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Journal: Micromachines, 2024
Volume: 15
Number: 1333

Article: A Review on Resonant MEMS Electric Field Sensors
Authors: by Guijie Wang, Pengfei Yang, Zhaozhi Chu, Lifang Ran, Jianhua Li, Bo Zhang and Xiaolong Wen
Link: https://www.mdpi.com/2072-666X/15/11/1333

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