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Journal: Micromachines, 2023
Volume: 14
Number: 1100

Article: Improving Performance of Al2O3/AlN/GaN MIS HEMTs via In Situ N2 Plasma Annealing
Authors: by Mengyuan Sun, Luyu Wang, Penghao Zhang and Kun Chen
Link: https://www.mdpi.com/2072-666X/14/6/1100

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