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Journal: Micromachines, 2024
Volume: 15
Number: 881

Article: SOI MEMS Electro-Thermal Actuators for Biomedical Applications: Operation in 0.9% NaCl Solution
Authors: by Thomas Sciberras, Ivan Grech, Marija Demicoli, Bertram Mallia, Nicholas Sammut and Pierluigi Mollicone
Link: https://www.mdpi.com/2072-666X/15/7/881

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