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Journal: Micromachines, 2023
Volume: 14
Number: 1124

Article: Analysis of the Influence of the Motion State of Ultra-Thin Sapphire Based on Layer-Stacked Clamping (LSC)
Authors: by Zhixiang Chen, Shunkai Han, Ming Feng and Xianglei Zhang
Link: https://www.mdpi.com/2072-666X/14/6/1124

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