Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching

Dr. Remco J. Wiegerink is an Associate Professor in the Integrated Devices and Systems group, MESA+ Institute for Nanotechnology, the University of Twente, Enschede, The Netherlands. He obtained an MSc in Electrical Engineering on the subject of a fully integrated ultra-low-frequency low-pass filter for offset canceling in integrated audio amplifiers from the University of Twente in 1988, and a PhD in Electrical Engineering from the same university in 1992 on the subject of MOS translinear circuits. His research has focused on mechanical microsensors, electronic interfacing of sensors, and packaging. Highlights include a silicon load cell with distributed capacitive readout, distributed thermal flow sensors using resistor arrays, an RF power sensor based on sensing the electrical force between the signal line and a suspended electrode, flow sensors based on the flow-sensing hairs of crickets, and a micro-Coriolis flow sensor. Dr. Wiegerink is (co-)author of two books, several book chapters, and more than 250 journal and conference papers.

Prof. Dr. Joost C. Lötters is the Director of Research & Development of the Innovative Sensor Technology IST-AG and a Professor at the University of Twente & TU Delft, The Netherlands. He earned an MSc and a PhD in Electrical Engineering on a highly symmetrical triaxial capacitive accelerometer from the University of Twente in 1993 and 1997, respectively. He joined the Transducer Science and Technology (TST) group of the MESA+ Institute for Nanotechnology at the University of Twente as a part-time Associate Professor in 2010. Since then, his research has focused on microfluidic handling systems, i.e., integrated systems for the accurate measurement, control, dosage, and analysis of (micro) flows. Highlights include a micro-Coriolis flow sensor, a microproportional control valve, a micro-Wobbe index meter, and a single-chip multiparameter flow measurement system comprising a thermal and Coriolis flow sensor, pressure sensor, thermal conductivity sensor, and dielectric constant sensor, e.g., to determine the composition or energy content of gas or liquid mixtures.