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Journal: Micromachines, 2024
Volume: 15
Number: 881
Article:
SOI MEMS Electro-Thermal Actuators for Biomedical Applications: Operation in 0.9% NaCl Solution
Authors:
by
Thomas Sciberras, Ivan Grech, Marija Demicoli, Bertram Mallia, Nicholas Sammut and Pierluigi Mollicone
Link:
https://www.mdpi.com/2072-666X/15/7/881
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