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Journal: Micromachines, 2024
Volume: 15
Number: 1409
Article:
In Situ Pre-Metallization Cleaning of CoSi2 Contact-Hole Patterns with Optimized Etching Process
Authors:
by
Tae-Min Choi, Eun-Su Jung, Jin-Uk Yoo, Hwa-Rim Lee, Songhun Yoon and Sung-Gyu Pyo
Link:
https://www.mdpi.com/2072-666X/15/12/1409
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