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Journal: Micromachines, 2023
Volume: 14
Number: 1019
Article:
Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR
Authors:
by
L. Mollard, J. Riu, S. Royo, C. Dieppedale, A. Hamelin, A. Koumela, T. Verdot, L. Frey, G. Le Rhun, G. Castellan and C. Licitra
Link:
https://www.mdpi.com/2072-666X/14/5/1019
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