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Volume 15
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Review

Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications

by
Zhuoyue Zheng
1,
Chen Wang
2,
Linlin Wang
2,
Zeyu Ji
1,
Xiaoxiao Song
3,*,
Pui-In Mak
1,
Huafeng Liu
4,* and
Yuan Wang
1,*
1
Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
2
Department of Electrical Engineering-MNS, University of Leuven, 3000 Leuven, Belgium
3
School of Physics and Information Engineering, Jiangsu Second Normal University, Nanjing 210013, China
4
MOE Key Laboratory of Fundamental Physical Quantities Measurement, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China
*
Authors to whom correspondence should be addressed.
Micromachines 2024, 15(3), 352; https://doi.org/10.3390/mi15030352
Submission received: 8 December 2023 / Revised: 1 February 2024 / Accepted: 7 February 2024 / Published: 29 February 2024
(This article belongs to the Special Issue Piezoelectric Actuators and Sensors: Materials, Devices and Applications, 2nd Edition)
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Abstract

The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental noise, and structural innovation are posed. To collect and summarize the recent advances in this subject, this paper presents a concise review concerning the transduction mechanism, diverse mechanical structure topologies, and effective methods of noise reduction for high-performance MEMS microphones with a dynamic range akin to the audible spectrum, aiming to provide a comprehensive and adequate analysis of this scope.
Keywords: MEMS microphone; environmental noise-cancelling; directional microphone; capacitive microphone; piezoelectric microphone MEMS microphone; environmental noise-cancelling; directional microphone; capacitive microphone; piezoelectric microphone

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MDPI and ACS Style

Zheng, Z.; Wang, C.; Wang, L.; Ji, Z.; Song, X.; Mak, P.-I.; Liu, H.; Wang, Y. Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications. Micromachines 2024, 15, 352. https://doi.org/10.3390/mi15030352

AMA Style

Zheng Z, Wang C, Wang L, Ji Z, Song X, Mak P-I, Liu H, Wang Y. Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications. Micromachines. 2024; 15(3):352. https://doi.org/10.3390/mi15030352

Chicago/Turabian Style

Zheng, Zhuoyue, Chen Wang, Linlin Wang, Zeyu Ji, Xiaoxiao Song, Pui-In Mak, Huafeng Liu, and Yuan Wang. 2024. "Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications" Micromachines 15, no. 3: 352. https://doi.org/10.3390/mi15030352

APA Style

Zheng, Z., Wang, C., Wang, L., Ji, Z., Song, X., Mak, P.-I., Liu, H., & Wang, Y. (2024). Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications. Micromachines, 15(3), 352. https://doi.org/10.3390/mi15030352

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