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Journal: Micromachines, 2024
Volume: 15
Number: 1333
Article:
A Review on Resonant MEMS Electric Field Sensors
Authors:
by
Guijie Wang, Pengfei Yang, Zhaozhi Chu, Lifang Ran, Jianhua Li, Bo Zhang and Xiaolong Wen
Link:
https://www.mdpi.com/2072-666X/15/11/1333
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