A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators
Abstract
:1. Introduction
2. Devices Design
2.1. MEMS Resonator
2.2. Micro-Hotplate
3. Oven-Controlled System
4. Experiments and Results
5. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
- Wu, Z.; Rais-Zadeh, M. A Temperature-Stable Piezoelectric MEMS Oscillator Using a CMOS PLL Circuit for Temperature Sensing and Oven Control. J. Microelectromech. Syst. 2015, 24, 1747–1758. [Google Scholar] [CrossRef]
- Jia, W.; Chen, W.; Xiao, Y.; Wu, Z.; Wu, G. A Micro-Oven-Controlled Dual-Mode Piezoelectric MEMS Resonator with ±400 PPB Stability over −40 to 80 °C Temperature Range. IEEE Trans. Electron Devices 2022, 69, 2597–2603. [Google Scholar] [CrossRef]
- Liu, C.-S.; Tabrizian, R.; Ayazi, F. A ±0.3 Ppm Oven-Controlled MEMS Oscillator Using Structural Resistance-Based Temperature Sensing. IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 2018, 65, 1492–1499. [Google Scholar] [CrossRef] [PubMed]
- Fei, S.; Ren, H. Temperature Characteristics of a Contour Mode MEMS AlN Piezoelectric Ring Resonator on SOI Substrate. Micromachines 2021, 12, 143. [Google Scholar] [CrossRef]
- Cai, P.; Xiong, X.; Wang, K.; Wang, J.; Zou, X. An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers. Micromachines 2021, 12, 1022. [Google Scholar] [CrossRef]
- Han, J.; Xiao, Y.; Chen, W.; Jia, W.; Zhu, K.; Wu, G. Temperature Compensated Bulk-Mode Capacitive MEMS Resonators with ±16 Ppm Temperature Stability over Industrial Temperature Ranges. J. Microelectromech. Syst. 2022, 31, 723–725. [Google Scholar] [CrossRef]
- Mussi, G.; Frigerio, P.; Gattere, G.; Langfelder, G. A MEMS Real-Time Clock with Single-Temperature Calibration and Deterministic Jitter Cancellation. IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 2021, 68, 880–889. [Google Scholar] [CrossRef] [PubMed]
- Kwon, H.-K.; Ortiz, L.C.; Vukasin, G.D.; Chen, Y.; Shin, D.D.; Kenny, T.W. An Oven-Controlled MEMS Oscillator (OCMO) with Sub 10mw, ±1.5 PPB Stability over Temperature. In Proceedings of the 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, 23–27 June 2019; pp. 2072–2075. [Google Scholar]
- Ahmed, H.; Rajai, P.; Ahamed, M.J. Temperature Frequency Stability Study of Extensional Mode N-Doped Silicon MEMS Resonator. AIP Adv. 2022, 12, 015319. [Google Scholar] [CrossRef]
- Schwartz, S.A.; Brand, O.; Beardslee, L.A. Temperature Compensation of Thermally Actuated, In-Plane Resonant Gas Sensor Using Embedded Oxide-Filled Trenches. J. Microelectromech. Syst. 2020, 29, 936–941. [Google Scholar] [CrossRef]
- Comenencia Ortiz, L.; Kwon, H.-K.; Rodriguez, J.; Chen, Y.; Vukasin, G.D.; Heinz, D.B.; Shin, D.D.; Kenny, T.W. Low-Power Dual Mode MEMS Resonators with PPB Stability Over Temperature. J. Microelectromech. Syst. 2020, 29, 190–201. [Google Scholar] [CrossRef]
- Wang, Y.; Cao, R.; Li, C.; Dean, R.N. Concepts, Roadmaps and Challenges of Ovenized MEMS Gyroscopes: A Review. IEEE Sens. J. 2021, 21, 92–119. [Google Scholar] [CrossRef]
- You, W.; Pei, B.; Sun, K.; Zhang, L.; Yang, H.; Li, X. Oven Controlled N++ [1 0 0] Length-Extensional Mode Silicon Resonator with Frequency Stability of 1 ppm over Industrial Temperature Range. J. Micromech. Microeng. 2017, 27, 095002. [Google Scholar] [CrossRef]
- Xu, C.; Segovia-Fernandez, J.; Kim, H.J.; Piazza, G. Temperature-Stable Piezoelectric MEMS Resonators Using Integrated Ovens and Simple Resistive Feedback Circuits. J. Microelectromech. Syst. 2017, 26, 187–195. [Google Scholar] [CrossRef]
- Pei, B.; Sun, K.; Yang, H.; Ye, C.; Zhong, P.; Yu, T.; Li, X. Oven-Controlled MEMS Oscillator with Integrated Micro-Evaporation Trimming. Sensors 2020, 20, 2373. [Google Scholar] [CrossRef] [PubMed]
- Liu, Z.; Du, L.; Zhao, Z.; Liu, J.; Wu, P.; Fang, Z. A Chip-Level Oven-Controlled System Used to Improve Accuracy of Silicon Piezoresistive Pressure Sensor. Measurement 2019, 143, 1–10. [Google Scholar] [CrossRef]
- Chen, W.; Jia, W.; Xiao, Y.; Feng, Z.; Wu, G. A Temperature-Stable and Low Impedance Piezoelectric MEMS Resonator for Drop-in Replacement of Quartz Crystals. IEEE Electron Device Lett. 2021, 42, 1382–1385. [Google Scholar] [CrossRef]
- Wu, G.; Xu, J.; Zhang, X.; Wang, N.; Yan, D.; Lim, J.L.K.; Zhu, Y.; Li, W.; Gu, Y. Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications. IEEE Trans. Ind. Electron. 2018, 65, 3576–3584. [Google Scholar] [CrossRef]
- Piazza, G.; Stephanou, P.J.; Pisano, A.P. Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators. J. Microelectromech. Syst. 2006, 15, 1406–1418. [Google Scholar] [CrossRef] [Green Version]
- Peczalski, A.; Zheng, X.-Q.; Lee, J.; Feng, P.X.-L.; Rais-Zadeh, M. Effects of Heterostructure Stacking on Acoustic Dissipation in Coupled-Ring Resonators. In Proceedings of the 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, USA, 22–26 January 2017; pp. 954–957. [Google Scholar]
- Zhang, M.; Zhao, Z.; Du, L.; Fang, Z. A Film Bulk Acoustic Resonator-Based High-Performance Pressure Sensor Integrated with Temperature Control System. J. Micromech. Microeng. 2017, 27, 045004. [Google Scholar] [CrossRef]
- Yuan, Z.; Yang, F.; Meng, F. Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor. Micromachines 2022, 13, 491. [Google Scholar] [CrossRef] [PubMed]
- Liu, Q.; Yao, J.; Wu, Y.; Wang, Y.; Ding, G. Two Operating Modes of Palladium Film Hydrogen Sensor Based on Suspended Micro Hotplate. Int. J. Hydrogen Energy 2019, 44, 11259–11265. [Google Scholar] [CrossRef]
- Xu, L.; Li, T.; Gao, X.; Wang, Y. Development of a Reliable Micro-Hotplate with Low Power Consumption. IEEE Sens. J. 2011, 11, 913–919. [Google Scholar] [CrossRef]
- Liu, Q.; Wang, Y.; Yao, J.; Ding, G. Impact Resistance and Static Strength Analysis of an Extremely Simplified Micro Hotplate with Novel Suspended Film. Sens. Actuators A Phys. 2018, 280, 495–504. [Google Scholar] [CrossRef]
- Prasad, M.; Dutta, P.S. Development of Micro-Hotplate and Its Reliability for Gas Sensing Applications. Appl. Phys. A 2018, 124, 788. [Google Scholar] [CrossRef]
- Joy, S.; Antony, J.K. Design and Simulation of a Micro Hotplate Using COMSOL Multiphysics for MEMS Based Gas Sensor. In Proceedings of the 2015 Fifth International Conference on Advances in Computing and Communications (ICACC), Kochi, India, 2–4 September 2015; pp. 465–468. [Google Scholar]
- Kumar, H.; Singh, K.K.; Sood, N.; Kumar, A.; Mittal, R.K. Design and Simulation of a Micro Hotplate for MEMS Based Integrated Gas Sensing System. In Proceedings of the 2014 IEEE Sensors Applications Symposium (SAS), Queenstown, New Zealand, 18–20 February 2014; pp. 181–184. [Google Scholar]
- Sidek, O.; Ishak, M.Z.; Khalid, M.A.; Abu Bakar, M.Z.; Miskam, M.A. Effect of Heater Geometry on the High Temperature Distribution on a MEMS Micro-Hotplate. In Proceedings of the 2011 3rd Asia Symposium on Quality Electronic Design (ASQED), Kuala Lumpur, Malaysia, 19–20 July 2011; pp. 100–104. [Google Scholar]
- Kharbanda, D.K.; Suri, N.; Khanna, P.K. Design, Fabrication and Characterization of Laser Patterned LTCC Micro Hotplate with Stable Interconnects for Gas Sensor Platform. Microsyst. Technol. 2019, 25, 2197–2204. [Google Scholar] [CrossRef]
- Li, D.; Ruan, Y.; Chen, C.; He, W.; Chi, C.; Lin, Q. Design and Thermal Analysis of Flexible Microheaters. Micromachines 2022, 13, 1037. [Google Scholar] [CrossRef] [PubMed]
- Zhao, W.-J.; Xu, D.; Chen, Y.-S.; Wang, X.; Shi, Y.-B. A Low-Temperature Micro Hotplate Gas Sensor Based on AlN Ceramic for Effective Detection of Low Concentration NO2. Sensors 2019, 19, 3719. [Google Scholar] [CrossRef] [Green Version]
- Simon, I.; Bârsan, N.; Bauer, M.; Weimar, U. Micromachined Metal Oxide Gas Sensors: Opportunities to Improve Sensor Performance. Sens. Actuators B Chem. 2001, 73, 1–26. [Google Scholar] [CrossRef]
- Sberveglieri, G.; Hellmich, W.; Müller, G. Silicon Hotplates for Metal Oxide Gas Sensor Elements. Microsyst. Technol. 1997, 3, 183–190. [Google Scholar] [CrossRef]
- Gotz, A.; Cané, C.; Lora-Tamayo, E. Specific Problems of FEM Thermal Simulations for Microsystems. In Simulation and Design of Microsystems and Microstructures, Proceedings MicroSIM 95; Adey, R.A., Lahrmann, A., Lesmöllmann, C., Eds.; WIT Press: Southampton, UK, 1995; pp. 137–146. ISBN 978-1-56252-314-5. [Google Scholar]
- Zhang, Y.; Hao, X.; Huang, W.; Zhang, W.; Wang, J. Active and Accurate Temperature Control of Terahertz Functional Devices Using a Micro-Hotplate System. J. Phys. D Appl. Phys. 2021, 55, 135108. [Google Scholar] [CrossRef]
- Chen, J.; Lu, Q.; Bai, J.; Xu, X.; Yao, Y.; Fang, W. A Temperature Control Method for Microaccelerometer Chips Based on Genetic Algorithm and Fuzzy PID Control. Micromachines 2021, 12, 1511. [Google Scholar] [CrossRef] [PubMed]
- Jeroish, Z.E.; Bhuvaneshwari, K.S.; Samsuri, F.; Narayanamurthy, V. Microheater: Material, Design, Fabrication, Temperature Control, and Applications—A Role in COVID-19. Biomed. Microdevices 2021, 24, 3. [Google Scholar] [CrossRef] [PubMed]
- Nordin, A.N.; Voiculescu, I.; Zaghloul, M. Micro-Hotplate Based Temperature Stabilization System for CMOS SAW Resonators. Microsyst. Technol. 2009, 15, 1187–1193. [Google Scholar] [CrossRef]
- Lahijani, B.V.; Badri Ghavifekr, H. Design of a SAW-Based Sensor Combined with a Micro-Hotplate for Biological Applications. In Proceedings of the 2010 17th Iranian Conference of Biomedical Engineering (ICBME), Isfahan, Iran, 3–4 November 2010; pp. 1–4. [Google Scholar]
- Tazzoli, A.; Piazza, G.; Rinaldi, M. Ultra-High-Frequency Temperature-Compensated Oscillators Based on Ovenized AlN Contour-Mode MEMS Resonators. In Proceedings of the 2012 IEEE International Frequency Control Symposium Proceedings, Baltimore, MA, USA, 21–24 May 2012; pp. 1–5. [Google Scholar]
- Pei, B.; Sun, K.; Zhong, P.; Yu, T.; Ye, C.; Yang, H.; Li, X. Micro-Oven-Controlled MEMS Oscillator Integrated with Micro-Evaporator for Frequency Trimming. In Proceedings of the 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, BC, Canada, 18–22 January 2020; pp. 1199–1202. [Google Scholar]
Parameter | Si | AlN |
---|---|---|
Young’s modulus (GPa) | 170 | 345 |
Mass density (kg·m−3) | 2329 | 3300 |
Thermal expansion coefficient (K−1) | 2.6 × 10−6 | 4.2 × 10−6 |
Thermal conductivity (W·m−1·K−1) | 130 | 60 |
Heat capacity (J·kg−1·K−1) | 700 | 600 |
Frequency (MHz) | Redesign | Year | Methods | Reference | Stability |
---|---|---|---|---|---|
582 | Yes | 2012 | Oven control | [41] | 125 ppm −45 °C to 85 °C |
78.5 | Yes | 2015 | Composite materials and oven control | [1] | 8 ppm −40 °C to 70 °C |
220 | Yes | 2016 | Oven control | [14] | 100 ppm −35 °C to 85 °C |
10.48 | Yes | 2020 | Doping and oven control | [42] | 2.6 ppm −40 °C to 85 °C |
42.7 | Yes | 2022 | Doping and oven control | [2] | ±0.4 ppm −40 °C to 80 °C |
5.7 | No | 2023 | Oven control | This work | 3.5 ppm −50 °C to 125 °C |
Disclaimer/Publisher’s Note: The statements, opinions and data contained in all publications are solely those of the individual author(s) and contributor(s) and not of MDPI and/or the editor(s). MDPI and/or the editor(s) disclaim responsibility for any injury to people or property resulting from any ideas, methods, instructions or products referred to in the content. |
© 2023 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
Share and Cite
Feng, T.; Yu, D.; Wu, B.; Wang, H. A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators. Micromachines 2023, 14, 1222. https://doi.org/10.3390/mi14061222
Feng T, Yu D, Wu B, Wang H. A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators. Micromachines. 2023; 14(6):1222. https://doi.org/10.3390/mi14061222
Chicago/Turabian StyleFeng, Tianren, Duli Yu, Bo Wu, and Hui Wang. 2023. "A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators" Micromachines 14, no. 6: 1222. https://doi.org/10.3390/mi14061222