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Journal: Micromachines, 2024
Volume: 15
Number: 1028

Article: High-Resolution Rotation-Measuring System for MEMS Ultrasonic Motors Using Tunneling Magnetoresistance Sensors
Authors: by Jiangbo He, Qiuyue Feng, Yu Chen, Tianyu Yang, Xiaoshi Li and Wu Zhou
Link: https://www.mdpi.com/2072-666X/15/8/1028

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