyu Yuan,
  • Min Liu and
  • Kesong Zhou

18 April 2023

Aging is indispensable for balancing the strength and ductility of selective laser melted (SLM) precipitation hardening steels. This work investigated the influence of aging temperature and time on the microstructure and mechanical properties of SLM...

  • Article
  • Open Access
2 Citations
1,990 Views
10 Pages

Efficient Photodegradation of Rhodamine B by Fiber-like Nitrogen-Doped TiO2/Ni(OH)2 Nanocomposite under Visible Light Irradiation

  • Huan Wang,
  • Mingxuan Dong,
  • Baorui Shao,
  • Yaodan Chi,
  • Chao Wang,
  • Sa Lv,
  • Ran Duan,
  • Boqi Wu and
  • Xiaotian Yang

18 April 2023

N-TiO2/Ni(OH)2 nanofiber was successfully prepared by combining the electrospinning and solvothermal method. It has been found that under visible light irradiation, the as-obtained nanofiber exhibits excellent activity for the photodegradation of rho...

  • Article
  • Open Access
3 Citations
2,165 Views
12 Pages

Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer

  • Guowen Liu,
  • Yu Liu,
  • Xiao Ma,
  • Xuefeng Wang,
  • Xudong Zheng and
  • Zhonghe Jin

18 April 2023

This paper presents a novel method for the performance of an all-silicon accelerometer by adjusting the ratio of the Si-SiO2 bonding area, and the Au-Si bonding area in the anchor zone, with the aim of eliminating stress in the anchor region. The stu...

  • Article
  • Open Access
7 Citations
3,216 Views
13 Pages

Study of a Fluorescent System Based on the Naphthalene Derivative Fluorescent Probe Bound to Al3+

  • Qiuping Li,
  • Lei Ma,
  • Jianyan Li,
  • Lijuan Wang,
  • Liansheng Yu,
  • Yuehui Zhao and
  • Yuguang Lv

17 April 2023

The naphthalene derivative fluorescent probe F6 was synthesized and a 1 × 10−3 mol/L solution of Al3+ and other metals to be tested was prepared for the subsequent experiments. The Al3+ fluorescence system of the naphthalene derivative fl...

  • Article
  • Open Access
3 Citations
2,102 Views
22 Pages

Design of a Compact Analog Complex Correlator for Millimeter-Wave Radiation Temperature Measurement System

  • Wangdong He,
  • Anyong Hu,
  • Chen Dong,
  • Xi Chen,
  • Jianhao Gong and
  • Jungang Miao

17 April 2023

Human body temperature is a fundamental physiological sign that reflects the state of physical health. It is important to achieve high-accuracy detection for non-contact human body temperature measurement. In this article, a Ka band (32 to 36 GHz) an...

  • Article
  • Open Access
10 Citations
2,562 Views
19 Pages

17 April 2023

The key elements used for receiving and processing signals in communication systems are the bandpass filters. Initially, a common operating mechanism was applied for the design of broadband filters, i.e., by cascading low-pass filters or high-pass fi...

  • Review
  • Open Access
45 Citations
6,959 Views
19 Pages

A Brief Review on Cerium Oxide (CeO2NPs)-Based Scaffolds: Recent Advances in Wound Healing Applications

  • Ishita Allu,
  • Ajay Kumar Sahi,
  • Pooja Kumari,
  • Karunya Sakhile,
  • Alina Sionkowska and
  • Shravanya Gundu

17 April 2023

The process of wound healing is complex and involves the interaction of multiple cells, each with a distinct role in the inflammatory, proliferative, and remodeling phases. Chronic, nonhealing wounds may result from reduced fibroblast proliferation,...

  • Article
  • Open Access
2 Citations
2,029 Views
8 Pages

Influence of Pump Current Waveform on The Mitigation of Transverse Mode Instability in Fiber Laser Oscillator

  • Junyu Chai,
  • Wenguang Liu,
  • Xiaolin Wang,
  • Qiong Zhou,
  • Jiangbin Zhang,
  • Hanwei Zhang,
  • Pengfei Liu,
  • Yao Lu,
  • Dan Zhang and
  • Guomin Zhao
  • + 1 author

17 April 2023

We carry out a detailed investigation of TMI mitigation by pump modulation based on multiple current waveforms in a fiber laser oscillator. Compared with continuous wave (CW), the modulation of various waveforms, including sinusoidal wave, triangular...

  • Article
  • Open Access
15 Citations
2,981 Views
18 Pages

Wetting Characteristics of Laser-Ablated Hierarchical Textures Replicated by Micro Injection Molding

  • Peng Gao,
  • Ian MacKay,
  • Andrea Gruber,
  • Joshua Krantz,
  • Leonardo Piccolo,
  • Giovanni Lucchetta,
  • Riccardo Pelaccia,
  • Leonardo Orazi and
  • Davide Masato

16 April 2023

Texturing can be used to functionalize the surface of plastic parts and, in particular, to modify the interaction with fluids. Wetting functionalization can be used for microfluidics, medical devices, scaffolds, and more. In this research, hierarchic...

  • Article
  • Open Access
13 Citations
3,948 Views
10 Pages

16 April 2023

This study aimed to investigate the performance of zinc-coated brass wire in wire-cut electrical discharge machining (EDM) using an ultrasonic-assisted wire on tungsten carbide. The research focused on the effect of the wire electrode material on the...

  • Article
  • Open Access
6 Citations
3,070 Views
12 Pages

A Bi-Directional Acoustic Micropump Driven by Oscillating Sharp-Edge Structures

  • Bendong Liu,
  • Meimei Qiao,
  • Shaohua Zhang and
  • Jiahui Yang

15 April 2023

This paper proposes a bi-directional acoustic micropump driven by two groups of oscillating sharp-edge structures: one group of sharp-edge structures with inclined angles of 60° and a width of 40 μm, and another group with inclined angles of 4...

  • Article
  • Open Access
4 Citations
2,251 Views
22 Pages

15 April 2023

This paper presents a Ka band eight-channel integrated packaged phased array receiver front-end for a passive millimeter-wave imaging system. Since multiple receiving channels are integrated in a given package, the mutual coupling issue affecting the...

  • Article
  • Open Access
2 Citations
2,346 Views
15 Pages

15 April 2023

Lasso transmission is a method for realizing long-distance flexible transmission and lightweight robots. However, there are transmission characteristic losses of velocity, force, and displacement during the motion of lasso transmission. Therefore, th...

  • Article
  • Open Access
6 Citations
5,053 Views
12 Pages

A Pixel Circuit for Compensating Electrical Characteristics Variation and OLED Degradation

  • Ning Wei,
  • Hongzhen Chu,
  • Bo Yu,
  • Huicheng Zhao,
  • Yuehua Li,
  • Xinlin Wang and
  • Hongyu He

15 April 2023

In recent years, the active-matrix organic light-emitting diode (AMOLED) displays have been greatly required. A voltage compensation pixel circuit based on an amorphous indium gallium zinc oxide thin-film transistor is presented for AMOLED displays....

  • Communication
  • Open Access
1 Citations
2,411 Views
9 Pages

Design and Fabrication of Micro Saw Enabling Root-Side Cutting of Bone

  • Pawan Pathak,
  • Jack Fasano,
  • Young-Cheon Kim,
  • Sang-Eun Song and
  • Hyoung Jin Cho

15 April 2023

A novel micro saw was fabricated using a combination of photolithography and electroplating techniques, resembling a miniature timing belt with sideways blades. The rotation or oscillation direction of the micro saw is designed to be perpendicular to...

  • Article
  • Open Access
4 Citations
2,406 Views
17 Pages

Regulating the Polypyrrole Ion-Selective Membrane and Au Solid Contact Layer to Improve the Performance of Nitrate All-Solid Ion-Selective Electrodes

  • Weizhuo Gao,
  • Weixuan Jing,
  • Yanrui Du,
  • Zehao Li,
  • Pengcheng Liu,
  • Feng Han,
  • Libo Zhao,
  • Zhaochu Yang and
  • Zhuangde Jiang

14 April 2023

With polymerization duration and Au3+ concentration of the electrolyte regulated, a desirable nitrate-doped polypyrrole ion-selective membrane (PPy(NO3)-ISM) and Au solid contact layer of anticipate surface morphology were obtained, and the pe...

  • Feature Paper
  • Article
  • Open Access
3 Citations
2,713 Views
19 Pages

14 April 2023

One of the advantages of human stem cell-derived cell-based preclinical screening is the reduction of the false negative/positive misjudgment of lead compounds for predicting their effectiveness and risks during the early stage of development. Howeve...

  • Article
  • Open Access
9 Citations
3,010 Views
19 Pages

Research on Abrasive Water Jet Polishing of Silicon Carbide Based on Fluid Self-Excited Oscillation Pulse Characteristics

  • Hong Zhang,
  • Baochun Tao,
  • Qianfa Deng,
  • Chengqi Zhang,
  • Binghai Lyu and
  • Duc-Nam Nguyen

14 April 2023

A self-excited oscillating pulsed abrasive water jet polishing method is proposed to solve the problems of low removal efficiency in traditional abrasive water jet polishing and the influence of an external flow field on the material surface removal...

  • Article
  • Open Access
2 Citations
2,557 Views
12 Pages

Experimental Study on Shear Rheological Polishing of Si Surface of 4H-SiC Wafer

  • Peng Li,
  • Julong Yuan,
  • Minghui Zhu,
  • Jianxing Zhou and
  • Binghai Lyu

14 April 2023

In this study, shear rheological polishing was used to polish the Si surface of six-inch 4H-SiC wafers to improve polishing efficiency. The surface roughness of the Si surface was the main evaluation index, and the material removal rate was the secon...

  • Article
  • Open Access
8 Citations
2,694 Views
15 Pages

14 April 2023

In this paper, a compact dual-band diplexer is proposed using two interdigital filters. The proposed microstrip diplexer correctly works at 2.1 GHz and 5.1 GHz. In the proposed diplexer, two fifth-order bandpass interdigital filters are designed to p...

  • Article
  • Open Access
2,237 Views
12 Pages

Structural Features and Water Resistance of Glass–Matrix Composites in a System of RNO3-KHSO4-P2O5 Containing Different Additives

  • Alexander Gorokhovsky,
  • Igor Burmistrov,
  • Denis Kuznetsov,
  • Alexander Gusev,
  • Bekzod Khaydarov,
  • Nikolay Kiselev,
  • Elena Boychenko,
  • Evgeny Kolesnikov and
  • Ksenia Prokopovich

14 April 2023

Low-temperature (350 °C) vitrification in a KNO3-NaNO3-KHSO4-NH4H2PO4 system, containing various additives to improve the chemical durability of the obtained material, was investigated. It was shown that a glass-forming system with 4.2–8.4...

  • Article
  • Open Access
19 Citations
4,749 Views
15 Pages

Laser Powder Bed Fusion of 316L Stainless Steel: Effect of Laser Polishing on the Surface Morphology and Corrosion Behavior

  • Jun Liu,
  • Haojun Ma,
  • Lingjian Meng,
  • Huan Yang,
  • Can Yang,
  • Shuangchen Ruan,
  • Deqin Ouyang,
  • Shuwen Mei,
  • Leimin Deng and
  • Yu Cao
  • + 1 author

14 April 2023

Recently, laser polishing, as an effective post-treatment technology for metal parts fabricated by laser powder bed fusion (LPBF), has received much attention. In this paper, LPBF-ed 316L stainless steel samples were polished by three different types...

  • Feature Paper
  • Review
  • Open Access
35 Citations
10,314 Views
25 Pages

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

  • Alessandro Gemelli,
  • Marco Tambussi,
  • Samuele Fusetto,
  • Antonio Aprile,
  • Elisabetta Moisello,
  • Edoardo Bonizzoni and
  • Piero Malcovati

14 April 2023

In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an impressive impact in the field of acoustic transducers, allowing the development of smart, low-cost, and compact audio systems that are employed in a wide variety of highl...

  • Article
  • Open Access
3 Citations
2,170 Views
19 Pages

Design and Application of Near Infrared LED and Solenoid Magnetic Field Instrument to Inactivate Pathogenic Bacteria

  • Deny Arifianto,
  • Suryani Dyah Astuti,
  • Perwira Annissa Dyah Permatasari,
  • Ilmi Arifah,
  • Ahmad Khalil Yaqubi,
  • Riries Rulaningtyas and
  • Ardiansyah Syahrom

14 April 2023

Purpose: This study aims to evaluate the efficiency of infrared LEDs with a magnetic solenoid field in lowering the quantity of gram-positive Staphylococcus aureus and gram-negative Escherichia coli bacteria, as well as the best exposure period and e...

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Micromachines - ISSN 2072-666X